### PROCEEDINGS VOLUME 9526

Modeling Aspects in Optical Metrology V
Volume Details

Volume Number: 9526

Date Published: 21 June 2015

Date Published: 21 June 2015

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Front Matter: Volume 9526

Author(s): Proceedings of SPIE

Author(s): Proceedings of SPIE

Enlarging applicability domain of the C method with piecewise linear parameterization: gratings of deep and smooth profiles

Author(s): Xihong Xu; Lifeng Li

Author(s): Xihong Xu; Lifeng Li

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Specialized scatterometry methods for two types of gratings with distinct groove profiles

Author(s): Lin Yang

Author(s): Lin Yang

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Spatial mode projection for side-wall angle measurements

Author(s): L. Cisotto; Yan Zhu; S. F. Pereira; H. P. Urbach

Author(s): L. Cisotto; Yan Zhu; S. F. Pereira; H. P. Urbach

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Phase error analysis and compensation in fringe projection profilometry

Author(s): Christian Bräuer-Burchardt; Peter Kühmstedt; Gunther Notni

Author(s): Christian Bräuer-Burchardt; Peter Kühmstedt; Gunther Notni

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Signal simulation method for homodyne multiple target interferometers using short coherence length laser sources

Author(s): Maik Fox; Thorsten Beuth; Andreas Streck; Wilhelm Stork

Author(s): Maik Fox; Thorsten Beuth; Andreas Streck; Wilhelm Stork

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Metrological characterization of a large aperture Fizeau for x-ray mirrors measurement

Author(s): Maurizio Vannoni; Idoia Freijo Martín

Author(s): Maurizio Vannoni; Idoia Freijo Martín

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A way for measuring the relationship between DM surface and wave-front aberrations in a beam rotate-90°laser system

Author(s): Ping Yang; Ming-Wu Ao; Shuai Wang; Lizhi Dong; Yi Tan

Author(s): Ping Yang; Ming-Wu Ao; Shuai Wang; Lizhi Dong; Yi Tan

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Optical detectors based on thermoelastic effect in crystalline quartz

Author(s): V. P. Chelibanov; G. G. Ishanin

Author(s): V. P. Chelibanov; G. G. Ishanin

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Radiometric uncertainty of radiance measured with infrared cameras under variable ambient conditions

Author(s): Thomas Svensson; Henrik Larsson; Johan Eriksson

Author(s): Thomas Svensson; Henrik Larsson; Johan Eriksson

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Numerical modeling and uncertainty analysis of light emitting diodes for photometric measurements

Author(s): Mohammed Z. U. Khan; Mohammed Abbas; Luai M. Al-Hadhrami

Author(s): Mohammed Z. U. Khan; Mohammed Abbas; Luai M. Al-Hadhrami

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Horizontal geometrical reaction time model for two-beam nacelle LiDARs

Author(s): Thorsten Beuth; Maik Fox; Wilhelm Stork

Author(s): Thorsten Beuth; Maik Fox; Wilhelm Stork

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Investigation vignetting beams in optoelectronic autocollimation angle measurement system

Author(s): Igor Konyakhin; Aiganym M. Sakhariyanova; Andrey Smekhov

Author(s): Igor Konyakhin; Aiganym M. Sakhariyanova; Andrey Smekhov

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Transferring the Rb+ hyperfine-structure stability to a Fabry-Perot resonator used as a frequency standard for astronomical spectrographs

Author(s): Philipp Huke; Hanno Holzhüter; Ansgar Reiners

Author(s): Philipp Huke; Hanno Holzhüter; Ansgar Reiners

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Fully-vectorial simulation and tolerancing of optical systems for wafer inspection by field tracing

Author(s): Daniel Asoubar; Hagen Schweitzer; Christian Hellmann; Michael Kuhn; Frank Wyrowski

Author(s): Daniel Asoubar; Hagen Schweitzer; Christian Hellmann; Michael Kuhn; Frank Wyrowski

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Wide-aperture laser beam measurement using transmission diffuser: errors modeling

Author(s): Ivan S. Matsak

Author(s): Ivan S. Matsak

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Application of the ARMA model in distributed fiber vibration sensing system

Author(s): Hongyan Wu; Haiyan Xu; HeKuo Peng

Author(s): Hongyan Wu; Haiyan Xu; HeKuo Peng

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Simulating the coherent light propagation in a random scattering materials using the perturbation expansion

Author(s): Maciej Kraszewski; Michal Trojanowski; Marcin R. Strąkowski; Jerzy Pluciński

Author(s): Maciej Kraszewski; Michal Trojanowski; Marcin R. Strąkowski; Jerzy Pluciński

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The optical properties of tropospheric soot aggregates determined with the DDA (Discrete Dipole Approximation) method

Author(s): Krzysztof Skorupski

Author(s): Krzysztof Skorupski

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Detection of fast flying nanoparticles by light scattering over a large volume

Author(s): F. Pettazzi; S. Bäumer; J. van der Donck; A. Deutz

Author(s): F. Pettazzi; S. Bäumer; J. van der Donck; A. Deutz

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Nonspherical nanoparticles characterization by partially depolarized dynamic light scattering

Author(s): Alexander D. Levin; Ekaterina A. Shmytkova

Author(s): Alexander D. Levin; Ekaterina A. Shmytkova

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Nondestructive measurement of two-dimensional refractive index profiles by deflectometry

Author(s): Di Lin; James R. Leger

Author(s): Di Lin; James R. Leger

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Problems in thin film thickness measurement resolved: improvements of the fast Fourier transform analysis and consideration of the numerical aperture of microscope headers and collimators

Author(s): M. Quinten; F. Houta; T. Fries

Author(s): M. Quinten; F. Houta; T. Fries

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Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Author(s): P. Petrik; B. Fodor; E. Agocs; P. Kozma; J. Nador; N. Kumar; J. Endres; G. Juhasz; C. Major; S. F. Pereira; T. Lohner; H. P. Urbach; B. Bodermann; M. Fried

Author(s): P. Petrik; B. Fodor; E. Agocs; P. Kozma; J. Nador; N. Kumar; J. Endres; G. Juhasz; C. Major; S. F. Pereira; T. Lohner; H. P. Urbach; B. Bodermann; M. Fried

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The statistical inverse problem of scatterometry: Bayesian inference and the effect of different priors

Author(s): Sebastian Heidenreich; Hermann Gross; Matthias Wurm; Bernd Bodermann; Markus Bär

Author(s): Sebastian Heidenreich; Hermann Gross; Matthias Wurm; Bernd Bodermann; Markus Bär

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The effect of systematic errors on the hybridization of optical critical dimension measurements

Author(s): Mark-Alexander Henn; Bryan M. Barnes; Nien Fan Zhang; Hui Zhou; Richard M. Silver

Author(s): Mark-Alexander Henn; Bryan M. Barnes; Nien Fan Zhang; Hui Zhou; Richard M. Silver

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Simulation of light in-coupling through an aperture probe to investigate light propagation in a thin layer for opto-electronic application

Author(s): Markus Ermes; Stephan Lehnen; Zhao Cao; Karsten Bittkau; Reinhard Carius

Author(s): Markus Ermes; Stephan Lehnen; Zhao Cao; Karsten Bittkau; Reinhard Carius

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Effect of wavefront aberrations on a focused plenoptic imaging system: a wave optics simulation approach

Author(s): Massimo Turola; Chris J. Meah; Richard J. Marshall; Iain B. Styles; Stephen Gruppetta

Author(s): Massimo Turola; Chris J. Meah; Richard J. Marshall; Iain B. Styles; Stephen Gruppetta

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Total variation iterative constraint algorithm for limited-angle tomographic reconstruction of non-piecewise-constant structures

Author(s): W. Krauze; P. Makowski; M. Kujawińska

Author(s): W. Krauze; P. Makowski; M. Kujawińska

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A cascaded plasmonic superlens for near field imaging with magnification

Author(s): Liwei Fu; Philipp Schau; Karsten Frenner; Wolfgang Osten

Author(s): Liwei Fu; Philipp Schau; Karsten Frenner; Wolfgang Osten

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Calibration of the amplification coefficient in interference microscopy by means of a wavelength standard

Author(s): Peter de Groot; Jake Beverage

Author(s): Peter de Groot; Jake Beverage

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In-line digital holography with double knife edge

Author(s): Claudio Ramirez; Claudio Iemmi; Juan Campos

Author(s): Claudio Ramirez; Claudio Iemmi; Juan Campos

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Fourier analysis of quadratic phase interferograms

Author(s): Jesús Muñoz-Maciel; Miguel Mora-González; Francisco J. Casillas-Rodríguez; Francisco G. Peña-Lecona

Author(s): Jesús Muñoz-Maciel; Miguel Mora-González; Francisco J. Casillas-Rodríguez; Francisco G. Peña-Lecona

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Phase retrieval based on diffraction element array with single far field (Withdrawal Notice)

Author(s): Shuai Wang; Ping Yang; Lizhi Dong; Bing Xu; Mingwu Ao

Author(s): Shuai Wang; Ping Yang; Lizhi Dong; Bing Xu; Mingwu Ao

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Dynamic stitching interferometric testing for large optical plane

Author(s): Xin Wu; Te Qi; Linna Zhang; Yingjie Yu

Author(s): Xin Wu; Te Qi; Linna Zhang; Yingjie Yu

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Snapshot polarimeter based on the conical refraction phenomenon

Author(s): Alba Peinado; Angel Lizana; Alex Turpin; Irene Estévez; Claudio Iemmi; Todor K. Kalkanjiev; Jordi Mompart; Juan Campos

Author(s): Alba Peinado; Angel Lizana; Alex Turpin; Irene Estévez; Claudio Iemmi; Todor K. Kalkanjiev; Jordi Mompart; Juan Campos

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Measurement errors induced by axis tilt of biplates in dual-rotating compensator Mueller matrix ellipsometers

Author(s): Honggang Gu; Chuanwei Zhang; Hao Jiang; Xiuguo Chen; Weiqi Li; Shiyuan Liu

Author(s): Honggang Gu; Chuanwei Zhang; Hao Jiang; Xiuguo Chen; Weiqi Li; Shiyuan Liu

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Correction of depolarization effect in Mueller matrix ellipsometry with polar decomposition method

Author(s): Weiqi Li; Chuanwei Zhang; Hao Jiang; Xiuguo Chen; Honggang Gu; Shiyuan Liu

Author(s): Weiqi Li; Chuanwei Zhang; Hao Jiang; Xiuguo Chen; Honggang Gu; Shiyuan Liu

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Parallel aligned liquid crystal on silicon display based optical set-up for the generation of polarization spatial distributions

Author(s): Irene Estévez; Angel Lizana; Xuejie Zheng; Alba Peinado; Claudio Ramírez; Jose Luis Martínez; Andrés Márquez; Ignacio Moreno; Juan Campos

Author(s): Irene Estévez; Angel Lizana; Xuejie Zheng; Alba Peinado; Claudio Ramírez; Jose Luis Martínez; Andrés Márquez; Ignacio Moreno; Juan Campos

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A novel autocollimating method for measuring the focal distances

Author(s): Alexandr G. Ershov

Author(s): Alexandr G. Ershov

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Modelling of microcracks image treated with fluorescent dye

Author(s): Victor Glebov; Oleg U. Lashmanov

Author(s): Victor Glebov; Oleg U. Lashmanov

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High-angle light scattering to determine the optical fiber core

Author(s): Grzegorz Świrniak

Author(s): Grzegorz Świrniak

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Research of the use of autoreflection scheme to measure the error of the optical elements in space telescope’s relative position

Author(s): Kseniia Ezhova; Fedor Molev; Igor Konyakhin

Author(s): Kseniia Ezhova; Fedor Molev; Igor Konyakhin

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Modeling and analysis of the solar concentrator in photovoltaic systems

Author(s): Janusz Mroczka; Kamil Plachta

Author(s): Janusz Mroczka; Kamil Plachta

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In situ estimate of duty cycle of surface-relief holographic gratings during development by measuring TM/TE diffraction efficiency ratio

Author(s): Biyao Shen; Lijiang Zeng; Lifeng Li

Author(s): Biyao Shen; Lijiang Zeng; Lifeng Li

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Investigation of a mathematical model of the system of electro-optical sensors for monitoring nonlinear surfaces

Author(s): Andrew V. Petrochenko; Igor A. Konyakhin

Author(s): Andrew V. Petrochenko; Igor A. Konyakhin

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Using quaternions to control assembly and adjustment mirror-prism optical systems

Author(s): Kseniia Ezhova; Victor Zverev

Author(s): Kseniia Ezhova; Victor Zverev

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Maximum power point search method for photovoltaic panels which uses a light sensor in the conditions of real shading and temperature

Author(s): Janusz Mroczka; Mariusz Ostrowski

Author(s): Janusz Mroczka; Mariusz Ostrowski

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The study of the structural stability of the spiral laser beams propagation through inhomogeneous phase medium

Author(s): Alexander A. Zinchik; Yana B Muzychenko

Author(s): Alexander A. Zinchik; Yana B Muzychenko

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Simulation and analysis of lightweight space mirror design

Author(s): Polina A. Abdula; Mikhail Y. Neutov; Nadezhda D. Tolstoba

Author(s): Polina A. Abdula; Mikhail Y. Neutov; Nadezhda D. Tolstoba

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Propagation invariant laser beams for optical metrology applications

Author(s): M. Soskind; Y. G. Soskind

Author(s): M. Soskind; Y. G. Soskind

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Determination of refractive index by Moiré deflectometry

Author(s): Mohammad Ahmadi; Khosro Madanipour; Soheila Javadianvarjovi

Author(s): Mohammad Ahmadi; Khosro Madanipour; Soheila Javadianvarjovi

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