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Proceedings of SPIE Volume 9517

Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
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Volume Details

Volume Number: 9517
Date Published: 1 July 2015
Softcover: 83 papers (720) pages
ISBN: 9781628416398

Table of Contents
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Front Matter: Volume 9517
Author(s): Proceedings of SPIE
Vibration energy harvesting: fabrication, miniaturisation and applications
Author(s): S. P. Beeby; D. Zhu
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Influence of process parameters on properties of piezoelectric AlN and AlScN thin films for sensor and energy harvesting applications
Author(s): Stephan Barth; Hagen Bartzsch; Daniel Gloess; Peter Frach; Thomas Modes; Olaf Zywitzki; Gunnar Suchaneck; Gerald Gerlach
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From MEMS to macro-world: a micro-milling machined wideband vibration piezoelectric energy harvester
Author(s): J. Iannacci; G. Sordo
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Low-profile and wearable energy harvester based on plucked piezoelectric cantilevers
Author(s): Michele Pozzi; Heather J. A. Almond; Glenn J. T. Leighton; Roy J. Moriarty
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High temperature performance of sputter-deposited piezoelectric aluminum nitride thin films
Author(s): M. Gillinger; M. Schneider; A. Bittner; P. Nicolay; U. Schmid
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Wafer bonding technology for new generation vacuum MEMS: challenges and promises
Author(s): V. Dragoi; E. Pabo
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3D integration approaches for MEMS and CMOS sensors based on a Cu through-silicon-via technology and wafer level bonding
Author(s): L. Hofmann; S. Dempwolf; D. Reuter; R. Ecke; K. Gottfried; S. E. Schulz; R. Knechtel; T. Geßner
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Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality
Author(s): Wing H. Ng; Nina Podoliak; Peter Horak; Jiang Wu; Huiyun Liu; William J. Stewart; Anthony J. Kenyon
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Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure
Author(s): Hutomo Suryo Wasisto; Wenze Wu; Erik Uhde; Andreas Waag; Erwin Peiner
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Out-of-plane piezoelectric microresonator and oscillator circuit for monitoring engine oil contamination with diesel
Author(s): J. Toledo; T. Manzaneque; V. Ruiz-Díez; F. Jiménez-Márquez; M. Kucera; G. Pfusterschmied; E. Wistrela; U. Schmid; J. L. Sánchez-Rojas
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The next generation of MEMS-based optical microspectrometers
Author(s): Reinoud F. Wolffenbuttel
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Input-shaped actuation of electromagnetic MEMS mirrors
Author(s): Jörg Reitterer; Franz Fidler; Gerhard Schmid; Christian Hambeck; Ferdinand Saint Julien-Wallsee; Walter Leeb; Ulrich Schmid
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2D stepping microdrive for hyperspectral imaging
Author(s): Csaba Endrödy; Hannes Mehner; Adrian Grewe; Stefan Sinzinger; Martin Hoffmann
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Design and fabrication of an endomicroscopic imaging module for minimally invasive medical devices
Author(s): C. G. Costa; J. S. Gomes; R. F. Wolffenbuttel; J. H. Correia
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Acoustic high-frequency effects inside the package of capacitive silicon microphones and their impact on the device performance
Author(s): G. Schrag; T. Kuenzig; D. Pham; C. Glacer; A. Dehé; G. Wachutka
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Optimization method for designing multimodal piezoelectric MEMS energy harvesters
Author(s): G. Sordo; E. Serra; U. Schmid; J. Iannacci
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Scaling effects for piezoelectric energy harvesters
Author(s): D. Zhu; S. P. Beeby
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Thermal cycling reliability of RF-MEMS switches
Author(s): V. Mulloni; G. Sordo; B. Margesin
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Microsystem integration from RF to millimeter wave applications
Author(s): T. Vähä-Heikkilä; M. Lahti
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Tailoring design and fabrication of capacitive RF MEMS switches for K-band applications
Author(s): Fabio Quaranta; Anna Persano; Giovanni Capoccia; Antonietta Taurino; Adriano Cola; Pietro Siciliano; Andrea Lucibello; Romolo Marcelli; Emanuela Proietti; Alvise Bagolini; Benno Margesin; Pierluigi Bellutti; Jacopo Iannacci
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Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor
Author(s): C. Walk; A. Goehlich; A. Giese; M. Goertz; H. Vogt; M. Kraft
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Smart sensors and calibration standards for high precision metrology
Author(s): Uwe Brand; Sai Gao; Lutz Doering; Zhi Li; Min Xu; Sebastian Buetefisch; Erwin Peiner; Joachim Fruehauf; Karla Hiller
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Characterization of a dispersion-controlled approach to surface profilometry on wafers using a white-light interferometer
Author(s): Ch. Taudt; A. Augenstein; T. Baselt; H. Assmann; A. Greiner; E. Koch; P. Hartmann
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Piezoresistive position microsensors with ppm-accuracy
Author(s): Vladimir Stavrov; Assen Shulev; Galina Stavreva; Vencislav Todorov
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Experimental investigations of creep in gold RF-MEMS microstructures
Author(s): Aurelio Somà; Giorgio De Pasquale; Muhammad Mubasher Saleem
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Multifunctional thin film sensor system as monitoring system in production
Author(s): Saskia Biehl; Christian Rumposch; Nancy Paetsch
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Car glass microphones using piezoelectric transducers for external alarm detection and localization
Author(s): Christian Bolzmacher; Valentin Le Guelvouit
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Autonomous solutions for powering wireless sensor nodes in rivers
Author(s): E. Kamenar; S. Maćešić; G. Gregov; D. Blažević; S. Zelenika; K. Marković; V. Glažar
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The effect of sensor temperature and MOx layer thickness on the sensitivity of SnO2- and WO3-based chemiresistive sensors to ethylene gas
Author(s): Matic Krivec; Raimund Leitner; Roland Waldner; Johanna Gostner; Florian Überall
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MEMS-based platform optimized for inkjet printing of nano-sized, gas sensitive functional metal oxides to enable the measurement of gas induced changes of the heating power
Author(s): B. Bierer; J. Kneer; J. Wöllenstein; S. Palzer
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Photoacoustic CO2 sensor system: design and potential for miniaturization and integration in silicon
Author(s): J. Huber; J. Wöllenstein
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Novel SH-SAW gas sensor based on graphene
Author(s): I. Nikolaou; H. Hallil; G. Deligeorgis; V. Conedera; H. Garcia; C. Dejous; D. Rebière
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Real-time synchronization of wireless sensor network by 1-PPS signal
Author(s): Marco Giammarini; Marco Pieralisi; Daniela Isidori; Enrico Concettoni; Cristina Cristalli; Matteo Fioravanti
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An active reference spring array for in-situ calibration of the normal spring constant of AFM cantilevers
Author(s): S. Gao; U. Brand; S. Hahn; K. Hiller
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Noise spectroscopy of nano- and microscopic periodic material structures
Author(s): A. Nasswettrova; P. Drexler; J. Seginak; D. Nešpor; M. Friedl; P. Marcoň; P. Fiala
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High temperature stability of ScxAl1-xN (x=0.27) thin films
Author(s): P. M. Mayrhofer; A. Bittner; U. Schmid
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Impact of titanium layer and silicon substrate properties on the microstructure of c-axis oriented AlN thin films
Author(s): E. Wistrela; A. Bittner; U. Schmid
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Nonlinear numerical modelling and experimental validation of multilayer piezoelectric vibration energy scavengers
Author(s): D. Blažević; S. Zelenika
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Relaxation phenomena in nematic liquid crystals with multiwall carbon nanotubes adding
Author(s): Cristina Cîrtoaje; Victor Stoian; Emil Petrescu; Cornelia Moţoc
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Efficiency of electromagnetic vibration energy harvesting system
Author(s): Z. Hadas; V. Vetiska; J. Smilek; O. Andrs; V. Singule
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Assessment of MEMS energy harvester for medical applications
Author(s): Jan Smilek; Zdenek Hadas
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Finite element analysis of AlGaN/GaN micro-diaphragms with diamond coating
Author(s): J. Dzuba; G. Vanko; M. Vojs; I. Rýger; T. Ižák; V. Jirásek; V. Kutiš; T. Lalinský
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In-liquid characterization of high order out-of-plane modes in piezoelectric square plates
Author(s): V. Ruiz-Díez; J. Toledo; T. Manzaneque ; J. Hernando-García; A. Ababneh; H. Seidel; J. L. Sánchez-Rojas
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Numerical model a graphene component for the sensing of weak electromagnetic signals
Author(s): A. Nasswettrova; P. Fiala; D. Nešpor; P. Drexler; M. Steinbauer
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Modeling distributed electrostatic effects in silicon microphones and their impact on the performance
Author(s): Thomas Kuenzig; Gabriele Schrag; Alfons Dehé; Gerhard Wachutka
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Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed Bragg reflectors
Author(s): M. Ghaderi; N. P. Ayerden; G. de Graaf; R. F. Wolffenbuttel
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Optical design and characterization of a gas filled MEMS Fabry-Perot filter
Author(s): N. Pelin Ayerden; Mohammadamir Ghaderi; Ger de Graaf; Reinoud F. Wolffenbuttel
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Low loss optomechanical cavities based on silicon oscillator
Author(s): A. Borrielli; A. Pontin; F. S. Cataliotti; L. Marconi; F. Marin; F. Marino; G. Pandraud; G. A. Prodi; E. Serra; M. Bonaldi
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Optoelectronic sensor device for monitoring ethanol concentration in winemaking applications
Author(s): F. Jiménez-Márquez; J. Vázquez; J. Úbeda; J. Rodríguez-Rey; J. L. Sánchez-Rojas
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Force monitoring transducers with more than 100,000 scale intervals
Author(s): Vladimir Stavrov; Assen Shulev; Dimiter Chakarov; Galina Stavreva
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Passive microsensor for binary counting of numerous threshold events
Author(s): Hannes Mehner; Silvan Schwebke; Steffen Leopold; Martin Hoffmann
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Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin films
Author(s): Johannes Rittinger; Piriya Taptimthong; Lisa Jogschies; Marc C. Wurz; Lutz Rissing
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Technology towards a SAW based phononic crystal sensor
Author(s): Marc-Peter Schmidt; Aleksandr Oseev; Ralf Lucklum; Soeren Hirsch
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Parameters influencing focalization spot in time reversal of acoustic waves
Author(s): Harald Zophoniasson; Christian Bolzmacher; Moustafa Hafez
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Experimental verification of a novel MEMS multi-modal vibration energy harvester for ultra-low power remote sensing nodes
Author(s): J. Iannacci; G. Sordo; E. Serra; M. Kucera; U. Schmid
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A comparative study between SMS interferometers and lossy mode resonace optical fiber devices for sensing applications
Author(s): A. B. Socorro; M. Hernaez; I. Del Villar; J. M. Corres; F. J. Arregui; I. R. Matias
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High-sensitive lossy mode resonance-based optical fiber refractometers by means of sputtered indium oxide thin-films
Author(s): P. Sanchez; K. Gonzalez; C. R. Zamarreño; M. Hernaez; I. R. Matias; F. J. Arregui
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Optical fiber pH sensor based on gold nanoparticles into polymeric coatings
Author(s): A. B. Socorro; Pedro J. Rivero; M. Hernaez; J. Goicoechea; I. R. Matias; F. J. Arregui
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Development of silicon microforce sensors integrated with double meander springs for standard hardness test instruments
Author(s): Hutomo Suryo Wasisto; Lutz Doering; Alwin Daus; Uwe Brand; Thomas Frank; Erwin Peiner
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Optimal design of piezoelectric microtransducers for static response
Author(s): D. Ruiz; A. Donoso; J. C. Bellido; M. Kucera; U. Schmid; J. L. Sánchez-Rojas
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Features design and manufacturing technology in microelectromechanical encapsulated devices
Author(s): O. Britkov; S. Timoshenkov; N. Korobova; S. Shepelev; A. Mikheev
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Fabrication of microfluidic chips using lithographic patterning and adhesive bonding of the thick negative photoresist AZ 125 nXT
Author(s): Thorsten Knoll; Andreas Bergmann; Dominic Nußbaum
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Laser ablation for membrane processing of AlGaN/GaN- and micro structured ferroelectric thin film MEMS and SiC pressure sensors for extreme conditions
Author(s): J. Zehetner; G. Vanko; J. Dzuba; I. Ryger; T. Lalinsky; Manuel Benkler; Michal Lucki
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Microstructures replication using high frequency excitation
Author(s): Arvydas Palevicius; Giedrius Janusas; Elingas Cekas; Rokas Sakalys; Ieva Paleviciute; Evaldas Ramoska
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Fabrication of wear-resistant silicon microprobe tips for high-speed surface roughness scanning devices
Author(s): Hutomo Suryo Wasisto; Feng Yu; Lutz Doering; Stefan Völlmeke; Uwe Brand; Andrey Bakin; Andreas Waag; Erwin Peiner
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Wafer edge protection kit for MEMS and TSV Si-etching
Author(s): Robert Wieland; K. Nguyen; U. Seidelmann; M. Scholz; G. Schrag
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Research and development of capacitive transducer with linear acceleration
Author(s): Natalia Korobova; Elena Kochurina; Sergey Timoshenkov; Yuriy Chaplygin; Stepan Anchutin; Andrey Kosolapov
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Characterization of cross-spring pivots for micropositioning applications
Author(s): K. Marković; S. Zelenika
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Modeling and simulation of the multiphase flow involving magnetophoresis-based microfluidic systems
Author(s): Saud A. Khashan; Anas Alazzam; Bobby Mathew
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Electrospray ionization deposition of BSA under vacuum conditions
Author(s): Dominic Hecker; Daniel Gloess; Peter Frach; Gerald Gerlach
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Numerical analysis of a smart composite material mechanical component using an embedded long period grating fiber sensor
Author(s): Dan Savastru; Sorin Miclos; Roxana Savastru; Ion I. Lancranjan
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Design of a smart superstructure FBG torsion sensor
Author(s): Sorin Miclos; Dan Savastru; Roxana Savastru; Ion I. Lancranjan
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Interdigitated design of a thermoelectric microgenerator based on silicon nanowire arrays
Author(s): I. Donmez; M. Salleras; C. Calaza ; J. D. Santos; G. Gadea; A. Morata; D. Dávila; A. Tarancón; L. Fonseca
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Fabrication and characterization of a fuel flexible micro-reformer fully integrated in silicon for micro-solid oxide fuel cell applications
Author(s): D. Pla; M. Salleras; I. Garbayo; A. Morata; N. Sabaté; N. J. Divins; J. Llorca; A. Tarancón
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An efficient start-up circuitry for de-energized ultra-low power energy harvesting systems
Author(s): Leander B. Hörmann; Achim Berger; Lukas Salzburger; Peter Priller; Andreas Springer
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Scaling of dynamic thermoelectric harvesting devices in the 1-100 cm3 range
Author(s): M. E. Kiziroglou; A. Elefsiniotis; N. Kokorakis; S. W. Wright; T. T. Toh; P. D. Mitcheson; U. Schmid; Th. Becker; E. M. Yeatman
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Computationally efficient models enabling behaviour exploration of large scale cyber physical systems by simulations
Author(s): Peter Waegli
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On improving low-cost IMU performance for online trajectory estimation
Author(s): Risang Yudanto; Agusmian P. Ompusunggu; Abdellatif Bey-Temsamani
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Ultra-low power sensor for autonomous non-invasive voltage measurement in IoT solutions for energy efficiency
Author(s): Clemente Villani; Domenico Balsamo; Davide Brunelli; Luca Benini
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Use of a prototype pulse oximeter for time series analysis of heart rate variability
Author(s): Erika González; Jehú López; Mathieu Hautefeuille; Víctor Velázquez; Jésica Del Moral
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Abstraction of communication resources in model-based design frameworks for CPS
Author(s): Roberto Manione
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Gbps wireless transceivers for high bandwidth interconnections in distributed cyber physical systems
Author(s): Sergio Saponara; Bruno Neri
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Embedded system for supervision analysis and control of photovoltaic power plants
Author(s): A. Cabitto; P. Lambruschini; M. Raggio
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