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MOEMS-MEMS 23 - 28 January 2010
The Moscone Center
San Francisco, California, USA

Access the latest research on Micro- and Nanofabricated Electromechanical and Optical Components at MOEMS-MEMS

SPIE MOEMS-MEMS presents over 225 research papers on micro- and nanofabrication. Micro- and nanofabricated electromechanical and optical components, created by batch processing, provide the missing links to the mass-produced miniaturized products and systems of the future.

8 MOEMS-MEMS conferences in 2 program tracks:
View MOEMS-MEMS abstracts PDF

  • Devices/Applications/Reliability
  • Micro/Nanofabrication

Take advantage of the MOEMS-MEMS professional courses:

  • Micro- and Nanofluidics - Technology and Applications
  • Introduction to MicroMachining Using Lasers
  • Micromachining with Femtosecond Lasers
  • Building Robust MEMS/MOEMS Reliability Systems




2010 Symposium Chair                  2010 Symposium Cochair

Harald Schenk

Thomas J. Suleski
Univ. of North Carolina at Charlotte (USA)

Thomas Suleski

Harald Schenk
Fraunhofer Institute for Photonic Microsystems (Germany)



Steering Committee Chair

M. Edward Motamedi

M. Edward Motamedi
Revoltech Microsystems
(USA)


Steering Committee

Marilyn Gorsuch,
SPIE
Albert K. Henning, NanoInk, Inc.
Larry J. Hornbeck,
Texas Instruments Inc.
James W. Knutti, Acuity, Inc.
Rajeshuni Ramesham, Jet Propulsion Lab.
Ray Roop,
Freescale Semiconductor, Inc.
Harald Schenk,
Fraunhofer Institute for Photonic Microsystems
Thomas J. Suleski,
Univ. of North Carolina at Charlotte

Important Dates

Abstract Due:
13 July 2009

Author Notification:
21 September 2009

Post-deadline Submissions:
Late abstract submissions may be accepted subject to chair approval

MOEMS/MEMS Manuscripts Due:
21 December 2009


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