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San Jose Marriott and San Jose Convention Center
San Jose, California, United States
26 February - 2 March 2017
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Present your research at the premier event for the semiconductor lithography community

Call for Papers for SPIE Advanced Lithography in San Jose, California, USA

Present and publish your research at SPIE Advanced Lithography 2017, the premier event for the lithography community. For over 40 years, SPIE has brought together industry leaders to solve the latest challenges in lithography and patterning in the semiconductor industry.

Call for Papers 2017
Late submissions will still be considered for acceptance by the conference chairs. Please submit as soon as possible to the desired conference via the web.
 • See the list below to submit a paper online
 • Download the 2017 Call for Papers PDF (1 MB PDF)

Conference topics for semiconductor lithography

Click on the 2017 topics below to submit your paper:
Extreme Ultraviolet (EUV) Lithography
Emerging Patterning Technologies
Metrology, Inspection, and Process Control for Microlithography
Advances in Patterning Materials and Processes
Optical Microlithography
Design-Process-Technology Co-optimization for Manufacturability
Advanced Etch Technology for Nanopatterning

SPIE conference papers are published in the Proceedings of SPIE and available via the SPIE Digital Library, the world’s largest collection of optics and photonics research.  

The Proceedings are indexed in Web of Science, Scopus, Ei Compendex, Inspec, Google Scholar, Astrophysical Data System (ADS), DeepDyve, ReadCube, CrossRef, and other scholarly indexes, and are widely accessible to leading research organizations, conference attendees, and individual researchers. 


Doug Resnick of Canon Nanotechnologies

View this video on the value of attending SPIE Advanced Lithography


Review the 2016 Event
 • Onsite news and photos
 • Final Technical Program (4 MB PDF)
 • Technical Abstracts (1 MB PDF)
 • Exhibition Guide (7 MB PDF)

SPIE conference papers are published in the Proceedings of SPIE and available via the SPIE Digital Library, the world’s largest collection of optics and photonics research.  

The Proceedings are indexed in Web of Science, Scopus, Ei Compendex, Inspec, Google Scholar, Astrophysical Data System (ADS), DeepDyve, ReadCube, CrossRef, and other scholarly indexes, and are widely accessible to leading research organizations, conference attendees, and individual researchers. 


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Important Dates

Abstracts Due
Late submissions will be considered. Please submit as soon as possible online.

Author Notification
24 October 2016

Manuscripts Due
30 January 2017


Canon


Browse Defense, Security, and Sensing 2011 papers


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