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PROCEEDINGS VOLUME 8105

Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
Editor(s): Michael T. Postek
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Volume Details

Volume Number: 8105
Date Published: 19 September 2011
Softcover: 16 papers (132) pages
ISBN: 9780819487155

Table of Contents
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Front Matter: Volume 8105
Author(s): Proceedings of SPIE
Challenges and opportunities in nanomanufacturing
Author(s): Khershed P. Cooper; Ralph F. Wachter
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Nanoparticles and metrology: a comparison of methods for the determination of particle size distributions
Author(s): Victoria A. Coleman; Åsa K. Jämting; Heather J. Catchpoole; Maitreyee Roy; Jan Herrmann
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Strategies for nanoscale contour metrology using critical dimension atomic force microscopy
Author(s): Ndubuisi G. Orji; Ronald G. Dixson; András E. Vládar; Michael T. Postek
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Sidewall slope sensitivity of CD-AFM
Author(s): Aaron Cordes; Benjamin Bunday; Eric Cottrell
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High precision surface-profile metrology by scanning the repetition rate of femtosecond pulses
Author(s): Woo-Deok Joo; Young-Jin Kim; Yunseok Kim; Jiyong Park; Seung-Woo Kim
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Verification of scatterometer design
Author(s): Wenjing Zhao; Cornelius Hahlweg; Hendrik Rothe
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IR nanoscale spectroscopy and imaging
Author(s): Eamonn Kennedy; Fiona Yarrow; James H. Rice
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Linear variable filter based oil condition monitoring systems for offshore windturbines
Author(s): Benjamin R. Wiesent; Daniel G. Dorigo; Özlem Şimşek; Alexander W. Koch
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Two-photon fluorescence near-field pH measurement for mitochondria activity
Author(s): Y. Kanazashi; Y. Li; T. Onojima; K. Iwami; Y. Ohta; N. Umeda
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Light confinement by structured metal tips for antenna-based scanning near-field optical microscopy
Author(s): Joachim D. Jambreck; Miriam Böhmler; Mathias Rommel; Achim Hartschuh; Anton J. Bauer; Lothar Frey
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See-through-silicon inspection application studies based on traditional silicon imager
Author(s): Wei Zhou; Darcy Hart; Noah Bock; Rolf Shervey
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Whole field curvature and residual stress determination of silicon wafers by reflectometry
Author(s): Chi Seng Ng; Anand K. Asundi
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Common-path laser encoder system for nanopositioning
Author(s): Chyan-Chyi Wu; Cheng-Chih Hsu; Ju-Yi Lee; Chun-Yao Cheng
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Laser based imaging of time depending microscopic scenes with strong light emission
Author(s): Cornelius Hahlweg; Eugen Wilhelm; Hendrik Rothe
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Rapid defect detections of bonded wafer using near infrared polariscope
Author(s): Chi Seng Ng; Anand K. Asundi
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Development of cavity ring-down ellipsometry with spectral and submicrosecond time resolution
Author(s): Vassilis Papadakis; Michael A. Everest; Katerina Stamataki; Stelios Tzortzakis; Benoit Loppinet; T. Peter Rakitzis
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