Showcase your company’s latest equipment, technology, and services to the leaders of the lithography industry. For 34 years SPIE Advanced Lithography has been the premier international conference that drives the future of lithography research and applications. It’s the one event all your target customers attend to present and hear the latest developments from around the world.
Download the Exhibition Prospectus (PDF)
Reserve your place today and put your company at the industry’s leading edge.
Key resources:
Exhibiting companies display technology related to all aspects of semiconductor production:
| • | Lithography: immersion, double patterning, e-beam, EUV, optical/laser, RET |  |
| • | Metrology, inspection, OPC, and process control |
| • | Electronic imaging components, equipment, and systems |
| • | Resist materials and processing |
| • | Nano-imprint |
| • | Design for Manufacturability/DPI |
| • | IC and chip fabrication/DPI |
Exhibition Dates and Hours:
Tuesday 23 February Wednesday 24 February | 10:00 am to 5:00 pm 10:00 am to 4:00 pm |

Contact the SPIE Sales Team:
In Germany, Austria, Luxembourg, Lichtenstein, Italy and Switzerland
Hermann Doster
Tel: +49 (0)7025/841 806
Fax: +49 (0)7025/842 983
hermann@spieeurope.org
For all other inquiries
Teresa Roles-Meier
Tel: +1 360 685 5445
Fax: +1 360 647 1445
teresar@spie.org