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Micro/Nano Lithography

Armin Knoll: 3D nanofabrication using heatable probes

Feedback mechanism allows new technique to control depth to 1 nm.

20 June 2014, SPIE Newsroom. DOI: 10.1117/2.3201406.04

Armin Knoll first joined the IBM Research Zurich Lab as a post-doctoral research fellow in 2003, working on two-photon lithography for mechanical logic applications. From 2005 to 2006, he became a visiting scientist and worked on retention properties of polymers for probe data storage.

Since 2006, he has been a permanent research staff member, working on the design and characterization of polymers for probe data storage. This project was conducted in close collaboration with external industry partners to bring a probe-based data storage device to the market. It received high external visibility as the "Millipede" project.

Since 2008, Armin has been co-leading a new project on 3D nanofabrication using heatable probes. Building on the strong skills and collaborations established in the Millipede project, this new method was established to create high-resolution 3D structures with unprecedented quality.

He has received several IBM awards for his work, and a European Research Council award for a project entitled "Topographically guided placement of asymmetric nano-objects."