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Proceedings of SPIE Volume 9687 • new

8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics
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Volume Details

Volume Number: 9687
Date Published: 14 November 2016
: 14 papers (126) pages
ISBN: 9781628419221

Table of Contents
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Front Matter: Volume 9687
Author(s): Proceedings of SPIE
How to specify super-smooth mirrors: simulation studies on nano-focusing and wavefront preserving x-ray mirrors for next-generation light sources
Author(s): Xianbo Shi; Lahsen Assoufid; Ruben Reininger
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New scheme to control x-ray deformable mirrors
Author(s): Lei Huang; Mourad Idir
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An analysis of light spot extracting based on LED
Author(s): Kai Ma; Zhan Shi; Chao Chen; Xiaodong Pan; Wenbin Liu
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λ/100 reference flat for commercially available Fizeau interferometer
Author(s): Y. Kondo; Y. Bitou; Kazuhide Yamauchi
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High accuracy measurement of power spectral density in middle spatial frequency range of optical surfaces using optical profiler
Author(s): Xudong Xu; Shuang Ma; Zhengxiang Shen; Qiushi Huang; Zhanshan Wang
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Evaluation of figure accuracy of Wolter mirror fabricated by electroforming
Author(s): Satoru Egawa; Takehiro Kume; Yoko Takeo; Yoshinori Takei; Hiroto Motoyama; Hidekazu Mimura
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Comparison of small angle deflectometric measurements with different apertures down to the sub-millimetre range
Author(s): Gerd Ehret; Susanne Quabis; Michael Schulz
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Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method
Author(s): Fugui Yang; Quan Cai; Peng Liu; Weifan Sheng; Xiaowei Zhang; Ming Li
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Research on the electron beam spot detection methods based on SEM
Author(s): Weixia Zhao; Junbiao Liu; Geng Niu; Yutian Ma; Li Han
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Control of lateral thickness gradients of EUV/soft x-ray multilayer on curved substrates
Author(s): Bo Yu; Chun-shui Jin; Shun Yao
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Innovative nano-accuracy surface profiler for sub-50 nrad rms mirror test
Author(s): Shinan Qian; Mourad Idir
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Nano-accuracy measurement technology of optical-surface profiles
Author(s): Shinan Qian; Bo Gao
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Progress in upgrading a long trace profiler at NSRRC
Author(s): Duan-Jen Wang; Shang-Wei Lin; Shen-Yaw Perng
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X-ray optics R&D at NSLSII: focus on optical metrology development
Author(s): Mourad Idir; Lei Huang; Konstantine Kaznatcheev; Shinan Qian; Guillaume Dovillaire; Rafael Mayer
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