• Advanced Lithography 2015
    For Authors/Presenters
    For Chairs/Committees
    For Exhibitors
San Jose Marriott and San Jose Convention Center
San Jose, California, United States
22 - 26 February 2015
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The #1 event for Lithographic Technologies, Materials, and more. Call for Papers in May

See what happened in 2014: onsite news and photos

SPIE Advanced Lithography, the premier conference for the lithography community. For 39 years, SPIE has brought together this community to address challenges presented in fabricating next-generation integrated circuits.

2015 Dates: 22 - 26 February

See what happened in 2014: onsite news and photos

A variety of events, all in one week
600 presentationsspecial events * courses * exhibition

Technical Program (PDF 6 MB)

Technical Abstracts (PDF 2 MB)

Exhibition Guide (PDF 4 MB)

Papers willl be accepted in the following areas:
• Extreme Ultraviolet (EUV) Lithography
• Alternative Lithographic Technologies
• Metrology, Inspection, and Process Control for Microlithography
• Advances in Patterning Materials and Processes
• Optical Microlithography
• Design-Process-Technology Co-optimization for Manufacturability
• Advanced Etch Technology for Nanopatterning
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2014 Plenary Speakers
 William H. Arnold, ASML

My Year as SPIE President: What Does the Society Do and Who Makes It Happen?

William H. Arnold
Chief Scientist and VP of Technology Development Center, ASML
2013 SPIE President

 Joseph Sawicki, Mentor Graphics

Making the Impossible: Dealing with Patterns Throughout the Design and Manufacturing Flow

Joseph Sawicki
VP and GM, Design-to-Silicon Division,
Mentor Graphics Corp.

 Akihisa Sekiguchi, Tokyo Electron Ltd.

Beyond Scaling: Opportunities and Approaches

Akihisa Sekiguchi
Corporate VP and Deputy General Manager,
Tokyo Electron Ltd.

Plenaries sponsored by:
The Advanced Lithography Exhibition
Come meet the industry's top semiconductor suppliers, integrators, and manufacturers. For 35 years SPIE Advanced Lithography has been the premier international event that drives the future of lithography research and applications and the exhibition is where you can see the latest products and meet with the leaders in the field.
Learn more on the Exhibition website

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