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Proceedings of SPIE Volume 8250

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
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Volume Details

Volume Number: 8250
Date Published: 16 March 2012
Softcover: 15 papers (174) pages
ISBN: 9780819488930

Table of Contents
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Front Matter: Volume 8250
Author(s): Proceedings of SPIE
Assembly and interconnect formation in MEMS/MOEMS application
Author(s): Hermann Oppermann
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Effects of dry plasma releasing process parameters and induced in-plane stress on MEMS devices yield
Author(s): Patricia M. Nieva; Jeremy R. Godin; Ryan C. Norris; Ali Najafi Sohi; Timothy Leung
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Evaluation of surface control and durability CNT and ITO coated PET transparent electrode under different dry conditions
Author(s): Joung-Man Park; Dong-Jun Kwon; Zuo-Jia Wang; Ga-Young Gu; Lawrence DeVries
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Usage induced changes to surface topography and material properties in polysilicon MEMS electrothermal structures
Author(s): Sahil Oak; Gautham Ramachandran; Tim Dallas
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Planar refractive microlens arrays with high fill-factor fabricated by polymer replication technique
Author(s): Minwoo Nam; Sang Sik Yang; Kee-Keun Lee
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Axial phase measurements of light interacting with microstructures
Author(s): Myun-Sik Kim; Toralf Scharf; Hans Peter Herzig
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Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry
Author(s): V. Heikkinen; K. Hanhijärvi; J. Aaltonen; K. Grigoras; I. Kassamakov; S. Franssila; E. Haeggström
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Reliability of high I/O high density CCGA interconnect electronic packages under extreme thermal environments
Author(s): Rajeshuni Ramesham
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Characterization of flourocarbon SAM coated MEMS tribogauge
Author(s): Ashwin Vijayasai; Gautham Ramachandran; Ganapathy Sivakumar; Charlie Anderson; Richard Gale; Tim Dallas
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Characterization of a nanocoating using a MEMS tribogauge
Author(s): Ashwin Vijayasai; Gautham Ramachandran; Ganapathy Sivakumar; Charlie Anderson; Richard Gale; Tim Dallas
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MEMS technology for miniaturized space systems: needs, status, and perspectives
Author(s): E. Gill; J. Guo
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MOEMS devices designed and tested for astronomical instrumentation in space
Author(s): Frederic Zamkotsian; Wilfried Noell
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Performance prediction and characterization of highly insulated microbolometers for space applications
Author(s): Zhiqiang Xu; Linh Ngo Phong; Timothy D. Pope
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Enhanced terahertz transmission by surface plasmon resonance
Author(s): Yongzheng Wen; Jiancheng Yang; Xiaomei Yu; Yuejin Zhao; Xiaohua Liu; Liquan Dong
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The unsettled world of leak rate physics: 1 atm large-volume considerations do not apply to MEMS packages: a practitioner's perspective
Author(s): Richard C. Kullberg; Arthur Jonath; Robert K. Lowry
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