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Abeam Technologies, Inc.

Company Description
Abeam Technologies Inc. develops software to simulate and optimize micro and nano-fabrication processes: CD-metrology, e-beam lithography, and dry etch.
myCD is a model based software to automatically extract CDs, LER, wall angles from SEM images. CHARIOT is the world’s most advanced Monte Carlo software to calibrate and optimize CD-SEM and EBL. Other products involve calibration chips for e-beam systems and CD-SEM; as well as simulation of double patterning.
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Contact Information


5286 Dunnigan Ct
Castro Valley,CA
United States