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Micro/Nano Lithography

Air bearing stage

Physik Instrumente

PI (Physik Instrumente) L.P. will showcasing the new A-311 PIglide IS Series compact, planar XY air bearing stage at SPIE Photonics West 2016 in San Francisco, 13-18 February.  

The PIglide IS planar XY air-bearing stage is a low profile, high precision alternative to stacked XY stages. The fully preloaded air bearing puck floats in both X and Y directions on a common base, providing smooth, frictionless motion. Ideal for metrology, wafer inspection, laser marking, microscopy, scanning, and other precision motion applications. The efficient, compact design saves space in tight machine designs.

Ironless linear motors provide smooth motion with no cogging or attractive forces. Optical linear encoders provide position feedback information down to 1nm, depending on interpolation. The PIglide IS can be coupled with a variety of industry-leading digital controls and drives that offer advanced algorithms to improve dynamic performance and error compensation and a wide suite of software development tools

Also at Photonics West, PI will display their Fast Multchannel Photonics Alignment system, a finalist in the 2016 Photonics Prism Awards.