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SPIE Photomask Technology
20 - 21-September 2011
Monterey, California, USA

Micro Lithography Inc.

Address
Micro Lithography Inc.
1257 Elko Dr
Sunnyvale, CA
United States
Company Description
Featured Product: Pellicles

MLI is featuring pellicles formulated to yield high rates of transmission and long lifetimes for UV exposure. Our complete line of pellicle films ranges from broadband, g-/i-line to DUV (KrF-248nm and Arf-193nm). MLI's DUV pellicles have the lowest outgassing materials available in the market today.
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Important Dates

To better accommodate the needs of the Photomask community, late abstact submissions may be sent to Pat Wight at patw@spie.org . If accepted, they will be placed in the poster session.

Manuscripts Due
23 August 2012


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