SPIE Advanced Lithography: Intl Conference on Micro and Nanolithography

Plan to attend the most important event in semiconductor lithography.

Save $100 over onsite pricing
if you register by 5 February 2010

One registration fee gives you access to:
•	The Conference Program, featuring over 600 papers from the world's top researchers. Download a printable Conference Program (PDF).
•	Plenary Presentations presented by the industry's leaders
•	Poster Receptions offering refreshments and one-to-one interaction with authors
•	Numerous evening panel discussions and debates
•	The Exhibition, where leading companies display their latest products
•	Printed or CD-ROM conference proceedings
•	Daily breakfast breads and coffee breaks
•	Lunches and dessert snacks

Conference topics:

•	EUV—sources, components, yields, resists, modeling
•	Alternative Technologies—maskless, nano-imprint, directed self-assembly
•	Optical lithography—computational, double patterning, SMO, OPC, RET
•	Metrology, inspection, process control, LER/LWR, mask litho, DBM
•	Resists materials and processing, double patterning, immersion, LER
•	DFM/DPI—co-optimization, layout, electrical, methodologies

Plenary Speakers:

Kazuo Ushida
President
Precision Equipment Co.
Nikon Corp.

Eric Chen
Managing Director
Silver Lake Partners

Sam Sivakumar
Director of Lithography
Portland Technology Development Group
Intel Corp.

Other program information:

•	21 Courses, taught by hand-picked instructors, cover basic through advanced topics
•	See the current list of Authors, chairs, and presenters, including details of their conference participation

Why do your colleagues return to SPIE Advanced Lithography year after year?

•	98% say that the technical topics are timely and relevant
•	93% say they found valuable opportunities to connect with colleagues
•	96% would recommend the event to a colleague
•	94% received valuable information they can apply in their work
-Survey of 2009 attendees

Interested in exhibiting?

•	View the list of exhibitors
•	Download the Exhibitor Contract
•	Find an ideal location on the exhibition floor plan
•	View all the details online at SPIE Advanced Lithography Exhibition

Optical lithography, resists, metrology, EUV, immersion, and more at SPIE Advanced Lithography