Join your colleagues working on optical lithography, resists, metrology, EUV, immersion, and more

Lisa Su, Senior Vice President and Chief Technology Officer for Freescale Semiconductor, Inc. delivers her Plenary Presentation at the 2009 meeting.

Drive the technology roadmap by presenting and publishing your research at SPIE Advanced Lithography.

Submit your abstract and keep R+D moving forward

Abstract submissions are being accepted in:

•	Optical Microlithography
•	EUV lithography
•	Advances in Resist Materials and Processing Technology
•	Metrology, Inspection, and Process Control
•	Alternative Lithographic Technologies
•	Design for Manufacturability through Design-process Integration

Download the Call for Papers (PDF).

Why do industry leaders return to SPIE Advanced Lithography year after year?

SPIE Advanced Lithography “is equivalent to the world championship of lithography”

“The proceedings are widely cited and you can gain visibility for your research efficiently and effectively”

SPIE Advanced Lithography is the "top event in this field".

Three reasons to present a paper this year:
1.	Increase your chances of securing approval and support to attend
2.	Keep your company visible at the industry's most important meeting
3.	Get published within 8 weeks of the meeting, with your paper available in SPIE Proceedings and Digital Library, and indexed worldwide in INSPEC, Ei Compendex, and other leading databases.

Submit your abstract and help define the technology roadmap

"If you don’t innovate during this downturn, the market will come back, but you won’t”
	-Bernard Meyerson 2009 Plenary Speaker Vice President for Strategic Alliances and CTO IBM Systems and Technology Group

Interested in exhibiting?

•	View the list of exhibitors
•	Download the Exhibitor Contract
•	Find an ideal location on the exhibition floorplan
•	View all the details online at SPIE Advanced Lithography Exhibition

2009 Meeting Highlights
The 2009 meeting concluded Friday 27 February.

See an overview of the 2009 meeting, or the 2009 Technical Program (PDF).

Read Onsite News from 2009, featuring program highlights and photos.