• Advanced Lithography
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San Jose Marriott and San Jose Convention Center
San Jose, California, United States
26 February - 2 March 2017
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Review conference details by clicking on the titles below. These details include paper titles, authors, schedules and abstracts. View Proceedings from last year.

SPIE conference papers are published in the Proceedings of SPIE and available via the SPIE Digital Library, the world’s largest collection of optics and photonics research.  

The Proceedings are indexed in Web of Science, Scopus, Ei Compendex, Inspec, Google Scholar, Astrophysical Data System (ADS), DeepDyve, ReadCube, CrossRef, and other scholarly indexes, and are widely accessible to leading research organizations, conference attendees, and individual researchers. 

Important Author Dates

Abstract Due Date
Late submission will still be considered for acceptance by the conference chairs. Please submit as soon as possible to the desired comference via the web.

Author Notification
24 October 2016

Manuscripts Due
30 January 2017


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