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Micro/Nano Lithography

Multimedia presentations: Plenary talks from SPIE Advanced Lithography 2013

SPIE Advanced Lithography 2013 featured plenary presentations from leaders in the lithography industry.

26 February 2013, SPIE Newsroom. DOI: 10.1117/2.1201302.98


Contact Printing to EUV: Lessons Learned from the Art of Lithography

William T. Siegle Independent Consultant and ASML Advisory Board Member

William T. Siegle
Independent Consultant and ASML Advisory Board Member

View presentation (34 min.)

 

 

The Evolution of EDA Alongside Rapid Silicon Technology Innovation

Howard Ko Senior VP and General Manager, Synopsys' Silicon Engineering Group
Howard Ko
Senior VP and General Manager, Synopsys' Silicon Engineering Group

View presentation (45 min.)

 


The New U.S. Patent Law: What You Need to Know and How It Will Affect Your Strategy

Charles R. Szmanda, The Patent Practice of Szmanda & Shelnut, LLC
Charles R. Szmanda, James G. Shelnut
The Patent Practice of Szmanda & Shelnut, LLC

View presentation (46 min.)