Pacifico Yokohama
    Yokohama, Japan
    18 - 20 April 2006
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    Past Event Overview

    Final Program PDF

    • Photomask Manufacturing (Inclusive of RET-masks)
    • Photomask Inspection, Repair and Metrology (Tools and Technologies)
    • Data Processing and Design
    • RET and Mask Related Lithography Technologies
    • NGL Mask Technologies
    • Mask Business and Management

    Symposium in Cooperation with:

    The Japan Society of Applied Physics
    Japan Society for Precision Engineering
    The Institute of Electrical Engineers of Japan
    European Mask Conference - EMC

    Symposium Chair

    Masanori Komuro,
    The National Institute of Advanced Industrial Science and Technology (AIST), Japan