• Advanced Lithography
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San Jose Marriott and San Jose Convention Center
San Jose, California, United States
26 February - 2 March 2017
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Awards Announcements

Award Announcements for Conference 10145—Metrology, Inspection, and Process Control for Microlithography
Monday 27 February. . . . . . . . . . . 11:00 AM to 11:10 AM
Presentation of the 2016 Diana Nyyssonen Memorial Award for Best Paper
Award Sponsored by
 

Thursday 2 March. . . . . . . . . . . 10:30 AM to 10:40 AM
Presentation of the 2017 Karel Urbanek Best Student Paper Award
Award Sponsored by

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Award Announcements for Conference 10146—Advances in Patterning Materials and Processes
Monday 27 February. . . . . . . . . . . 11:00 AM to 11:10 AM
Presentation of the 2016 C. Grant Willson Best Paper Award
Presentation of the 2016 Hiroshi Ito Memorial Award for the Best Student Paper

These Two Awards Above Sponsored by

Presentation of the 2016 Jeffrey Byers Memorial Best Poster Award
Award Sponsored by

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Award Announcement for Conference 10147—Optical Microlithography
Thursday 2 March. . . . . . . . . . . 10:30 AM to 10:35 AM
Presentation of the 2017 Cymer Leadership Award for Best Student Paper

Award Sponsored by

Important Dates

Abstracts Due
Late submissions may be considered. Please send your submission to Pat Wight, SPIE Conference Program Coordinator.

Author Notification
24 October 2016

Manuscripts Due
30 January 2017


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