### PROCEEDINGS VOLUME 8789

Modeling Aspects in Optical Metrology IVFormat | Member Price | Non-Member Price |
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Softcover | $105.00 * | $105.00 * |

*Available as a black-and-white photocopy reprint only. Allow two weeks reprinting time plus standard delivery time. No discounts or returns apply.

Volume Details

Volume Number: 8789

Date Published: 13 May 2013

Softcover: 39 papers (384) pages

ISBN: 9780819496058

Date Published: 13 May 2013

Softcover: 39 papers (384) pages

ISBN: 9780819496058

Table of Contents

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Front Matter: Volume 8789

Author(s): Proceedings of SPIE

Author(s): Proceedings of SPIE

Assessment of the scatterometry capability to detect an etch process deviation

Author(s): N. Troscompt; M. Besacier; M. Saïb

Author(s): N. Troscompt; M. Besacier; M. Saïb

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Mueller matrix characterization using spectral reflectometry

Author(s): Dror Shafir; Gilad Barak; Michal Haim Yachini; Matthew Sendelbach; Cornel Bozdog; Shay Wolfling

Author(s): Dror Shafir; Gilad Barak; Michal Haim Yachini; Matthew Sendelbach; Cornel Bozdog; Shay Wolfling

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Numerical investigations of the influence of different commonly applied approximations in scatterometry

Author(s): J. Endres; S. Burger; M. Wurm; B. Bodermann

Author(s): J. Endres; S. Burger; M. Wurm; B. Bodermann

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Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle

Author(s): Victor Soltwisch; Sven Burger; Frank Scholze

Author(s): Victor Soltwisch; Sven Burger; Frank Scholze

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Phase unwrapping using geometric constraints for high-speed fringe projection based 3D measurements

Author(s): Christian Bräuer-Burchardt; Peter Kühmstedt; Gunther Notni

Author(s): Christian Bräuer-Burchardt; Peter Kühmstedt; Gunther Notni

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Sensitivity analysis of tilted-wave interferometer asphere measurements using virtual experiments

Author(s): Ines Fortmeier; Manuel Stavridis; Axel Wiegmann; Michael Schulz; Goran Baer; Christof Pruss; Wolfgang Osten; Clemens Elster

Author(s): Ines Fortmeier; Manuel Stavridis; Axel Wiegmann; Michael Schulz; Goran Baer; Christof Pruss; Wolfgang Osten; Clemens Elster

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A method to measure sub nanometric amplitude displacements based on optical feedback interferometry

Author(s): Francisco J. Azcona; Reza Atashkhooei; Santiago Royo; Jorge Méndez Astudillo; Ajit Jha

Author(s): Francisco J. Azcona; Reza Atashkhooei; Santiago Royo; Jorge Méndez Astudillo; Ajit Jha

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Influence of surface structure on shape and roughness
measurement using two-wavelength speckle interferometry

Author(s): Thomas Bodendorfer; Philipp Mayinger; Alexander W. Koch

Author(s): Thomas Bodendorfer; Philipp Mayinger; Alexander W. Koch

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Design rules for a compact and low-cost optical position sensing of MOEMS tilt mirrors based on a Gaussian-shaped light source

Author(s): Marcus Baumgart; Andreas Tortschanoff

Author(s): Marcus Baumgart; Andreas Tortschanoff

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Extremum seeking control to avoid speckle-dropouts in a vibrometer

Author(s): Robert Dehnert; Sascha Mayer; Bernd Tibken

Author(s): Robert Dehnert; Sascha Mayer; Bernd Tibken

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Characterisation and comparison of ophthalmic instrument quality using a model eye with reverse ray-tracing

Author(s): Conor Sheil; Alexander V. Goncharov

Author(s): Conor Sheil; Alexander V. Goncharov

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Modelling PTB's spatial angle autocollimator calibrator

Author(s): Oliver Kranz; Ralf D. Geckeler; Andreas Just; Michael Krause

Author(s): Oliver Kranz; Ralf D. Geckeler; Andreas Just; Michael Krause

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Transmission functions of optical choppers for Gaussian beam distributions: modeling and simulations

Author(s): Octavian Cira; Virgil-Florin Duma

Author(s): Octavian Cira; Virgil-Florin Duma

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Deconvolution microscopy of living cells for phase-contrast imaging

Author(s): Guanxiao Cheng; Ping Xu; Zhilong Sun; Chunquan Hong; Zelin Li

Author(s): Guanxiao Cheng; Ping Xu; Zhilong Sun; Chunquan Hong; Zelin Li

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Measurement based simulation of microscope deviations for evaluation of stitching algorithms for the extension of Fourier-based alignment

Author(s): Florian Engelke; Markus Kästner; Eduard Reithmeier

Author(s): Florian Engelke; Markus Kästner; Eduard Reithmeier

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Reconstruction of SNOM near-field images from rigorous optical simulations by including topography artifacts

Author(s): M. Ermes; S. Lehnen; K. Bittkau; R. Carius

Author(s): M. Ermes; S. Lehnen; K. Bittkau; R. Carius

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Defect parameters retrieval based on optical projection images

Author(s): Dongbo Xu; Sikun Li; Xiangzhao Wang; Tim Fühner; Andreas Erdmann

Author(s): Dongbo Xu; Sikun Li; Xiangzhao Wang; Tim Fühner; Andreas Erdmann

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Alternative discretization in the aperiodic Fourier modal method leading to reduction in computational costs

Author(s): M. Pisarenco; I. D. Setija

Author(s): M. Pisarenco; I. D. Setija

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Modeling and optimization of high index contrast gratings with aperiodic topologies

Author(s): Milan Maksimovic

Author(s): Milan Maksimovic

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Effect of imposed boundary conditions on the accuracy of transport of intensity equation based solvers

Author(s): J. Martinez-Carranza; K. Falaggis; T. Kozacki; Malgorzata Kujawinska

Author(s): J. Martinez-Carranza; K. Falaggis; T. Kozacki; Malgorzata Kujawinska

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Rigorous Dyson equation and quasi-separable T-scattering operator technique for study of magnetic response from ordered and disordered non-magnetic particles' ensembles at electromagnetic wave multiple scattering

Author(s): Yurii N. Barabanenkov; Mikhail Yu. Barabanenkov

Author(s): Yurii N. Barabanenkov; Mikhail Yu. Barabanenkov

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The influence of nonlinear modal propagation analysis on MMI power splitters for miniaturization

Author(s): M. Tajaldini; M. Z. Mat Jafri

Author(s): M. Tajaldini; M. Z. Mat Jafri

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Multi resonant platform based on modified metallic nanoparticles for biological tissue characterization

Author(s): Renato Iovine; L. La Spada; R. Tarparelli; L. Vegni

Author(s): Renato Iovine; L. La Spada; R. Tarparelli; L. Vegni

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Investigation of microstructured fiber geometries by scatterometry

Author(s): Poul-Erik Hansen; Sven Burger

Author(s): Poul-Erik Hansen; Sven Burger

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Simulation based optimization of scatterometric signatures by designed near field structures

Author(s): V. Ferreras Paz; K. Frenner; W. Osten

Author(s): V. Ferreras Paz; K. Frenner; W. Osten

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Alternative methods for uncertainty evaluation in EUV scatterometry

Author(s): Sebastian Heidenreich; Mark-Alexander Henn; Hermann Gross; Bernd Bodermann; Markus Bär

Author(s): Sebastian Heidenreich; Mark-Alexander Henn; Hermann Gross; Bernd Bodermann; Markus Bär

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The effect of line roughness on DUV scatterometry

Author(s): Mark-Alexander Henn; Sebastian Heidenreich; Hermann Gross; Bernd Bodermann; Markus Bär

Author(s): Mark-Alexander Henn; Sebastian Heidenreich; Hermann Gross; Bernd Bodermann; Markus Bär

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A simulation environment for assisting system design of coherent laser doppler wind sensor for active wind turbine pitch control

Author(s): Leilei Shinohara; Tuan Anh Pham Tran; Thorsten Beuth; Harsha Umesh Babu; Nico Heussner; Siegwart Bogatscher; Svetlana Danilova; Wilhelm Stork

Author(s): Leilei Shinohara; Tuan Anh Pham Tran; Thorsten Beuth; Harsha Umesh Babu; Nico Heussner; Siegwart Bogatscher; Svetlana Danilova; Wilhelm Stork

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Modelling laser interferometers for the measurement of the Avogadro constant

Author(s): Birk Andreas; Giovanni Mana; Enrico Massa; Carlo Palmisano

Author(s): Birk Andreas; Giovanni Mana; Enrico Massa; Carlo Palmisano

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Fundamental performance determining factors of the ultrahigh-precision space-borne optical metrology system for the LISA Pathfinder mission

Author(s): Gerald Hechenblaikner; Reinhold Flatscher

Author(s): Gerald Hechenblaikner; Reinhold Flatscher

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EFPI signal processing method providing picometer-level resolution in cavity length measurement

Author(s): Nikolai Ushakov; Leonid Liokumovich; Andrey Medvedev

Author(s): Nikolai Ushakov; Leonid Liokumovich; Andrey Medvedev

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Comparative analysis of absolute methods to test rotationally asymmetric surface deviation

Author(s): Weihong Song; Xi Hou; Fan Wu; Wenchuan Zhao

Author(s): Weihong Song; Xi Hou; Fan Wu; Wenchuan Zhao

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A new method for adjusting the lateral transfer hollow retroreflector

Author(s): Alexandr G. Ershov

Author(s): Alexandr G. Ershov

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Absolute testing of flats with all terms by using even and odd functions

Author(s): Xin Jia; Fuchao Xu; Tingwen Xing; Zhixiang Liu

Author(s): Xin Jia; Fuchao Xu; Tingwen Xing; Zhixiang Liu

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Modeling of Risley prisms devices for exact scan patterns

Author(s): Alexandru Schitea; Marius Tuef; Virgil-Florin Duma; Aurel M. Vlaicu

Author(s): Alexandru Schitea; Marius Tuef; Virgil-Florin Duma; Aurel M. Vlaicu

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Efficient and stable numerical method for evaluation of Zernike polynomials and their Cartesian derivatives

Author(s): Pavel Novák; Jíří Novák

Author(s): Pavel Novák; Jíří Novák

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Mathematical model of a galvanometer-based scanner: simulations and experiments

Author(s): Corina Mnerie; Stefan Preitl; Virgil-Florin Duma

Author(s): Corina Mnerie; Stefan Preitl; Virgil-Florin Duma

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Design of soft x-ray gratings for free electron lasers: from specification to characterization

Author(s): Maurizio Vannoni; Daniele La Civita; Rolf Follath; Liubov Samoylova; Frank Siewert; Harald Sinn

Author(s): Maurizio Vannoni; Daniele La Civita; Rolf Follath; Liubov Samoylova; Frank Siewert; Harald Sinn

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Super-resolution imaging based on liquid crystal on silicon displays technology

Author(s): A. Hussain; M. Sohail; J. L. Martínez; A. Lizana; A. Márquez; J. Campos

Author(s): A. Hussain; M. Sohail; J. L. Martínez; A. Lizana; A. Márquez; J. Campos

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S-Genius, a universal software platform
with versatile inverse problem resolution for scatterometry

Author(s): David Fuard; Nicolas Troscompt; Ismael El Kalyoubi; Sébastien Soulan; Maxime Besacier

Author(s): David Fuard; Nicolas Troscompt; Ismael El Kalyoubi; Sébastien Soulan; Maxime Besacier

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Phase recovery from interferograms under severe vibrations

Author(s): Jesús Muñoz-Maciel; Francisco J. Casillas-Rodriguez; Miguel Mora González; Francisco G. Peña Lecona; Victor M. Durán Ramirez

Author(s): Jesús Muñoz-Maciel; Francisco J. Casillas-Rodriguez; Miguel Mora González; Francisco G. Peña Lecona; Victor M. Durán Ramirez

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Diffractive optical element for optical data storage

Author(s): S. Yoshida; N. Unno; H. Akamatsu; K. Yamada; J. Taniguchi; M. Yamamoto

Author(s): S. Yoshida; N. Unno; H. Akamatsu; K. Yamada; J. Taniguchi; M. Yamamoto

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