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Proceedings of SPIE Volume 9110

Dimensional Optical Metrology and Inspection for Practical Applications III
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Volume Details

Volume Number: 9110
Date Published: 12 June 2014
Softcover: 25 papers (220) pages
ISBN: 9781628410471

Table of Contents
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Front Matter: Volume 9110
Author(s): Proceedings of SPIE
Active versus passive projector nonlinear gamma compensation method for high-quality fringe pattern generation
Author(s): Song Zhang
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Comparing digital-light-processing (DLP) and liquid-crystal-on-silicon (LCoS) technologies for high-quality 3D shape measurement
Author(s): Chen Gong; Beiwen Li; Kevin G. Harding; Song Zhang
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Improved measurement dynamic range for point triangulation probes
Author(s): Kevin G. Harding; Mehdi Daneshpanah; Guangping Xie; Li Tao
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Error correction for Moiré based creep measurement system
Author(s): Yi Liao; Kevin G. Harding; Edward J. Nieters; Robert W. Tait; Wayne C. Hasz; Nicole Piche
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Development of in-plane and out-of-plane deformation simultaneous measurement method by using only two speckle patterns
Author(s): Yasuhiko Arai
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Low-coherence interferometer using a pulsation laser diode
Author(s): Takamasa Suzuki; Yusuke Ueno; Samuel Choi; Osami Sasaki
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Three dimensional imaging with multiple wavelength speckle interferometry
Author(s): Bruce E. Bernacki; Bret D. Cannon; John T. Schiffern; Albert Mendoza
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Digital fringe profilometry based on triangular fringe patterns and spatial shift estimation
Author(s): Pu Cao; Jiangtao Xi; Yanguang Yu; Qinghua Guo
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Array-projected aperiodic sinusoidal fringes for high-speed 3-D shape measurement
Author(s): Stefan Heist; Andreas Mann; Peter Kühmstedt; Peter Schreiber; Gunther Notni
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High-speed 3D surface measurement with a fringe projection based optical sensor
Author(s): Christian Bräuer-Burchardt; Stefan Heist; Peter Kühmstedt; Gunther Notni
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Full-field step profile measurement with sinusoidal wavelength scanning interferometer
Author(s): Samuel Choi; Osami Sasaki; Takamasa Suzuki
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Advanced defect and metrology solutions
Author(s): Erik Novak
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Deformation kinetics of layered personal protective material under impact via terahertz reflectometry
Author(s): Anis Rahman; Aunik Rahman; Mark A. Mentzer
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Ultra-broadband high-resolution photoacoustic / photothermal microscopy system for material characterization
Author(s): Ashwin Sampathkumar
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Progress in the specification of optical instruments for the measurement of surface form and texture
Author(s): Peter J. de Groot
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Metrology tool for fast measurement of patterned sapphire substrate used in LED manufacturing
Author(s): Joanna Schmit; Son Bui; Oh-Kyu Kwon; Dong Chen
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Dimensional metrology on a semiconductor packaging process using an optical comb
Author(s): Jungjae Park; Jonghan Jin; Saerom Maeng
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Development of portable 3D optical measuring system using structured light projection method
Author(s): Hiroshi Aoki
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Order and defectivity nanometrology by image processing and analysis of sub-20 nm BCPs features for lithographic applications
Author(s): C. Simão; D. Tuchapsky; W. Khunsin; A. Amann; M. A. Morris; Clivia Sotomayor Torres
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Super finished surface roughness measurement sensor for hard access area
Author(s): Zirong Zhai; Guangping Xie; Paolo Trallori; Ming Jia; Kevin G. Harding
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Optical design of a structured light phase shift system using no moving parts
Author(s): Kevin G. Harding
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Optical center alignment technique based on inner profile measurement method
Author(s): Toshitaka Wakayama; Toru Yoshizawa
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Three-dimensional shape measurement system applied to superficial inspection of non-metallic pipes for the hydrocarbons transport
Author(s): Javier R. Arciniegas; Andrés L. González; L. A. Quintero; Carlos R. Contreras; Jaime E. Meneses
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Study on the stitching interferometry for the surface profile measurement of a large aperture component
Author(s): Weirui Zhao; Lirong Qiu; Weiqian Zhao; Genrui Cao
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Accurate and flexible calibration technique for fringe projection profilometry by using encoded points and Fourier analysis
Author(s): Andrés L. González; Carlos R. Contreras; Jaime E. Meneses
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