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Proceedings of SPIE Volume 8788

Optical Measurement Systems for Industrial Inspection VIII
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Volume Details

Volume Number: 8788
Date Published: 9 April 2013
Softcover: 119 papers (1070) pages
ISBN: 9780819496041

Table of Contents
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Front Matter: Volume 8788
Author(s): Proceedings of SPIE
Low coherence full field interference microscopy or optical coherence tomography: recent advances, limitations and future trends
Author(s): I. Abdulhalim
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Excess fraction measurement of a transparent glass thickness in wavelength tuning interferometry
Author(s): Yangjin Kim; Kenichi Hibino; Kanako Harada; Naohiko Sugita; Mamoru Mitsuishi
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Metrology for adhesive layer of temporary bonding wafers using IR interferometry
Author(s): Po-Yi Chang; Yi-Sha Ku; Chia-Hung Cho
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Concept, realization and performance of a two-beam phase-shifting point diffraction interferometer
Author(s): Nikolay Voznesenskiy; Mariia Voznesenskaia; Natalia Petrova; Artur Abels
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Sparsity-based denoising method of wrapped-phase reconstructions in digital holography
Author(s): Pasquale Memmolo; Maria Iannone; Maurizio Ventre; Paolo A. Netti; Andrea Finizio; Melania Paturzo; Pietro Ferraro
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Holographic Interferometry based on photorefractive crystal to measure 3D thermo-elastic distortion of composite structures and comparison with finite element models
Author(s): C. Thizy; F. Eliot; D. Ballhause; K. R. Olympio; R. Kluge; A. Shannon; G. Laduree; D. Logut; M. P. Georges
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Lensless single-exposure super-resolved interferometric microscopy
Author(s): Luis Granero; Carlos Ferreira; Javier García; Vicente Micó
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Resolution enhancement and autofocusing in digital holographic microscopy by using structured illumination
Author(s): Peng Gao; Giancarlo Pedrini; Wolfgang Osten
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Hybrid and transflective system based on digital holographic microscope and low coherent interferometer for high gradient shape measurement
Author(s): K. Liżewski; S. Tomczewski; J. Kostencka; T. Kozacki
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Total compensation of chromatic errors in digital color holography using a single recording
Author(s): Mathieu Leclercq; Pascal Picart
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Lensless object scanning holography for diffuse objects
Author(s): Javier García; Carlos Ferreira; Vicente Micó
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A long trace profiler with large dynamical range
Author(s): A. Ritucci; M. Rossi
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Optical characterization method for very small microlenses (sub-50 micron) for industrial mass-production applications
Author(s): Myun-Sik Kim; Jonathan Sunarjo; Kenneth J. Weible; Reinhard Voelkel
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Shape reconstruction using dual wavelength digital holography and speckle movements
Author(s): Davood Khodadad; Emil Hällstig; Mikael Sjödahl
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Digital holographic inspection for the straight pipe inner surface using multiwavelength from laser diodes
Author(s): M. Yokota; T. Koyama; T. Kawakami
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Seeing through smoke and flames: a challenge for imaging capabilities, met thanks to digital holography at far infrared
Author(s): Massimiliano Locatelli; Eugenio Pugliese; Melania Paturzo; Vittorio Bianco; Andrea Finizio; Anna Pelagotti; Pasquale Poggi; Lisa Miccio; Riccardo Meucci; Pietro Ferraro
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A computational tool to highlight anomalies on shearographic images in optical flaw detection
Author(s): A. V. Fantin; D. P. Willemann; M. Viotti; A. Albertazzi
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ESPI based on spatial fringe analysis method using only two sheets of speckle patterns
Author(s): Y. Arai; S. Yokozeki
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Relation between vectorial source structure and coherence-polarization of light
Author(s): Rakesh Kumar Singh; Dinesh N. Naik; Hitoshi Itou; Maruthi M. Brundavanam; Yoko Miyamoto; Mitsuo Takeda
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A polarization-based frequency shifting interferometry for inspecting transparent objects in microelectronics manufacturing
Author(s): Seung Hyun Lee; Min Young Kim
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Fast and accurate line scanner based on white light interferometry
Author(s): Patrick Lambelet; Rudolf Moosburger
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High speed measurement of specular surfaces based on carrier fringe patterns in a line scan Michelson interferometer setup
Author(s): Holger Knell; Peter Lehmann
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Speed-up chromatic sensors by optimized optical filters
Author(s): Miro Taphanel; Bastiaan Hovestreydt; Jürgen Beyerer
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Robust evaluation of intensity curves measured by confocal microscopies
Author(s): Jörg Seewig; Indek Raid; Christian Wiehr; Bini Alapurath George
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Model-based assistance system for confocal measurements of rough surfaces
Author(s): F. Mauch; W. Lyda; W. Osten
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Parallelized chromatic confocal sensor systems
Author(s): Matthias Hillenbrand; Adrian Grewe; Mohamed Bichra; Roman Kleindienst; Lucia Lorenz; Raoul Kirner; Robert Weiß; Stefan Sinzinger
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Robust signal evaluation for Chromatic Confocal Spectral Interferometry
Author(s): Tobias Boettcher; Wolfram Lyda; Marc Gronle; Florian Mauch; Wolfgang Osten
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Measurement, visualization and analysis of extremely large data sets with a nanopositioning and nanomeasuring machine
Author(s): O. Birli; K.-H. Franke; G. Linß; T. Machleidt; E. Manske; F. Schale; H.-C. Schwannecke; E. Sparrer; M. Weiß
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Model-based, active inspection of three-dimensional objects using a multi-sensor measurement system
Author(s): Marc Gronle; Wolfram Lyda; Wolfgang Osten
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High-frequency optical fiber microphone for condition-based maintenance application
Author(s): Daniele Tosi; Massimo Olivero; Guido Perrone; Alberto Vallan
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A space-borne fiber-optic interrogator module based on narrow-band tunable laser diode for temperature monitoring in telecommunication satellites
Author(s): P. Putzer; N. Kuhenuri; A. W. Koch; S. Schweyer; A. Hurni; M. Plattner
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Miniature low-cost extrinsic Fabry-Perot interferometer for low-pressure detection
Author(s): Sven Poeggel; Daniele Tosi; Gabriel Leen; Elfed Lewis
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Applications of tilted fiber Bragg grating in liquid parameters measurement
Author(s): Biqiang Jiang; Jianlin Zhao; Abdul Rauf; Chuan Qin; Wei Jiang
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Experimental comparison of phase-shifting fringe projection and statistical pattern projection for active triangulation systems
Author(s): Peter Lutzke; Martin Schaffer; Peter Kühmstedt; Richard Kowarschik; Gunther Notni
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High-speed 3D shape measurement using array projection
Author(s): Stefan Heist; Marcel Sieler; Andreas Breitbarth; Peter Kühmstedt; Gunther Notni
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Influence of the structured illumination frequency content on the correspondence assignment precision in stereophotogrammetry
Author(s): Marcus Große; Martin Schaffer; Bastian Harendt; Richard Kowarschik
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High resolution measurements of filigree, inner geometries with endoscopic micro fringe projection
Author(s): Christoph Ohrt; Markus Kästner; Eduard Reithmeier
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Measurement of aspheres and free-form surfaces in a non-null test interferometer: reconstruction of high-frequency errors
Author(s): Goran Baer; Johannes Schindler; Jens Siepmann; Christof Pruß; Wolfgang Osten; Michael Schulz
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Non-contact profiling for high precision fast asphere topology measurement
Author(s): Jürgen Petter; Gernot Berger
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Highly accurate surface maps from profilometer measurements
Author(s): Kate M. Medicus; Jessica DeGroote Nelson; Mike P. Mandina
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Lateral location error compensation algorithm for measuring aspheric surfaces by sub-aperture stitching interferometry
Author(s): Zixin Zhao; Hong Zhao; Feifei Gu; Lu Zhang
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Deflectometry vs. interferometry
Author(s): Gerd Häusler; Christian Faber; Evelyn Olesch; Svenja Ettl
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Approach to the measurement of astronomical mirrors with new procedures
Author(s): E. Hofbauer; R. Rascher; Th. Stubenrauch; J. Liebl; R. Maurer; A. Zimmermann; O. Rösch; J. Reitberger
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Precision aspheric optics testing with SCOTS: a deflectometry approach
Author(s): Peng Su; Manal Khreishi; Run Huang; Tianquan Su; James H. Burge
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Methods to obtain the waveform profile from slope measurements
Author(s): Alfonso Moreno; Manuel Espínola; José Martínez; Juan Campos
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Moiré deflectometry under incoherent illumination: 3D profiler for specular surfaces
Author(s): Tomohiro Hirose; Tsunaji Kitayama
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Optical profilometer using laser based conical triangulation for inspection of inner geometry of corroded pipes in cylindrical coordinates
Author(s): Pedro D. V. Buschinelli; João Ricardo C. Melo; Armando Albertazzi; João M. C. Santos; Claudio S. Camerini
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Active retroreflector with in situ beam analysis to measure the rotational orientation in conjunction with a laser tracker
Author(s): O. Hofherr; C. Wachten; C. Müller; H. Reinecke
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Automated control of robotic camera tacheometers for measurements of industrial large scale objects
Author(s): Teuvo Heimonen; Jukka Leinonen; Jani Sipola
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Development of alignment-guidance device for grooved roll mill using parallel projection imaging technique
Author(s): Toshifumi Kodama; Teruhisa Iwata; Daisaku Yamagami; Keiji Takagi
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Photogrammetry based system for the measurement of cylindrical forgings axis straightness
Author(s): Aneta Zatočilová; Radek Poliščuk; David Paloušek; Jan Brandejs
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Sub-nanometer in-die overlay metrology: measurement and simulation at the edge of finiteness
Author(s): Henk-Jan H. Smilde; Martin Jak; Arie den Boef; Mark van Schijndel; Murat Bozkurt; Andreas Fuchs; Maurits van der Schaar; Steffen Meyer; Stephen Morgan; Kaustuve Bhattacharyya; Guo-Tsai Huang; Chih-Ming Ke; Kai-Hsiung Chen
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Nanometrology of periodic nanopillar arrays by means of light scattering
Author(s): Oliver Paul; Frank Widulle; Bernd H. Kleemann; Andreas Heinrich
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Phase information in coherent Fourier scatterometry
Author(s): N. Kumar; O. El Gawhary; S. Roy; S. F. Pereira; H. P. Urbach
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Revisiting parallel catadioptric goniophotometers
Author(s): Boris Karamata; Marilyne Andersen
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Metrology solutions using optical scatterometry for advanced CMOS: III-V and Germanium multi-gate field-effect transistors
Author(s): Hock-Chun Chin; Bin Liu; Xingui Zhang; Moh-Lung Ling; Chan-Hoe Yip; Yongdong Liu; Jiangtao Hu; Yee-Chia Yeo
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The road towards accurate optical width measurements at the industrial level
Author(s): Bernd Bodermann; Rainer Köning; Detlef Bergmann; Egbert Buhr; Wolfgang Hässler-Grohne; Jens Flügge; Harald Bosse
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3D shape measurements of fast moving rough surfaces by two tilted interference fringe systems
Author(s): Robert Kuschmierz; Philipp Günther; Jürgen W. Czarske
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Optical vibration analysis of MEMS devices with pm-resolution in x, y, and z directions
Author(s): Moritz Giesen; Robert Kowarsch; Wanja Ochs; Marcus Winter; Christian Rembe
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Characterization and demonstration of a 12-channel Laser-Doppler vibrometer
Author(s): T. Haist; C. Lingel; W. Osten; K. Bendel; M. Giesen; M. Gartner; C. Rembe
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Diagnostic of structures in heat and power generating industries with utilization of 3D digital image correlation
Author(s): M. Malesa; M. Kujawińska; K. Malowany; B. Siwek
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Integrated digital image correlation for residual stress measurement
Author(s): Antonio Baldi; Filippo Bertolino
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Infrared differential interference contrast microscopy for overlay metrology on 3D-interconnect bonded wafers
Author(s): Yi-sha Ku; Deh-Ming Shyu; Yeou-Sung Lin; Chia-Hung Cho
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A lateral sensor for the alignment of two formation-flying satellites
Author(s): S. Roose; Y. Stockman; Z. Sodnik
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Analysis of method of 3D shape reconstruction using scanning deflectometry
Author(s): Jiří Novák; Pavel Novák; Antonín Mikš
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CO2 laser photoacoustic spectrometry: sensitivity and drift analysis
Author(s): Jan Skřínský; Zdeněk Zelinger; Václav Nevrlý; Tomáš Hejzlar; Barbora Baudišová; Petr Bitala
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Imaging sensor for monitoring of the piston mechanism in cylindrical valves
Author(s): Ekaterina N. Pantiushina; Alexey A. Gorbachev
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Development of program package for investigation and modeling of carbon nanostructures in diamond like carbon films with the help of Raman scattering and infrared absorption spectra line resolving
Author(s): David B. Hayrapetyan; Levon Hovhannisyan; Paytsar A. Mantashyan
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Temperature sensing by modulating phase of optical fiber
Author(s): Guanxiao Cheng; Ping Xu; Chunquan Hong; Yang Cao; Feng Zhu; Shuyang Feng; Ruibin Lin
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Real-time visualization and analysis of airflow field by use of digital holography
Author(s): Jianglei Di; Bingjing Wu; Xin Chen; Junjiang Liu; Jun Wang; Jianlin Zhao
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Visual and dynamic measurement of temperature fields by use of digital holographic interferometry
Author(s): Jianlin Zhao; Jianglei Di; Bingjing Wu; Jun Wang; Qian Wang; Hongzhen Jiang
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Calibration of misalignment aberrations in cylindrical surface interferometric measurement
Author(s): Junzheng Peng; Dongbao Ge; Yingjie Yu; Mingyi Chen
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Three-axis optic-electronic autocollimation system for the inspection of large-scale objects
Author(s): Igor A. Konyakhin; Alexandr N. Timofeev; Aleksey Konyakhin
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Optical device for the improvement of positioning accuracy in large machine tools
Author(s): L. Cocola; M. Fedel; M. Mocellin; R. Casarin; L. Poletto
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Measurement uncertainty in the profile detection on solar troughs
Author(s): P. Sansoni; D. Fontani; F. Francini; S. Toccafondi; M. Messeri; S. Coraggia; L. Mercatelli; D. Jafrancesco; E. Sani
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The impact of polarization on metrology performance of the lateral shearing interferometer
Author(s): Zhengpeng Yao; Tingwen Xing
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Comparison of Michelson and Linnik interference microscopes with respect to measurement capabilities and adjustment efforts
Author(s): Peter Kühnhold; Weichang Xie; Peter Lehmann
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Application of line-scanning microscopy using a linear sensor in semiconductor industry: shape and thickness measurements
Author(s): Milton P. Macedo; C. M. B. A. Correia
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Optical resolution measurement system for small lens by using slanted-slit method
Author(s): Kuang-Yuh Huang; Chou-Min Chia; Elmer Chang
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A compensation method of large aperture optical lens for gravity deformation
Author(s): Lijuan Yang; Tingwen Xing; Jie Feng
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Reaching accuracies of Lambda/100 with the Three-Flat-Test
Author(s): Steffen Wittek
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Optical measurement system applied to continuous displacement monitoring of long-span suspension bridges
Author(s): L. Lages Martins; J. M. Rebordão; A. Silva Ribeiro
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Small angle light scattering for a glass fibre diameter characterization
Author(s): Grzegorz Świrniak; Grzegorz Głomb
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Design and location deviation of the computer generated holograms used for aspheric surface testing
Author(s): Jie Feng; Chao Deng; Tingwen Xing
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Laser welding control by monitoring of plasma
Author(s): Hana Chmelickova; Hana Sebestova; Martina Havelkova; Lenka Rihakova; Libor Nozka
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Design of omnidirectional camera lens system with catadioptic system
Author(s): Jae Heung Jo; Sangon Lee; Hyeon Jin Seo; Jung Hwan Lee; Joon Mo Kim
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Dual view x-ray inspection system for foreign objects detection in canned food
Author(s): Zhiwen Lu; Ningsong Peng
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Development of a zero-method interferometer by means of dynamic generation of reference wave front
Author(s): Ryohei Hanayama; Katsuhiro Ishii
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Absolute scale-based imaging position encoder with submicron accuracy
Author(s): Andrey G. Anisimov; Anton V. Pantyushin; Oleg U. Lashmanov; A. S. Vasilev; Alexander N. Timofeev; Valery V. Korotaev; Sergey V. Gordeev
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CCD camera-based analysis of thin film growth in industrial PACVD processes
Author(s): G. Zauner; T. Schulte; C. Forsich; Daniel Heim
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Towards superresolution imaging with optical vortex scanning microscope
Author(s): Jan Masajada; Agnieszka Popiołek-Masajada; Ireneusz Augustyniak; Bohdan Sokolenko
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Image quality improvement using speckle method in digital holography by means of multi-mode fiber
Author(s): H. Funamizu; S. Shimoma; Y. Aizu
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Measurement of residual stress fields in FHPP welding: a comparison between DSPI combined with hole-drilling and neutron diffraction
Author(s): Matias R. Viotti; Armando Albertazzi; Peter Staron; Marcelo Pisa
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Iterative alignment of reflector segments using a laser tracker
Author(s): Lizeth Cabrera Cuevas; Maribel Lucero Alvarez; Andrea Leon-Huerta; Emilio Hernandez Rios; Josefina Hernandez Lázaro; Carlos Tzile Torres; David Castro Santos; David M. Gale; Grant Wilson; Gopal Narayanan; David R. Smith
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Tilted objects EFI in digital holography by two different numerical approaches
Author(s): Marcella Matrecano; Melania Paturzo; Pietro Ferraro
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Non-Bayesian noise reduction in digital holography by random resampling masks
Author(s): Vittorio Bianco; Melania Paturzo; Pasquale Memmolo; Andrea Finizio; Bahram Javidi; Pietro Ferraro
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Research of autocollimating angular deformation measurement system for large-size objects control
Author(s): Tatiana V. Turgalieva; Igor A. Konyakhin
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Design and experiment of testing an off-axis aspheric surface by computer generated hologram
Author(s): Shijie Li; Fan Wu; Qiang Chen; Bin Fan; Lianghong Li
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Spectral monitoring of toluene and ethanol in gasoline blends using Fourier-Transform Raman spectroscopy
Author(s): Valentin Ortega Clavero; Andreas Weber; Werner Schröder; Dan Curticapean; Patrick Meyrueis; Nicolas Javahiraly
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Reflection, transmission and color measurement system for the online quality control of float glass coating process
Author(s): Izmir Mamedbeili; Fahrettin Cakiroglu; Gokhan Bektas; Dadash Riza; Fikret Hacizade
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Energetic sensitivity of optical-electronic systems based on polychromatic optical equisignal zone
Author(s): Anton A. Maraev; Alexandr N. Timofeev
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Automatic unit for measuring refractive index of air based on Ciddor equation and its verification using direct interferometric measurement method
Author(s): V. Hucl; M. Čížek; J. Hrabina; B. Mikel; Š. Řeřucha; Z. Buchta; P. Jedlička; A. Lešundák; J. Oulehla; L. Mrňa; M. Šarbort; R. Šmíd; J. Lazar; O. Číp
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Alignment of a large outdoor antenna surface using a laser tracker
Author(s): Andrea Leon-Huerta; Maribel Lucero Alvarez; Emilio Hernandez Rios; Carlos Tzile Torres; Lizeth Cabrera Cuevas; David Castro Santos; Josefina Hernandez Lázaro; David M. Gale; Grant Wilson; Gopal Narayanan
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Iterative improvements to the surface error of a 1.7 metre aluminium reflector
Author(s): David Castro Santos; Lizeth Cabrera Cuevas; Emilio Hernandez Rios; David M. Gale; David R. Smith
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Efficient testing methodologies for microcameras in a gigapixel imaging system
Author(s): Seo Ho Youn; Daniel L. Marks; Paul O. McLaughlin; David J. Brady; Jungsang Kim
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Wavelength modulation-based method for interference phase detection with reduced optical complexity
Author(s): Šimon Řeřucha; Martin Šarbort; Zdeněk Buchta; Bretislav Mikel; Radek Šmíd; Martin Čížek; Petr Jedlička; Jan Řerucha; Josef Lazar; Ondřej Číp
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Camera-based curvature measurement of a large incandescent object
Author(s): Arttu V. H. Ollikkala; Timo P. Kananen; Anssi J. Mäkynen; Markus Holappa
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Design and analysis of a low-cost compensated POF displacement sensor for industrial applications
Author(s): Daniele Tosi; Massimo Olivero; Guido Perrone; Alberto Vallan
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Digital holographic microscopy for the study of nano-fibers
Author(s): Hamdy H. Wahba; Mikael Sjödahl; Per Gren; Erik Olsson
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Implementation of a fringe visibility based algorithm in coherence scanning interferometry for surface roughness measurement
Author(s): P. C. Montgomery; F. Salzenstein; D. Montaner; B. Serio; P. Pfeiffer
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Turbine-blade tip clearance and tip timing measurements using an optical fiber bundle sensor
Author(s): Iker Garcia; Josu Beloki; Joseba Zubia; Gaizka Durana; Gotzon Aldabaldetreku
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Precision positioning with suppression of the influence of refractive index of air
Author(s): M. Holá; J. Hrabina; J. Oulehla; M. Čížek; B. Mikel; Š. Řeřucha; Z. Buchta; O. Číp; J. Lazar
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Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer
Author(s): Jeremias Seppä; Ivan Kassamakov; Anton Nolvi; Ville Heikkinen; Tor Paulin; Antti Lassila; Ling Hao; Edward Hæggsröm
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Computed tomography of cylindrically symmetric object by use of digital holography
Author(s): Zhelang Pan; Shiping Li; Jingang Zhong
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Stimulated LIF studied using pulsed digital holography and modelling
Author(s): Eynas Amer; Jonas Stenvall; Per Gren; Mikael Sjödahl
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Surface normal deblurring caused by conveyor movement for fast surface inspection
Author(s): Toru Kurihara; Yugo Katsuki; Shigeru Ando
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Tape measuring system using linear encoder and digital camera
Author(s): Tae Bong Eom; Don Young Jeong; Myung Soon Kim; Jae Wan Kim; Jong Ahn Kim
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Automated hardware and software complex for extended light sources verification
Author(s): Elena V. Gorbunova; Vladimir S. Peretyagin; Aleksandr N. Chertov
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Scanning fringe projection for fast 3D inspection
Author(s): Marc Honegger; Michael Kahl; Sandra Trunz; Stefan Rinner; Andreas Ettemeyer; Patrick Lambelet
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