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    Past Event Overview

    Symposium Chairs:

    Tiziana Di Matteo
    The Australian National Univ. (Australia)

    Vijay K. Varadan
    Univ. of Arkansas (USA)

    Microelectronics, MEMS, and Nanotechnology 2007

    Microelectronics, MEMS, and Nanotechnology 2007 (AU07) offered attendees the opportunity for in-depth communication with researchers and developers in areas such as smart materials, smart structures, smart micro/nano- electronics devices and systems, micro- and nano- technology with special emphasis on packaging and integration of MEMS and NEMS for diverse application areas as well as biomedical applications such as bio-surveillance systems.

    This symposium attracted 341 submissions from 27 countries - with extensive emphasis on micro and nanofabrication technologies.

    Topics ranged:

    • Microelectronics: Design, Technology,& Packaging
    • Smart Structures, Devices, and Systems
    • Device & Process Technologies for Microelectronics, MEMS, Photonics & Nanotechnology
    • Photonics: Design, Technology, & Packaging
    • Complex Systems

    Thank you to everyone who helped make SPIE Microelectronics, MEMS, and Nanotechnology 2007 a great success.

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