• Advanced Lithography
    Invitation
    Award Announcements
    Conferences
    Courses
    Exhibition
    Sponsors
    For Authors and Presenters
    For Chairs and Committees
    For Exhibitors
    Become a Sponsor
San Jose Marriott and San Jose Convention Center
San Jose, California, United States
25 February - 1 March 2018
Search Open Calls:    go
Print PageEmail Page

Be a part of the leading event for the lithography community

2018 Call for Papers is now open

Participate in the leading global lithography event. Present your work in optical lithography, metrology, or EUV. Share the latest advancements at the meeting where leaders come to solve challenges in lithography, patterning technologies, and materials for the semiconductor industry.

Present your latest research and make an impact on the semiconductor industry. Submit your abstract today.

Abstracts Due
28 August 2017

Author Notification
23 October 2017

Manuscripts Due
29 January 2018

The 2018 Call for Papers is open

View the Online Call for Papers
Download the 2018 Call for Papers PDF
View the submission guidelines

7 Conferences and 600 papers

600 papers divided into 7 conferences address various topic areas

2018 conference topic areas:

• Extreme Ultraviolet (EUV) Lithography
• Novel Patterning Technologies
• Metrology, Inspection, and Process Control for Microlithography
• Advances in Patterning Materials and Processes
• Optical Microlithography
• Design-Process-Technology Co-optimization for Manufacturability
• Advanced Etch Technology for Nanopatterning

Company participation is an important part of this event

Become a sponsor
Become and exhibitor

Proceedings of SPIE

SPIE conference papers are published in the Proceedings of SPIE and available via the SPIE Digital Library, the world’s largest collection of optics and photonics research.  

The Proceedings are indexed in Web of Science, Scopus, Ei Compendex, Inspec, Google Scholar, Astrophysical Data System (ADS), DeepDyve, ReadCube, CrossRef, and other scholarly indexes, and are widely accessible to leading research organizations, conference attendees, and individual researchers. 

Connect with SPIE

#SPIElitho FB Twitter Check out Photonics West on Instagram SPIE.tv SPIE LinkedIn Group

Receive email updates on SPIE Advanced Lithography

Learn more about the 2017 event