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Advances in Metrology for X-Ray and EUV Optics V
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Volume Details

Volume Number: 9206
Date Published: 7 October 2014
Softcover: 14 papers (158) pages
ISBN: 9781628412338

Table of Contents
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Front Matter: Volume 9206
Author(s): Proceedings of SPIE
A new optical head tracing reflected light for nanoprofiler
Author(s): K. Okuda; K. Okita; Y. Tokuta; T. Kitayama; M. Nakano; R. Kudo; K. Yamamura; K. Endo
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The developmental long trace profiler (DLTP) optimized for metrology of side-facing optics at the ALS
Author(s): Ian Lacey; Nikolay A. Artemiev; Edward E. Domning; Wayne R. McKinney; Gregory Y. Morrison; Simon A. Morton; Brian V. Smith; Valeriy V. Yashchuk
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Upgrade of surface profiler for x-ray mirror at SPring-8
Author(s): Y. Senba; H. Kishimoto; T. Miura; H. Ohashi
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Ultra-high-precision surface processing techniques for nanofocusing ellipsoidal mirrors in hard x-ray region
Author(s): Hirokatsu Yumoto; Takahisa Koyama; Satoshi Matsuyama; Kazuto Yamauchi; Haruhiko Ohashi
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Design consideration for nano-accuracy long trace profiler at BSRF
Author(s): Fugui Yang; Lichao Wang; Shanzhi Tang; Qiushi Wang; Ming Li
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A reflectometer for at-wavelength characterization of XUV-reflection gratings
Author(s): F. Eggenstein; P. Bischoff; A. Gaupp; F. Senf; A. Sokolov; T. Zeschke; F. Schäfers
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At-wavelength metrology of x-ray optics at Diamond Light Source
Author(s): Hongchang Wang; Sebastien Berujon; John Sutter; Simon G. Alcock; Kawal Sawhney
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An extreme ultraviolet interferometer suitable to generate dense interference pattern
Author(s): K. Kolacek; J. Schmidt; J. Straus; O. Frolov; V. Prukner; R. Melich
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Experimental results for absolute cylindrical wavefront testing
Author(s): Patrick J. Reardon; Ayshah Alatawi
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Pushing the limits: latest developments in angle metrology for the inspection of ultra-precise synchrotron optics
Author(s): Tanfer Yandayan; Ralf D. Geckeler; Frank Siewert
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Angular calibration of surface slope measuring profilers with a bendable mirror
Author(s): Nikolay A. Artemiev; Brian V. Smith; Edward E. Domning; Ken P. Chow; Ian Lacey; Valeriy V. Yashchuk
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Design of a precision two-dimensional tip-tilting stage system for autocollimator-based long trace profiler angular calibration
Author(s): D. Shu; J. Qian; W. Liu; S. Kearney; J. Anton; J. Sullivan; L. Assoufid
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A new x-ray optics laboratory (XROL) at the ALS: mission, arrangement, metrology capabilities, performance, and future plans
Author(s): Valeriy V. Yashchuk; Nikolay A. Artemiev; Ian Lacey; Wayne R. McKinney; Howard A. Padmore
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An XUV optics beamline at BESSY II
Author(s): A. A. Sokolov; F. Eggenstein; A. Erko; R. Follath; S. Künstner; M. Mast; J. S. Schmidt; F. Senf; F. Siewert; T. Zeschke; F. Schäfers
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