Share Email Print
cover

Proceedings of SPIE Volume 9132

Optical Micro- and Nanometrology V
Format Member Price Non-Member Price
Softcover $78.75 $105.00

Volume Details

Volume Number: 9132
Date Published: 29 May 2014
Softcover: 51 papers (442) pages
ISBN: 9781628410808

Table of Contents
show all abstracts | hide all abstracts
Front Matter: Volume 9132
Author(s): Proceedings of SPIE
Optical frequency comb profilometry using a single-pixel camera
Author(s): Yoshio Hayasaki; Quang Duc Pham
Show Abstract
Comparison of areal measurements of the same zone of etched Si and hydroxyapatite layers on etched Si using different profiling techniques
Author(s): Mohamed Guellil; Paul C. Montgomery; Pierre Pfeiffer; Bruno Serio
Show Abstract
Remote laboratory for phase-aided 3D microscopic imaging and metrology
Author(s): Meng Wang; Yongkai Yin; Zeyi Liu; Wenqi He; Boqun Li; Xiang Peng
Show Abstract
3D-optical measurement system using a new vignetting aperture procedure
Author(s): Engelbert Hofbauer; Rolf Rascher; Konrad Wühr; Felix Friedke; Thomas Stubenrauch; Benjamin Pastötter; Sebastian Schleich; Christine Zöcke
Show Abstract
Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry
Author(s): J. Endres; N. Kumar; P. Petrik; M. -A. Henn; S. Heidenreich; S. F. Pereira; H. P. Urbach; B. Bodermann
Show Abstract
Inspection technique of latent flaws on fine polished glass substrates using stress-induced light scattering method
Author(s): Yoshitaro Sakata; Kazufumi Sakai; Kazuhiro Nonaka
Show Abstract
Development of a scatterometry reference standard
Author(s): Bernd Bodermann; Bernd Loechel; Frank Scholze; Gaoliang Dai; Jan Wernecke; Johannes Endres; Juergen Probst; Max Schoengen; Michael Krumrey; Poul-Erik Hansen; Victor Soltwisch
Show Abstract
Advanced metrology for the 14 nm node double patterning lithography
Author(s): D. Carau; R. Bouyssou; C. Dezauzier; M. Besacier; C. Gourgon
Show Abstract
Optical measurements of selected properties of nanocomposite layers with graphene and carbon nanotubes fillers
Author(s): Zofia Lorenc; Leszek Salbut; Anna Pakula; Marcin Sloma; Grzegorz Wroblewski; Małgorzata Jakubowska
Show Abstract
Comparative scanning near-field optical microscopy studies of plasmonic nanoparticle concepts
Author(s): Patrick Andrae; Paul Fumagalli; Martina Schmid
Show Abstract
Investigation of the influence of the scanning probe on SNOM near-field images using rigorous simulations including the probe
Author(s): Markus Ermes; Stephan Lehnen; Karsten Bittkau; Reinhard Carius
Show Abstract
Investigation of error compensation in CGH-based form testing of aspheres
Author(s): S. Stuerwald; N. Brill; R. Schmitt
Show Abstract
Interferometric sensors based on sinusoidal optical path length modulation
Author(s): Holger Knell; Markus Schake; Markus Schulz; Peter Lehmann
Show Abstract
Reconstruction-free wavefront measurements with enhanced sensitivity
Author(s): Thomas Godin; Michael Fromager; Emmanuel Cagniot; Marc Brunel; Kamel Aït-Ameur
Show Abstract
Ray-based calibration for the micro optical metrology system
Author(s): Yongkai Yin; Meng Wang; Ameng Li; Xiaoli Liu; Xiang Peng
Show Abstract
Optical design of a vertically integrated array-type Mirau-based OCT system
Author(s): J. Krauter; T. Boettcher; W. Lyda; W. Osten; N. Passilly; L. Froehly; S. Bargiel; J. Albero; S. Perrin; J. Lullin; C. Gorecki
Show Abstract
Optical diffraction tomography: accuracy of an off-axis reconstruction
Author(s): Julianna Kostencka; Tomasz Kozacki
Show Abstract
Time-frequency analysis in optical coherence tomography for technical objects examination
Author(s): Marcin R. Strąkowski; Maciej Kraszewski; Michał Trojanowski; Jerzy Pluciński
Show Abstract
Limited-angle hybrid diffraction tomography for biological samples
Author(s): A. Kus; W. Krauze; M. Kujawinska; M. Filipiak
Show Abstract
Effects of axial scanning in confocal microscopy employing adaptive lenses (CAL)
Author(s): N. Koukourakis; M. Finkeldey; M. Stürmer; N. C. Gerhardt; U. Wallrabe; M. R. Hofmann; J. W. Czarske; A. Fischer
Show Abstract
Phase aided 3D imaging and modeling: dedicated systems and case studies
Author(s): Yongkai Yin; Dong He; Zeyi Liu; Xiaoli Liu; Xiang Peng
Show Abstract
A benchmark system for the evaluation of selected phase retrieval methods
Author(s): Christian Lingel; Malte Hasler; Tobias Haist; Giancarlo Pedrini; Wolfgang Osten
Show Abstract
Size measurement of a pure phase object
Author(s): K. Äit-Ameur; M. Fromager; M. Brunel
Show Abstract
Optimum phase retrieval using the transport of intensity equation
Author(s): J. Martínez-Carranza; K. Falaggis; T. Kozacki
Show Abstract
Digital holography to light field
Author(s): Anand Asundi; Chao Zuo
Show Abstract
Measurement of the surface shape and optical thickness variation of a polishing crystal wafer by wavelength tuning interferometer
Author(s): Yangjin Kim; Kenichi Hibino; Ryohei Hanayama; Naohiko Sugita; Mamoru Mitsuishi
Show Abstract
Metrology of undoped double-sided polished silicon wafer: surface, thickness and refractive index profile measurements
Author(s): Ho-Jae Lee; Ki-Nam Joo
Show Abstract
Quantitative estimate of fs-laser induced refractive index changes in the bulk of various transparent materials
Author(s): A. Mermillod-Blondin; T. Seuthe; M. Eberstein; M. Grehn; J. Bonse; A. Rosenfeld
Show Abstract
Spectral properties of molecular iodine absorption cells filled to saturation pressure
Author(s): Jan Hrabina; Martin Sarbort; Ondrej Cip; Josef Lazar
Show Abstract
Single-shot two-channel Talbot interferometry using checker grating and Hilbert-Huang fringe pattern processing
Author(s): K. Patorski; M. Trusiak; K. Pokorski
Show Abstract
Displacement measurement with intracavity interferometry
Author(s): Josef Lazar; Miroslava Holá; Antonín Fejfar; Jiří Stuchlík; Jan Kočka; Jindřich Oulehla; Ondřej Číp
Show Abstract
A more robust and flexible approach to laterally chromatically dispersed, spectrally encoded interferometry (LCSI)
Author(s): Tobias Boettcher; Marc Gronle; Florian Mauch; Wolfgang Osten
Show Abstract
Suppression of frequency noise of single mode laser with unbalanced fiber interferometer for subnanometer interferometry
Author(s): Radek Šmíd; Martin Čížek; Břetislav Mikel; Josef Lazar; Ondrej Číp
Show Abstract
Mapping a vibrating surface by using laser self- mixing interferometry
Author(s): Roberto Ocaña ; Teresa Molina
Show Abstract
Investigation of baseline measurement resolution of a Si plate-based extrinsic Fabry-Perot interferometer
Author(s): Nikolai Ushakov; Leonid Liokumovich
Show Abstract
Polymer waveguide sensor with tin oxide thin film integrated onto optical-electrical printed circuit board
Author(s): Jung Woon Lim; Seon Hoon Kim; Jong-Sup Kim; Jeong Ho Kim; Yune Hyoun Kim; Ju Young Lim; Young-Eun Im; Jong Bok Park; Swook Hann
Show Abstract
Metrology of micro-optical components quality using direct measurement of 3D intensity point spread function
Author(s): Maciej Baranski; Stephane Perrin; Nicolas Passilly; Luc Froehly; Sylwester Bargiel; Jorge Albero; Christophe Gorecki
Show Abstract
Raman spectroscopy of nanostructured silicon fabricated by metal-assisted chemical etching
Author(s): Igor Iatsunskyi; Stefan Jurga; Valentyn Smyntyna; Mykolai Pavlenko; Valeriy Myndrul; Anastasia Zaleska
Show Abstract
Sub-kHz traceable characterization of stroboscopic scanning white light interferometer
Author(s): V. Heikkinen; I. Kassamakov; T. Paulin; A. Nolvi; J. Seppä; A. Lassila; E. Hæggström
Show Abstract
Three-dimensional surface reconstruction by combining a pico-digital projector for structured light illumination and an imaging system with high magnification and high depth of field
Author(s): A. Leong-Hoï; B. Serio; P. Twardowski; P. Montgomery
Show Abstract
Spectral ellipsometry studying of iron's optical and electronic properties
Author(s): Yevheniia Chernukha; Vasyl S. Stashchuk; Olena Polianska; Olexsandr Oshtuk
Show Abstract
Fingerprint authentication via joint transform correlator and its application in remote access control of a 3D microscopic system
Author(s): Wenqi He; Hongji Lai; Meng Wang; Zeyi Liu; Yongkai Yin; Xiang Peng
Show Abstract
Towards traceable mechanical properties measurement of silicon nanopillars using contact resonance force microscopy
Author(s): S. Gao; U. Brand
Show Abstract
Tilt angle measurement with a Gaussian-shaped laser beam tracking
Author(s): Martin Šarbort; Šimon Řeřucha; Petr Jedlička; Josef Lazar; Ondrej Číp
Show Abstract
Development of a laser-speckle-based measurement principle for the evaluation of mechanical deformation of stacked metal sheets
Author(s): Clemens Halder; Thomas Thurner; Mathias Mair
Show Abstract
A dual-styli micro-machined system for precise determination of the thickness of free-standing thin films
Author(s): Zhi Li; Sai Gao; Helmut Wolff; Uwe Brand; Ludger Koenders
Show Abstract
Automatic digital filtering for the accuracy improving of a digital holographic measurement system
Author(s): Marcella Matrecano; Lisa Miccio; Anna Persano; Fabio Quaranta; Pietro Siciliano; Pietro Ferraro
Show Abstract
Common-path configuration in total internal reflection digital holography microscopy
Author(s): M. Matrecano; A. Calabuig; M. Paturzo; P. Ferraro
Show Abstract
Active angular alignment of gauge block in system for contactless gauge block calibration
Author(s): Zdeněk Buchta; Martin Šarbort; Šimon Řeřucha; Václav Hucl; Martin Čížek; Josef Lazar; Ondřej Číp
Show Abstract
In-beam tracking refractometry for coordinate interferometric measurement
Author(s): Miroslava Holá; Josef Lazar; Ondřej Číp; Zdeněk Buchta
Show Abstract
Asymmetric polarization-based frequency shifting interferometer for microelectronics
Author(s): Seung Hyun Lee; Min Young Kim
Show Abstract

© SPIE. Terms of Use
Back to Top