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SPIE Lithography Asia will draw top lithographers to Taiwan

01 November 2009

BELLINGHAM, Washington, USA -- Semiconductor and flat-panel display industry leaders from around the world will discuss the latest developments in lithography techniques for semiconductor and FPD manufacturing at the annual SPIE Lithography Asia conference in Taiwan this month. Dates are 18 and 19 November at the Sheraton Taipei Hotel.SPIE Lithography Asia

Taiwan is a natural location for the conference. A major portion of the world's microelectronics and FPD products are manufactured in Asia and an increasing segment of R&D for lithography processes and equipment technology have moved to Asia as well, as semiconductor and FPD industries have expanded globally over the past several decades.

Among featured presentations by leading researchers, developers, and innovators are four plenary talks:

  • Kinam Kim of Samsung Electronics, on the future of the silicon industry
  • Cheng-Wen Wu of Industrial Technology Research Institute, on the designer's perspective on 3D integration
  • Burn J. Lin of Taiwan Semiconductor Manufacturing Co., on the contrast and challenges between photon and electron beam patterning technologies
  • Christopher J. Progler of Photronics, Inc., on mask technology and timing for IC and LCD applications.

Lin is one of four conference chairs, along with Alek Chen of ASML Taiwan, Woo-Sung Han of Samsung Electronics, and Anthony Yen of Taiwan Semiconductor Manufacturing Co.

More than 100 technical papers will be presented, and an evening welcome reception will include a poster session.

Best student paper awards sponsored by ASML and Cymer will be awarded. Other meeting sponsors are Sokudo, Mentor Graphics, Entegris, and Tokyo Electron. The Taiwan Semiconductor Industry Association is a cooperating organization.

See the SPIE Lithography Asia event website for more information.

SPIE is the international society for optics and photonics founded in 1955 to advance light-based technologies. Serving more than 188,000 constituents from 138 countries, the Society advances emerging technologies through interdisciplinary information exchange, continuing education, publications, patent precedent, and career and professional growth. SPIE annually organizes and sponsors approximately 25 major technical forums, exhibitions, and education programs in North America, Europe, Asia, and the South Pacific. In 2008, SPIE contributed $1.9 million in support of scholarships, grants, and other education programs around the world. For more information, visit SPIE.org.

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Media contact:
Amy Nelson
Public Relations Manager
+1 360 685 5478

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