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Micro/Nano Lithography

Satoshi Kawata: Optical 3D nano-fabrication: top-down and bottom up approaches

Presented at SPIE Advanced Lithography 2017.

14 March 2017, SPIE Newsroom. DOI: 10.1117/2.3201703.11

Satoshi Kawata, Osaka University (Japan)In this keynote presentation, Satoshi Kawata of Osaka University, discusses top-down and bottom-up approaches to the fabrication of 3D complex nano-structures in a large scale.

As a top-down method, laser-beam 3D drawing with two-photon photo-polymerization has made 3D micro-machines of plastic. Two-photon isomerization has been applied to data recording in multi-layer (3D) rewritable optical data-storage, and two-photon photo-reduction to the fabrication of 3D metallic metamaterials.

As a bottom-up method, self-growing of plastic fiber structures based on optical self-focusing, and self-growth of metallic fractal nano-structures based on plasmmonic triggering and chemical reduction will be shown.

While nanotechnology has a great potential for fabricating advanced nano-devices and materials that found the applications in sciences, industries, and medicine, it is limited to the surface modification technology.

E-beam, ion-beam, light-beam lithography and scanning probe microscopes modify the surface of substrate or film by deposition, etching, oxidization, or modification. Nanotech devices now available are all basically in two dimensions, such as nano-electronic circuits, high-density data-storage, liquid-crystal displays, and MEMS/ NEMS.

Satoshi Kawata is a distinguished professor of Osaka University and an honorary scientist at RIKEN. He serves as the President of Japan Society of Applied Physics and as a General Chair of Nano Science and Engineering for SPIE. His research topics includes near field optics, plasmonics, laser trapping, and two-photon nano-engineering. He is a fellow of OSA, SPIE, IOP, and JSAP.