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Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII
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Volume Details

Volume Number: 8819
Date Published: 25 September 2013
Softcover: 14 papers (112) pages
ISBN: 9780819496690

Table of Contents
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Front Matter: Volume 8819
Author(s): Proceedings of SPIE
Controlling high-throughput manufacturing at the nano-scale
Author(s): Khershed P. Cooper
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Inkjet printing of carrier transport layers for inverted organic solar cells
Author(s): Eric Danielson; Harish Subbaraman; Ananth Dodabalapur
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Detection limits for nanoparticles in solution with classical turbidity spectra
Author(s): G. Le Blevennec; Théo Chevallier
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New generation CMOS 2D imager evaluation and qualification for semiconductor inspection applications
Author(s): Wei Zhou; Darcy Hart
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Illumination design for semiconductor backlight inspection and application extensions
Author(s): Wei Zhou; Todd Rutherford; Darcy Hart
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6-DOF displacement and angle measurements using heterodyne laser encoder
Author(s): Ssu-Wen Pan; Hung-Lin Hsieh; Wei-Cheng Wang
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NSF nanomanufacturing program and its implications for measurement and control
Author(s): Khershed P. Cooper
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Nanomanufacturing concerns about measurements made in the SEM I: imaging and its measurement
Author(s): Michael T. Postek; András E. Vladár
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Advance in dimensional measurements of nano-objects based on defocusing of the electron probe of a scanning electron microscope
Author(s): M. N. Filippov; V. P. Gavrilenko; V. B. Mityukhlyaev; A. V. Rakov; P. A. Todua
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Quantitative microscope characterization for optical measurements with sub-nm parametric uncertainties
Author(s): Bryan M. Barnes; Jing Qin; Hui Zhou; Richard M. Silver
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Nanomanufacturing concerns about measurements made in the SEM II: specimen contamination
Author(s): Michael T. Postek; András E. Vladár; Kavuri P. Purushotham
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Pulse-to-pulse stability analysis in a frequency-doubled, q-switched Nd:YAG rod-laser
Author(s): Matheus A. Tunes; Cláudio G. Schön; Niklaus Ursus Wetter
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Study of ion beam damage in magnetic tunnel junction on FIB prepared samples
Author(s): Kwangho Park; Cheolwoong Yang; Kyuchul Kim; Dongwoo Nam; Kyuman Hwang; Junsoo Bae; Juhyeon Ahn; Jin Choi; Soonoh Park; Sangsup Jeong; Hanku Cho; Eunseung Jeong
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Development of the size calibration SOP for SEM measurement
Author(s): Hyuksang Kwon; Si Yeon Noh; Nam Woong Song
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