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PROCEEDINGS VOLUME 8763

Smart Sensors, Actuators, and MEMS VI
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Volume Details

Volume Number: 8763
Date Published: 31 May 2013
Softcover: 99 papers (880) pages
ISBN: 9780819495600

Table of Contents
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Front Matter: Volume 8763
Author(s): Proceedings of SPIE
A MEMS vibration energy harvester for automotive applications
Author(s): R. van Schaijk; R. Elfrink; J. Oudenhoven; V. Pop; Z. Wang; M. Renaud
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Wearable and flexible thermoelectric generator with enhanced package
Author(s): L. Francioso; C. De Pascali; A. Taurino; P. Siciliano; A. De Risi
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Hybrid energy storage system for wireless sensor node powered by aircraft specific thermoelectric energy harvesting
Author(s): K. Thangaraj; A. Elefsiniotis; S. Aslam; Th. Becker; U. Schmid; J. Lees; C. A. Featherston; R. Pullin
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ZnO nanogenerators: energy generation through scavenging vibration, advantages of using a diode
Author(s): Joe Briscoe; Nimra Jalai; Peter Wooliams; Mark Stewart; Markys Cain; Paul M. Weaver; Steve Dunn
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Ceramic joints for pressure sensors development
Author(s): Radovan Novotný; Radek Vlach; Jaroslav Kadlec; Radek Kuchta
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Cu-Sn transient liquid phase wafer bonding for MEMS applications
Author(s): C. Flötgen; M. Pawlak; E. Pabo; H. J. van de Wiel; G. R. Hayes; V. Dragoi
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Analysis of thermal vias in molded interconnect devices
Author(s): Jörg Reitterer; Franz Fidler; Ferdinand Saint Julien-Wallsee; Maximilian Barth; Wolfgang Eberhardt; Ulrich Keßler; Heinz Kück; Ulrich Schmid
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Characterization of quartz-based package for RF MEMS
Author(s): G. Sordo; A. Faes; G. Resta; J. Iannacci
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Novel applications of piezoresistive thin film systems based on hydrogenated carbon
Author(s): Saskia Biehl; Christian Rumposch; Christian Recknagel
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Optical properties of copper oxide thin films as selective sensing principle for hydrogen sulfide detection
Author(s): Janosch Kneer; Manuel Boxberg; Jürgen Wöllenstein
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Electrically conductive Pt-Rh/ZrO2 and Pt-Rh/HfO2 nanocomposite electrodes for high temperature harsh environment sensors
Author(s): Scott C. Moulzolf; David J. Frankel; Mauricio Pereira da Cunha; Robert J. Lad
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Fabrication and properties of SmFe2-PZT magnetoelectric thin films
Author(s): Ioanna Giouroudi; Mohammed Alnassar; Juergen Kosel
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High-speed ultra-broad tuning MEMS-VCSELs for imaging and spectroscopy
Author(s): V. Jayaraman; B. Potsaid; J. Jiang; G. D. Cole; M. E. Robertson; C. B. Burgner; D. D. John; I. Grulkowski; W. Choi; T. H. Tsai; J. Liu; B. A. Stein; S. T. Sanders; J. G. Fujimoto; A. E. Cable
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High-precision optoelectronic sensor device for monitoring fermentation kinetics and maceration of wine
Author(s): F. Jiménez-Márquez; J. Vázquez; J. Úbeda; J. L. Sánchez-Rojas
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Optical position feedback of quasi-static 2D MOEMS mirrors
Author(s): A. Tortschanoff; M. Baumgart; D. Holzmann; M. Lenzhofer; T. Sandner; A. Kenda
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Influence of fluid-structure interaction on microcantilever vibrations: applications to rheological fluid measurement and chemical detection
Author(s): I. Dufour; E. Lemaire; B. Caillard; H. Debéda; C. Lucat; S. M. Heinrich; F. Josse; O. Brand
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Comparison of quartz tuning forks and AlN-based extensional microresonators for viscosity measurements in oil/fuel mixtures
Author(s): J. Toledo; T. Manzaneque; J. Hernando-García; J. Vazquez; A. Ababneh; H. Seidel; M. Lapuerta; J. L. Sánchez-Rojas
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Flexible hot-film anemometer arrays for flow measurements on curved structures
Author(s): T. Beutel; M. Schwerter; M. Leester-Schädel; A. Dietzel; S. Büttgenbach
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Microthermal sensors for determining fluid composition and flow rate in fluidic systems
Author(s): B. Schmitt; C. Kiefer; A. Schütze
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A high thermal resistance MEMS-based Pirani vacuum sensor chip
Author(s): Florian Dams; Rupert Schreiner
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Electromagnetic microactuators
Author(s): S. Büttgenbach; A. T. Al-Halhouli; M. Feldmann; V. Seidemann; A. Waldschik
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Thermal design of a tristable electromagnetic linear microactuator with high displacement and low actuation force for mass storage applications
Author(s): X. Xu; H.-D. Ngo; P. Mackowiak; E. Obermeier; D. Miletic; H. Gerdes; H.-H. Gatzen
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Highly sensitive thermal actuators for temperature sensing
Author(s): H. Steiner; W. Hortschitz; M. Stifter; F. Keplinger; T. Sauter
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Design of high-efficiency vibration energy harvesters and experimental functional tests for improving bandwidth and tunability
Author(s): A. Somà; G. De Pasquale
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Fabrication of vertical nanowire resonators for aerosol exposure assessment
Author(s): Stephan Merzsch ; Hutomo Suryo Wasisto; Andrej Stranz ; Peter Hinze ; Thomas Weimann ; Erwin Peiner ; Andreas Waag
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Quality factor enhancement for resonant MEMS applying an analogue feedback circuit driven by a lock-in amplifier
Author(s): Martin Kucera; Franz Hofbauer; Tomás Manzaneque; Victor Ruiz; José Luis Sánchez-Rojas; Achim Bittner; Ulrich Schmid
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Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes
Author(s): J. Iannacci; M. Gottardi; E. Serra; R. Di Criscienzo; A. Borrielli; M. Bonaldi
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All-silicon microforce sensor for bio applications
Author(s): Vladimir T. Stavrov; Assen A. Shulev; Chavdar M. Hardalov; Vencislav M. Todorov; Ilia R. Roussev
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Efficient nanoparticle filtering using bioinspired functional sufaces
Author(s): Sebastian Busch; Manuel Ketterer; Xenia Vinzenz; Christian Hoffmann; Jürgen Wöllenstein
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A low complexity wireless microbial fuel cell monitor using piezoresistive sensors and impulse-radio ultra-wide-band
Author(s): M. Crepaldi; A. Chiolerio; T. Tommasi; D. Hidalgo; G. Canavese; S. Stassi; D. Demarchi; F. C. Pirri
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On a high-potential variable flexural stiffness device
Author(s): Markus Henke; Gerald Gerlach
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A miniaturized linear shaker system for MEMS sensor characterization
Author(s): Jörg Encke; Wilfried Hortschitz; Andreas Kainz; Harald Steiner; Franz Keplinger; Thilo Sauter
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Controlled fabrication of advanced functional structures on the nanoscale by means of electron beam-induced processing
Author(s): Sebastian W. Schmidt; Johann Foucher; Christian Penzkofer; Bernd Irmer
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Rotational microactuator for microsurgery
Author(s): Monika Leester-Schädel; J.-W. Thies; T. Schubert; S. Büttgenbach; A. Dietzel
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Simulation and fabrication of integrated polystyrene microlens in microfluidic system
Author(s): Yiqiang Fan; Huawei Li; David Conchouso; Ian G. Foulds
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Magnetic tunnel junction sensors with pTesla sensitivity for biomedical imaging
Author(s): S. Cardoso; L. Gameiro; D. C. Leitao; F. Cardoso; R. Ferreira; E. Paz; P. P. Freitas
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Hydrogel plug for independent sample and buffer handling in continuous microchip capillary electrophoresis
Author(s): Dietmar Puchberger-Enengl; Mireille Bipoun; Martin Smolka; Christian Krutzler; Franz Keplinger; Michael J. Vellekoop
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A new injection method for soil nutrient analysis in capillary electrophoresis
Author(s): M. Smolka; D. Puchberger-Enengl; M. Bipoun; G. Fercher; A. Klasa; C. Krutzler; F. Keplinger; M. J. Vellekoop
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Simulation and optimization of the magnetic field in an electroplated copper micro-coil
Author(s): Maher Matar; Alaaldeen T. Al-Halhouli; Stephanus Büttgenbach; Andreas H. Dietzel
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Development of energy harvester system for avionics
Author(s): Z. Hadas; V. Vetiska; Z. Ancik; C. Ondrusek; V. Singule
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Optimized energy harvesting from mechanical vibrations through piezoelectric actuators, based on a synchronized switching technique
Author(s): P. Tsampas; G. Roditis; V. Papadimitriou; P. Chatzakos; Tat-Hean Gan
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CMOS compatible low-frequency aluminium nitride MEMS piezoelectric energy harvesting device
Author(s): N. Jackson; R. O'Keeffe; M. O'Neill; F. Waldron; A. Mathewson
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Comparison of low-power single-stage boost rectifiers for sub-milliwatt electromagnetic energy harvesters
Author(s): Gyorgy D. Szarka; Plamen P. Proynov; Bernard H. Stark; Stephen G. Burrow
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Load optimised piezoelectric generator for powering battery-less TPMS
Author(s): D. Blažević; E. Kamenar; S. Zelenika
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Flat inductors for human motion energy harvesting
Author(s): Juris Blums; Galina Terlecka; Ilgvars Gornevs; Ausma Vilumsone
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Modeling, simulation and experimental testing of the MEMS thermoelectric generators in wide range of operational conditions
Author(s): Z. Ancik; R. Vlach; L. Janak; P. Kopecek; Z. Hadas
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Design and material aspects for thermoelectric energy harvesting devices in aircrafts
Author(s): A. Elefsiniotis; N. Kokorakis; Th. Becker; U. Schmid
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A nano-power energy harvesting IC for arrays of piezoelectric transducers
Author(s): M. Dini; M. Filippi; A. Romani; V. Bottarel; G. Ricotti; M. Tartagni
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Design, fabrication and characterization of a very low frequency piezoelectric energy harvester designed for heart beat vibration scavenging
Author(s): M. Colin; S. Basrour; L. Rufer
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A miniaturised autonomous sensor based on nanowire materials platform: the SiNAPS mote
Author(s): Naser Koshro Pour; Maher Kayal; Guobin Jia; Bjoern Eisenhawer; Fritz Falk; Adrian Nightingale; John C. DeMello; Yordan M. Georgiev; Nikolay Petkov; Justin D. Holmes; Michael Nolan; Giorgos Fagas
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Design, fabrication and characterization of a micromachined piezoelectric energy harvester excited by ambient vibrations
Author(s): Ali B. Alamin Dow; Achim Bittner; Ulrich Schmid; Nazir P. Kherani
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Photovoltaic energy harvesting for smart sensor systems
Author(s): Martin Kasemann; Karola Rühle; Karim M. Gad; Stefan W. Glunz
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Parametrization of ambient energy harvesters for complementary balanced electronic applications
Author(s): Yannick Verbelen; An Braeken; Abdellah Touhafi
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Investigation on the dielectric behavior of aluminum nitride thin films at different temperatures applying a time-zero approach
Author(s): Michael Schneider; Achim Bittner; Ulrich Schmid
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Interfacial adhesion between the iron fillers and the silicone matrix in magneto-rheological elastomers at high deformations
Author(s): Tobias Pössinger; Christian Bolzmacher; Laurence Bodelot; Nicolas Triantafyllidis
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Investigations on the high temperature compatibility of various adhesion layers for platinum
Author(s): A. Ababneh; A. N. Al-Omari; M. Marschibois; D. Feili; H. Seidel
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2-2 composites based on [011]-poled relaxor-ferroelectric single crystals: from the piezoelectric anisotropy to the hydrostatic response
Author(s): C. R. Bowen; V. Yu. Topolov; D. N. Betts; H. A. Kim
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Simulation and characterization of silicon nanopillar-based nanoparticle sensors
Author(s): Hutomo Suryo Wasisto; Stephan Merzsch ; Kai Huang ; Andrej Stranz ; Andreas Waag ; Erwin Peiner
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Simulation, design and fabrication of a planar micro thermoelectric generator
Author(s): S. Pelegrini; A. Adami; C. Collini; P. Conci; L. Lorenzelli; A. A. Pasa
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Advanced modeling of AlN-based micromachined energy harvesters driven by beta-emitting radioisotopes
Author(s): Ali B. Alamin Dow; Ulrich Schmid; Nazir P. Kherani
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Modeling methods of MEMS micro-speaker with electrostatic working principle
Author(s): D. Tumpold; M. Kaltenbacher; C. Glacer; M. Nawaz; A. Dehé
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Experimental methodology to measure damping in microstructures by using the actuation force hysteresis curve
Author(s): G. De Pasquale; A. Somá
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A large deflection model of silicon membranes for testing intrinsic stress of MEMS microphones by measuring pull-In voltage
Author(s): Florian Oesterle; Franz Fink; Harald Kuhn; Alfons Dehé; Robert Weigel; Alexander Koelpin
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Analysis of local deformation effects in resistive strain sensing of a submicron-thickness AFM cantilever
Author(s): Jonathan D. Adams; Christian H. Schwalb; Marcel Winhold; Maja Ðukić; Michael Huth; Georg E. Fantner
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Magnetic circuit design for miniaturized magnetic shape memory alloy actuators
Author(s): C. Bolzmacher
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Exploiting infrared transparency of silicon for the construction of advanced MOEMS vibration sensors
Author(s): Wilfried Hortschitz; Andreas Kainz; Jörg Encke; Franz Kohl; Harald Steiner; Michael Stifter; Thilo Sauter; Franz Keplinger
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A resonance-based solar element: a numerical model and micro/nano technology application
Author(s): P. Fiala; P. Drexler; D. Nespor
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Biomimetic MEMS sensor array for navigation and water detection
Author(s): Oliver Futterknecht; Mark O. Macqueen; Salmah Karman; S. Zaleha M. Diah; Ille C. Gebeshuber
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Simulation and design optimization of transparent heaters for spectroscopic micro cells
Author(s): Henning Völlm; Jonathan Herrmann; Reinhard Maier; Dara Feili; Volker Häublein; Heiner Ryssel; Helmut Seidel
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Flip-chip packaging of piezoresistive barometric pressure sensors
Author(s): T. Waber; W. Pahl; M. Schmidt; G. Feiertag; S. Stufler; R. Dudek; A. Leidl
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A Lorentz force actuated magnetic field sensor with capacitive read-out
Author(s): M. Stifter; H. Steiner; A. Kainz; F. Keplinger; W. Hortschitz; T. Sauter
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Mid-infrared rib waveguide absorption sensors based on Si
Author(s): Ventsislav Lavchiev; Christian Kristament; Markus Brandstetter; Georg Ramer; Bernhard Lendl; Ursula Hedenig; Thomas Grille; Peter Irsigler; Bernhard Jakoby
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MEMS sensors for mm-range displacement measurements with sub-nm resolution
Author(s): Vladimir T. Stavrov; Vencislav M. Todorov; Assen A. Shulev; Chavdar M. Hardalov
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Detection of bad indoor environment with a miniaturized gas sensor system
Author(s): J. Huber; R. Binninger; K. Schmitt; J. Wöllenstein
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Optical actuation of silicon cantilevers: modelling and experimental investigation
Author(s): Fei Jiang; Adrian Keating; Mariusz Martyuink; Dilusha Silva; Lorenzo Faraone; John M. Dell
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MEMS-based silicon cantilevers with integrated electrothermal heaters for airborne ultrafine particle sensing
Author(s): Hutomo Suryo Wasisto; Stephan Merzsch ; Andreas Waag ; Erwin Peiner
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Design and fabrication of a 5 MHz ultrasonic phased array probe with curved transducer
Author(s): Julia Fischer; Thomas Herzog; Susan Walter; Henning Heuer
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MEMS pressure sensor with maximum performances by using novel back-side direct-exposure concept featuring through glass vias
Author(s): B. Mukhopadhyay; M. Fritz; P. Mackowiak; T. C. Vu; O. Ehrmann; K.-D. Lang; H.-D. Ngo
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From nature to MEMS: towards the detection-limit of crickets' hair sensors
Author(s): A. M. K. Dagamseh
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Counting x-ray line detector with monolithically integrated readout circuits
Author(s): T. Lohse; P. Krüger; H. Heuer; M. Oppermann; H. Torlee; N. Meyendorf
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Design strategies of opto-mechanical micro oscillators for the detection of the ponderomotive squeezing
Author(s): A. Borrielli; M. Bonaldi; E. Serra; A. Bagolini; M. Boscardin; F. S. Cataliotti; F. Marin; F. Marino; A. Pontin; G. A. Prodi
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Measurement of the 1/f noise of lateral actuated MEMS with sidewall piezoresistors
Author(s): Vladimir Stavrov; Franz Kohl; Thilo Sauter; Philip Philipov
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MEMS pressure sensor fabricated by advanced bulk micromachining techniques
Author(s): Gabriel Vanko; Peter Hudek; Johann Zehetner; Jaroslav Dzuba; Pavlina Choleva; Martin Vallo; Ivan Rýger; Tibor Lalinský
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Shortening of the process chain by tactile inline measurement
Author(s): Lutz Doering; Nicole Thronicke; Christian Löbner; Thomas Frank; Steffen Reich; Stefan Völlmeke; Arndt Steinke
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Chemical microsensors based on hydrogels with adjustable measurement range
Author(s): W. Haas; J. W. Bartha; W.-J. Fischer; A. Richter
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Self-aligned single-mask fabrication process for electro-thermal microactuators using ICP-RIE
Author(s): Ali B. Alamin Dow; Adel Gougam; Nazir P. Kherani; I. W. Rangelow
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Fabrication of an array-like freeform molding tool for UV-replication using a step and repeat process
Author(s): J. Dunkel; F. Wippermann; A. Brückner; A. Reimann; A. Bräuer
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Fabrication of double-sided micro structured mechanical sensors based on SU-8 resist using a new micro molding process
Author(s): A. Oerke; S. Büttgenbach; A. Dietzel
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Multilayer micromachined bandpass filter for L/S band satellite communication systems
Author(s): A. Q. A. Qureshi; L. Pelliccia; S. Colpo; J. Iannacci; P. Farinelli; B. Margesin
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Contour and flexure-actuated in-plane modes of AlN-based piezoelectric vibrating MEMS
Author(s): V. Ruiz-Díaz; T. Manzaneque; J. Hernando-García; A. Ababneh; M. Kucera; A. N. Al-Omari; A. Bittner; U. Schmid; H. Seidel; J. L. Sánchez-Rojas
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Pressure dependence of the quality factor of piezoelectrically driven AlN/Si-microcantilevers
Author(s): A. Ababneh; A. N. Al-Omari; H. C. Qiu; T. Manzaneque; J. Hernando; J. L. Sánchez-Rojas; A. Bittner; U. Schmid; H. Seidel
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Microgalvanic nickel pulse plating process for the production of thermal actuators
Author(s): W. Hansal; H. Steiner; R. Mann; M. Halmdienst; J. Schalko; F. Keplinger
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Control of cavitation density through gas and acoustic uniformity in a proximity megasonic pre-bond cleaning system
Author(s): D. Dussault; E. Liebscher; F. Fournell; V. Dragoi
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Formation of a deposit on workpiece surface in polishing nonmetallic materials
Author(s): Yu. D. Filatov; G. Monteil; V. I. Sidorko; O. Yu Filatov
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A closed-loop system for frequency tracking of piezoresistive cantilever sensors
Author(s): Hutomo Suryo Wasisto; Qing Zhang ; Stephan Merzsch ; Andreas Waag ; Erwin Peiner
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Simulation of thick film PZT actuators with interdigitated electrodes
Author(s): Mohanad Mohammed Zaki; Sandy Zähringer; Norbert Schwesinger
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An autonomous structural health monitoring solution
Author(s): Carol A. Featherston; Karen M. Holford; Rhys Pullin; Jonathan Lees; Mark Eaton; Matthew Pearson
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Biologically inspired large scale chemical sensor arrays and embedded data processing
Author(s): S. Marco; A. Gutiérrez-Gálvez; A. Lansner; D. Martinez; J. P. Rospars; R. Beccherelli; A. Perera; T. Pearce; P. Vershure; K. Persaud
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