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Micromachining and Microfabrication Process Technology XIX
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Volume Details

Volume Number: 8973
Date Published: 25 March 2014
Softcover: 23 papers (220) pages
ISBN: 9780819498861

Table of Contents
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Front Matter: Volume 8973
Author(s): Proceedings of SPIE
Fabrication of microelectromechanical systems (MEMS) cantilevers for photoacoustic (PA) detection of terahertz (THz) radiation
Author(s): R. Newberry; N. Glauvitz; R. A. Coutu; I. R. Medvedev; D. Petkie
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Isolating the negative stiffness region of a buckled Si/SiO2 membrane
Author(s): Kyle K. Ziegler; Robert A. Lake; Ronald A. Coutu
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Thin film fabrication and system integration test run for a microactuator for a tuneable lens
Author(s): Dominik Hoheisel; Lutz Rissing
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Calibrating bimetallic grayscale photomasks to photoresist response for precise micro-optics fabrication
Author(s): Glenn H. Chapman; Reza Qarehbaghi; Santiago Roche
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Deep silicon etching: current capabilities and future directions
Author(s): Russ Westerman; Linnell Martinez; David Pays-Volard; Ken Mackenzie; Thierry Lazerand
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Chemical mechanical polishing of boron-doped polycrystalline silicon
Author(s): Hamidreza Pirayesh; Kenneth Cadien
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A novel process for the fabrication of microstructures half the listed minimum feature size of a direct-write laser lithography system
Author(s): Robert A. Lake; Ronald A. Coutu
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Periodic nanostructures fabricated by Talbot extreme ultraviolet lithography
Author(s): W. Li; D. Patel; C. S. Menoni; A. Stein; W. Chao; E. Anderson; M. C. Marconi
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Fabrication of 3D surface structures using grayscale lithography
Author(s): Christopher Stilson; Rajan Pal; Ronald A. Coutu
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Residual stress control during the growth and release process in gold suspended microstructures
Author(s): Akshdeep Sharma; Deepak Bansal; Amit Kumar; Dinesh Kumar; Kamaljit Rangra
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Phase Change Materials (PCM) fabricated in vertical structures for reconfigurable and tunable circuits
Author(s): Eduardo Barajas; Ronald A. Coutu
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Microfabrication of passive electronic components with printed graphene-oxide deposition
Author(s): Dogan Sinar; George K. Knopf; Suwas Nikumb
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Optimal microelectromechanical systems (MEMS) device for achieving high pyroelectric response of AlN
Author(s): Bemnnet Kebede; Ronald A. Coutu; LaVern Starman
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Fabrication technology to increase surface area of ionomer membrane material and its application towards high surface area electric double-layer capacitors
Author(s): Alberto Andre Chang; Jasbir N. Patel; Cristina Cordoba; Bozena Kaminska; Karen Kavanagh
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Laser micromachining of oxygen reduced graphene-oxide films
Author(s): Dogan Sinar; George K. Knopf; Suwas Nikumb; Anatoly Andrushchenko
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Laser assisted and hermetic room temperature bonding based on direct bonding technology
Author(s): Jeroen Haneveld; Peter Tijssen; Johannes Oonk; Mark Olde Riekerink; Hildebrand Tigelaar; Ronny van't Oever; Marko Blom
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Design and fabrication of sub-wavelength annular apertures on fiber tip for femtosecond laser machining
Author(s): Yen-Chun Tung; Ming-Han Chung; I-Hui Sung; Chih-Kung Lee
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Design of active temperature compensated composite free-free beam MEMS resonators in a standard process
Author(s): George Xereas; Vamsy P. Chodavarapu
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Design and fabrication of three-axis accelerometer sensor microsystem for wide temperature range applications using semi-custom process
Author(s): A. Merdassi; Y. Wang; G. Xereas; V. P. Chodavarapu
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Facile fabrication of nanogap electrodes for suspended graphene characterization using direct ion beam patterning
Author(s): Zhengqing John Qi; A. T. Charlie Johnson
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Resonator structures on AlN ceramics surface treated by laser radiation
Author(s): Pawel E. Koziol; Arkadiusz J. Antonczak; Bogusz Stepak; Przemyslaw A. Gorski; Michal Walczakowski; Norbert Palka; Krzysztof M. Abramski
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Annular heating of optical fiber with a CO2 laser with reflective axicon elements
Author(s): William Klimowych
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Compliant MEMS mechanism to extend resolution in Fourier transform spectroscopy
Author(s): A. Sauceda-Carvajal; H. D. Kennedy-Cabrera; J. Hernández-Torres; A. L. Herrera-May; José Mireles
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