Dr. C. Grant Willson, an SPIE Fellow and professor of chemical engineering at the University of Texas at Austin, has been named recipient of the 2007 SEMI Award for North America.
Willson's contributions to the development of chemically amplified photoresists over the past 20 years have helped enable the evolution of new generations of semiconductor lithography processes and tools with significant productivity improvements, said Pat Gardner of the North American Programs group at SEMI.
In 2005 SPIE awarded Willson the Frits Zernike Award for Microlithography. He has received numerous other awards for technical achievements and teaching, and has chaired conferences for the SPIE Advanced Lithography symposium for many years.
He holds the Rashid Engineering Regents Chair in the College of Natural Sciences of the University of Texas at Austin, where his research group focuses on photosensitive materials.
Willson received his BS and PhD from the University of California, Berkeley, and MS at California State University, San Diego, in organic chemistry. He worked for IBM from 1979 to 1993, where he was Fellow and Manager of Polymer Science and Technology at IBM Almaden Research Lab for several years.
Willson will be honored at the SEMI award banquet in Santa Clara, CA, on 17 October. For more information about the event, see www.semi.org/semiawardbanquet.