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Proceedings of SPIE Volume 9962 • new

Advances in Metrology for X-Ray and EUV Optics VI
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Softcover $45.00 $60.00

Volume Details

Volume Number: 9962
Estimated Publication Date: 29 September 2016
Softcover: 0 papers () pages
ISBN: 9781510603158

Table of Contents
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New operational mode of the pencil beam interferometry based LTP
Author(s): Gary Centers; Brian V. Smith; Valeriy V. Yashchuk
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Nanometer accuracy with continuous scans at the ALBA-NOM
Author(s): Josep Nicolas; Pablo Pedreira; Igors Šics; Claudio Ramírez; Juan Campos
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Development of a long trace profiler at SPring-8 using a newly developed slope sensor
Author(s): Y. Senba; H. Kishimoto; T. Miura; H. Ohashi
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Surface measurements in "grazing incidence" interferometry for long x-ray mirrors: theoretical limits and practical implementations
Author(s): Maurizio Vannoni; Idoia Freijo Martìn
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Subaperture stitching interferometry with reduced reference errors for ultrasmooth surfaces
Author(s): Xudong Xu; Qiushi Huang; Zhengxiang Shen; Zhanshan Wang
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Development of surface profiler for master mandrel of X-ray ellipsoidal mirror
Author(s): Yoshinori Takei; Hidekazu Mimura
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Fiber-optic based in situ atomic spectroscopy for manufacturing of x-ray optics
Author(s): George Atanasoff; Christopher J. Metting; Hasso von Bredow
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Modeling surface topography of state-of-the-art x-ray mirrors as a result of stochastic polishing process: recent developments
Author(s): Valeriy V. Yashchuk; Gary Centers; Yuri N. Tyurin; Anastasia Y. Tyurina
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Ray-tracing as a tool for efficient specification of beamline optical components
Author(s): P. Pedreira; I. Sics; M. Llonch; J. Ladrera; Ll. Ribó; C. Colldelram; J. Nicolas
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