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Optical Design & Engineering

Deposition rate controller

Henniker

The latest TMC13 Deposition Rate Controller from Henniker Scientific is further extended with 0.01Hz frequency resolution and support for multi-crystal sensors with each crystal being controlled individually.

It is a versatile, multi-channel device that has been designed for repeatebale, reliable and accurate control of film thickness and rate in vacuum based thin film deposition processes.

The feature-rich touch-screen interface can be easily customised to suit a particular operator preference and can be operated in both automatic and manual modes, providing a direct display and control of film thickness, deposition rate and frequency value for up to 6 independent
deposition sources.

The device also includes shutter relays for each channel, two analogue inputs for connection of pressure gauges, and two re-transmission analogue outputs as standard, as well as an extensive and fully editable materials library.

www.henniker-scientific.com