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In memoriam: Oliver Kienzle, semiconductor industry leader

03 October 2014

Oliver Kienzle
Oliver Kienzle at
SPIE Photomask 2014

SPIE Member Oliver Kienzle, CEO and Head of the Strategic Business Unit Semiconductor Metrology Systems at semiconductor equipment manufacturer Carl Zeiss SMS GmbH, passed away 27 September 2014. He was 49.

Born in Wiesbaden, Doctor Kienzle studied physics at the Technical University of Darmstadt and earned his doctorate in electron microscopy at the Max Planck Institute for Metal Research in Stuttgart in 1999, when he then joined the Zeiss Group.

He worked in the former Lithos GmbH as Project Manager for electron projection lithography. After transferring to LEO GmbH, he switched to the field of electron optics for high-throughput wafer inspection, which resulted in the Advanced E-Beam Modules (AEM) field of business.

He had been the Managing Director of the strategic Semiconductor Metrology Systems (SMS) business unit since 2004. The division develops, manufactures, and sells equipment for photomask manufacturing and the semiconductor industry.

Working untiringly to move Carl Zeiss SMS GmbH forward, he built over many years the high standing and reputation of the company among customers and partners around the globe. With his expertise and experience, his poise and strong personality, he brought about sustained success and made a great contribution to Zeiss as well as the semiconductor industry.

Beside his dedication to his job and to Zeiss, Kienzle loved to go fly-fishing. When he was only six years old, he received his first fishing rod, marking the beginning of a lifelong passion. He also enjoyed photography, passionate about the search for a matching photo motif, and collected objective lenses which he guarded jealously.

Dr. Kienzle was an author of several SPIE conference proceedings, with the most recent, "EUV mask infrastructure Don't miss the train!", presented at SPIE Photomask Technology 2014 in Monterey, California, in September.