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Proceedings of SPIE Volume 8977

MOEMS and Miniaturized Systems XIII
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Volume Details

Volume Number: 8977
Date Published: 26 March 2014
Softcover: 35 papers (320) pages
ISBN: 9780819498908

Table of Contents
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Front Matter: Volume 8977
Author(s): Proceedings of SPIE
Micro-scanning mirrors for high-power laser applications in laser surgery
Author(s): Thilo Sandner; Simon Kimme; Thomas Grasshoff; Ulrich Todt; Alexander Graf; Cristian Tulea; Achim Lenenbach; Harald Schenk
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Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors
Author(s): S. Gu-Stoppel; J. Janes; H. J. Quenzer; U. Hofmann; W. Benecke
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Analysis of capacitive sensing for 2D-MEMS scanner laser projection
Author(s): Thomas von Wantoch; Christian Mallas; Ulrich Hofmann; Joachim Janes; Bernhard Wagner; Wolfgang Benecke
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Tunable External Cavity Quantum Cascade Lasers (EC-QCL): an application field for MOEMS based scanning gratings
Author(s): Jan Grahmann; André Merten; Ralf Ostendorf; Michael Fontenot; Daniela Bleh; Harald Schenk; Hans-Joachim Wagner
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High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors
Author(s): Mohammad J. Moghimi; Krishna N. Chattergoon; David L. Dickensheets
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Wafer-level vacuum-packaged two-axis MEMS scanning mirror for pico-projector application
Author(s): Ulrich Hofmann; Frank Senger; Joachim Janes; Christian Mallas; Vanessa Stenchly; Thomas von Wantoch; Hans-Joachim Quenzer; Manfred Weiss
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A robust design and fabrication of micromachined electro-absorptive optical modulator for 3D imaging
Author(s): Yong-Hwa Park; Yong-Chul Cho; Jang-Woo You; Chang-Young Park; Heesun Yoon; Sang-Hun Lee; Byung Hoon Na; Gun Wu Ju; Hee Ju Choi; Yong Tak Lee
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Next generation miniature simultaneous multi-hyperspectral imaging systems
Author(s): Michele Hinnrichs; Neelam Gupta
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MEMS based miniature FT-IR engine with built-in photodetector
Author(s): Yoshihisa Warashina; Tomofumi Suzuki; Kohei Kasamori; Ryosuke Okumura; Yuki Matsuo; Mitsutaka Takemura
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A new generation of MEMS middle-infrared spectrometers
Author(s): Thomas Otto; Ray Saupe; Volker Stock; Thomas Seider; Thomas Gessner
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MEMS Fabry-Perot interferometer with Si-air mirrors for mid- and thermal infrared
Author(s): Mikko Tuohiniemi; Antti Näsilä; Altti Akujärvi
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High-speed 32×32 MEMS optical phased array
Author(s): Mischa Megens; Byung-Wook Yoo; Trevor Chan; Weijian Yang; Tianbo Sun; Connie J. Chang-Hasnain; Ming C. Wu; David A. Horsley
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Newly developed broadband plasmonic absorber for uncooled infrared detectors
Author(s): Hae-Seok Park; Sung Hyun Nam; Hyun-Gue Hong; Sookyoung Roh; Seokho Yun; JungWoo Kim; Dongil Kwon; U-In Chung
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Three-dimensional collimation of in-plane-propagating light using silicon micromachined mirror
Author(s): Yasser M. Sabry; Diaa Khalil; Bassam Saadany; Tarik Bourouina
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Analog of electromagnetically induced transparency in coupled one-dimensional photonic crystal cavities
Author(s): Feng Tian; Guangya Zhou; Fook Siong Chau; Yu Du; Jie Deng
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Nano-scale optical actuation based on coupled one-dimensional photonic crystal cavities
Author(s): Feng Tian; Guangya Zhou; Fook Siong Chau; Yu Du; Jie Deng
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A bi-material microbeam based thermal actuator for out-of-plane rotation
Author(s): Ali Najafi Sohi; Patricia M. Nieva
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Holographic display with a FPD-based complex spatial light modulator
Author(s): Song Hoon; GeeYoung Sung; Kanghee Won; Jungkwuen An; Youngjun Yun; Jae Eun Jung; Jesada Ungnapatanin; Da-Jung Lim; Hwi Kim; Hong-Seok Lee; U In Chung
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High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications
Author(s): Jan-Uwe Schmidt; Ulrike A. Dauderstaedt; Peter Duerr; Martin Friedrichs; Thomas Hughes; Thomas Ludewig; Dirk Rudloff; Tino Schwaten; Daniela Trenkler; Michael Wagner; Ingo Wullinger; Andreas Bergstrom; Peter Bjoernangen; Fredrik Jonsson; Tord Karlin; Peter Ronnholm; Torbjorn Sandstrom
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Speckle reduction technique for embeddable MEMS-laser pico-projector
Author(s): N. Abelé; C. Le Gros; J. Masson; L. Kilcher
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Large array of 2048 tilting micromirrors for astronomical spectroscopy: optical and cryogenic characterization
Author(s): Frédéric Zamkotsian; Michael Canonica; Patrick Lanzoni; Wilfried Noell; Sebastien Lani
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MMI-based MOEMS FT spectrometer for visible and IR spectral ranges
Author(s): Bassem M. Al-Demerdash; Mostafa Medhat; Yasser M. Sabry; Bassam Saadany; Diaa Khalil
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On-chip NIR optical spectrometer based on polymeric waveguide and metallic nano-structures
Author(s): Maurine Malak; Konstantins Jefimovs; Irene Philipoussis; Edoardo Alberti; Toralf Scharf
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Resolution and speed improvements of mid-infrared Fabry-Perot microspectrometers for the analysis of hydrocarbon gases
Author(s): Martin Ebermann; Norbert Neumann; Karla Hiller; Mario Seifert; Marco Meinig; Steffen Kurth
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MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range
Author(s): Jussi H. Mäkynen; Mikko Tuohiniemi; Antti Näsilä; Rami Mannila; Jarkko E. Antila
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MEMS optical tunable filter based on free-standing subwavelength silicon layers
Author(s): Haitham Omran; Yasser M. Sabry; Mohamed Sadek; Khaled Hassan; Mohamed Y. Shalaby; Diaa Khalil
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MEMS infrared approaches to detector based on nonlinear oscillation and wavelength selective emitter using surface plasmon polariton
Author(s): Minoru Sasaki; Shinya Kumagai
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Tunable MOEMS Fabry-Perot interferometer for miniaturized spectral sensing in near-infrared
Author(s): A. Rissanen; R. Mannila; M. Tuohiniemi; A. Akujärvi; J. Antila
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Planar integrated polymer-based optical strain sensor
Author(s): Christian Kelb; Eduard Reithmeier; Bernhard Roth
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Mechanically amplified MEMS optical accelerometer with FPI readout
Author(s): Edward Davies; David S. George; Andrew S. Holmes
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Efficient grating simulation for general incident beam
Author(s): Site Zhang; Frank Wyrowski; Jani Tervo
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Parabasal thin element approximation for the analysis of the diffractive optical elements
Author(s): Huiying Zhong; Site Zhang; Frank Wyrowski; Muhammad Ahmad; Hagen Schweitzer
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120° silicon double mirrors for use in a micro-optical gyroscope
Author(s): T. Niesel; A. Dietzel
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Rapidly analyzing parametric resonance and manufacturing yield of MEMS 2D scanning mirrors using hybrid finite-element/behavioral modeling
Author(s): Sandipan Maity; Shuangqin Liu; Stephane Rouvillois; Gunar Lorenz; Mattan Kamon
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Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera
Author(s): Thilo Sandner; Thomas Grasshoff; Markus Schwarzenberg; Richard Schroedter; Harald Schenk
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