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Proceedings of SPIE Volume 8066

Smart Sensors, Actuators, and MEMS V
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Volume Details

Volume Number: 8066
Date Published: 3 May 2011
Softcover: 87 papers (790) pages
ISBN: 9780819486554

Table of Contents
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Front Matter: Volume 8066
Author(s): Proceedings of SPIE
Wireless SAW sensor for high temperature applications: material point of view
Author(s): Omar Elmazria; Thierry Aubert
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Design and fabrication of piezoresistive p-SOI Wheatstone bridges for high-temperature applications
Author(s): Julian Kähler; Lutz Döring; Stephan Merzsch; Andrej Stranz; Andreas Waag; Erwin Peiner
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Microthruster with integrated platinum thin film resistance temperature detector (RTD), heater, and thermal insulation
Author(s): N. Miyakawa; W. Legner; T. Ziemann; D. Telitschkin; H.-J. Fecht; A. Friedberger
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Miniaturized piezoelectric structures for application temperatures up to 1000 °C
Author(s): S. Schmidtchen; J. Sauerwald; D. Richter; H. Fritze
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Thin film electrodes and passivation coatings for harsh environment microwave acoustic sensors
Author(s): Scott C. Moulzolf; David J. Frankel; George P. Bernhardt; Bryn Nugent; Robert J. Lad
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Smart ultrasonic sensors systems: investigations on aluminum nitride thin films for the excitation of high frequency ultrasound
Author(s): Susan Walter; Thomas Herzog; Henning Heuer; Hagen Bartzsch; Daniel Gloess
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Measurement of Young's modulus and residual stress of thin SiC layers for MEMS high temperature applications
Author(s): Oliver Pabst; Michael Schiffer; Ernst Obermeier; Tolga Tekin; Klaus Dieter Lang; Ha-Duong Ngo
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Mechanical properties of 1 um-thick metallic freestanding coatings measured by in-plane uniaxial stress
Author(s): Thibaut Fourcade; Cedric Seguineau; Jean Michel Desmarres; Talal Masri; Joël Alexis; Olivier Dalverny; Julien Martegoutte; Xavier Lafontan
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Fabrication process and characterization of micromechanical sensors based on SU-8 resist
Author(s): A. Jordan; S. Büttgenbach
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On-device extraction of thermal thin-film properties in calorimetric flow sensors
Author(s): Roman Beigelbeck; Almir Talic; Samir Cerimovic; Franz Kohl; Franz Keplinger
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Thin catalyst layers based on carbon nanotubes for PEM-fuel cell applications
Author(s): T. Bohnenberger; J. Matovic; U. Schmid
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Poly(dimethylsiloxane) photonic microbioreactors and multiple internal reflection systems for real time cell screening
Author(s): Pedro Ortiz; Stefanie Demming; Elisabet Fernández-Rosas; Bergoi Ibarlucea; Jordi Vila-Planas; Stephanus Büttgenbach; Andreu Llobera
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Mid-infrared CH2-stretch ratio sensor for suspended mammalian cells
Author(s): Sander van den Driesche; Christoph Haiden; Wojciech Witarski; Michael J. Vellekoop
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Resonant piezoelectric AlN-actuated microcantilevers for detection of antigen/antibody interactions
Author(s): M. J. Oliver; J. Hernando-García; A. Ababneh; H. Seidel; U. Schmid; J. Olivares; E. Iborra; P. Pobedinskas; K. Haenen; J. L. Sánchez-Rojas
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Microfluidic cartridges for DNA purification and genotyping processed in standard laboratory instruments
Author(s): Maximilian Focke; Daniel Mark; Fabian Stumpf; Martina Müller; Günter Roth; Roland Zengerle; Felix von Stetten
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New method for selectivity enhancement of SiC field effect gas sensors for quantification of NOx
Author(s): Christian Bur; Peter Reimann; Mike Andersson; Anita Lloyd Spetz; Andreas Schütze
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Fabrication of a miniaturized ionization gas sensor with polyimide spacer
Author(s): T. Walewyns; G. Scheen; E. Tooten; L. El Fissi; P. Dupuis; L. A. Francis
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Fabry-Pérot-based thin film structure used as IR-emitter of an NDIR gas sensor: ray tracing simulations and measurements
Author(s): Johann Mayrwöger; Christian Mitterer; Wolfgang Reichl; Christian Krutzler; Bernhard Jakoby
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Metallo-porphyrins as gas sensing material for colorimetric gas sensors on planar optical waveguides
Author(s): Carolin Peter; Katrin Schmitt; Martin Schiel; Jürgen Wöllenstein
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Gas sensors based on MEMS structures made of ceramic ZrO2/Y2O3 material
Author(s): A. A. Vasiliev; A. S. Lipilin; A. S. Lagutin; A. V. Pisliakov; N. P. Zaretskiy; N. N. Samotaev; A. V. Sokolov
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Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes
Author(s): A. Tortschanoff; A. Frank; M. Lenzhofer; M. Wildenhain; T. Sandner; A. Kenda
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Design of linear and nonlinear hybrid optical MEMS displacement sensors
Author(s): Wilfried Hortschitz; Franz Kohl; Harald Steiner; Matthias Sachse; Michael Stifter; Johannes Schalko; Artur Jachimowicz; Franz Keplinger
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Miniaturized multi channel infrared optical gas sensor system
Author(s): Jürgen Wöllenstein; Andre Eberhardt; Sven Rademacher; Katrin Schmitt
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A polyvinylidene fluoride (PVDF) based bimorph actuator for high speed laser beam manipulation
Author(s): R. Pérez; M. Král; H. Bleuler; R. Clavel
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A systems engineering approach to structural health monitoring of composites using embedded optical fibre Bragg sensors for aeronautical applications
Author(s): A. Japie van Wyk; Craig V. Roberson
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Impact damage detection of composite materials by fiber Bragg gratings
Author(s): Zoran Djinovic; Michael Scheerer; Milos Tomic
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Electro-acoustic sensors based on AlN thin film: possibilities and limitations
Author(s): Gunilla Wingqvist
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Development of capacitive RF MEMS switches with TaN and Ta2O5 thin films
Author(s): Anna Persano; Fabio Quaranta; Adriano Cola; Giorgio De Angelis; Romolo Marcelli; Pietro Siciliano
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Effect of electro-thermo-mechanical coupling on the short-circuit in RF microswitch operation
Author(s): E. Brusa; M. Gh. Munteanu
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A reconfigurable impedance matching network entirely manufactured in RF-MEMS technology
Author(s): J. Iannacci; D. Masotti; T. Kuenzig; M. Niessner
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Mechanical contact in system-level models of electrostatically actuated RF-MEMS switches: experimental analysis and modeling
Author(s): Martin Niessner; Jacopo Iannacci; Gabriele Schrag
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Modeling of gold microbeams for characterizing MEMS packages
Author(s): Alessandro Faes; Alena Repchankova; Francesco Solazzi; Benno Margesin
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Hardware implementation of an electrostatic MEMS-actuator linearization
Author(s): F. Mair; M. Egretzberger; A. Kugi
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Modeling and analysis of a micromachined piezoelectric energy harvester stimulated by ambient random vibrations
Author(s): Ali B. Alamin Dow; Hasan A. Al-Rubaye; David Koo; Michael Schneider; Achim Bittner; Ulrich Schmid; Nazir P. Kherani
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Modeling and characterization of a circular-shaped energy scavenger in MEMS surface micromachining technology
Author(s): F. Solazzi; J. Iannacci; A. Faes; F. Giacomozzi; B. Margesin; A. Tazzoli; G. Meneghesso
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Issues in validation of performances of piezoelectric vibration-based energy harvesters
Author(s): Saša Zelenika; David Blaževic
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Plucked piezoelectric bimorphs for energy harvesting applications
Author(s): Michele Pozzi; Meiling Zhu
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A novel MEMS design of a piezoelectric generator for fluid-actuated energy conversion
Author(s): Ingo Kuehne; Matthias Schreiter; Julian Seidel; Helmut Seidel; Alexander Frey
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Piezoelectric power generation for sensor applications: design of a battery-less wireless tire pressure sensor
Author(s): Noaman Makki; Remon Pop-Iliev
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Smart energy management and low-power design of sensor and actuator nodes on algorithmic level for self-powered sensorial materials and robotics
Author(s): Stefan Bosse; Thomas Behrmann
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Energy harvesting circuit for sensor system power supply
Author(s): P. Fiala; P. Drexler
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Gold-based thin multilayers for ohmic contacts in RF-MEMS switches
Author(s): V. Mulloni; J. Iannacci; R. Bartali; V. Micheli; S. Colpo; N. Laidani; B. Margesin
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AlN-based piezoelectric bimorph microgenerator utilizing low-level non-resonant excitation
Author(s): Stefan Hampl; Volker Cimalla; Tobias Polster; Martin Hoffmann
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Airborne particle generation for optical tweezers by thermo-mechanical membrane actuators
Author(s): T. Polster; S. Leopold; M. Hoffmann
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Characterization of the first in-plane mode of AlN-actuated microcantilevers
Author(s): V. Ruiz; J. Hernando-García; A. Ababneh; H. Seidel; U. Schmid; J. K. Gimzewski; J. L. Sánchez Rojas
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Growth and characterization of uniform ZnO films as piezoelectric materials using a hydrothermal growth technique
Author(s): E. Makarona; C. Fritz; G. Niarchos; Th. Speliotis; A. Arapoyanni; C. Tsamis
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Piezoelectric AlN-actuated micro-tuning forks for sensing applications
Author(s): M. Gil; T. Manzaneque; J. Hernando-García; A. Ababneh; H. Seidel; J. L. Sánchez-Rojas
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Improved load-deflection method for the extraction of elastomechanical properties of circularly shaped thin-film diaphragms
Author(s): Johannes Schalko; Roman Beigelbeck; Michael Stifter; Michael Schneider; Achim Bittner; Ulrich Schmid
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The impact of substrate properties on the electromigration resistance of sputter-deposited Cu thin films
Author(s): A. Bittner; N. Pagel; H. Seidel; U. Schmid
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Microfabricated self-resonant structure as a passive wireless chemical sensor
Author(s): Sheng Zhang; Praveenkumar Pasupathy; Dean P. Neikirk
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In incubator live cell imaging platform
Author(s): Nicola Moscelli; Wojciech Witarski; Sander van den Driesche; Michael J. Vellekoop
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Analytical investigation of the pull-in voltage in capacitive mechanical sensors
Author(s): J. Lardiès; M. Berthillier; F. M. L. Bellaredj
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Biomimetic MEMS to assist, enhance, and expand human sensory perceptions: a survey on state-of-the-art developments
Author(s): Teresa Makarczuk; Tina R. Matin; Salmah B. Karman; S. Zaleha M. Diah; Benyamin Davaji; Mark O. Macqueen; Jeanette Mueller; Ulrich Schmid; Ille C. Gebeshuber
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System modeling of a piezoelectric energy harvesting module for environments with high dynamic forces
Author(s): Alexander Frey; Julian Seidel; Matthias Schreiter; Ingo Kuehne
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3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls
Author(s): Antwi Nimo; Ulrich Mescheder; Bernhard Müller; Awad Saad Abou Elkeir
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Vibration energy harvester optimization using artificial intelligence
Author(s): Z. Hadas; C. Ondrusek; J. Kurfurst; V. Singule
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THz detection by modified thermopile
Author(s): Béla Szentpáli; Gábor Matyi; Péter Fürjes; Endre László; Gábor Battistig; István Bársony; Gergely Károlyi; Tibor Berceli
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Microfabricated ultrashort cantilever probes for high speed AFM
Author(s): C. Richter; P. Weinzierl; O. Krause; W. Engl; C. Penzkofer; B. Irmer; T. Sulzbach
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Tactile refreshable screen based on magneto-rheological fluids for map exploration and navigation tasks
Author(s): C. Bolzmacher; G. Changeon; V. Plaud; S. Roselier; J. Lozada; M. Hafez
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Robust pressure sensor for measurements in boundary layers of liquid fluids with medium total pressures
Author(s): T. Beutel; N. Ferreira; M. Leester-Schädel; S. Büttgenbach
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Non-electrical-power temperature-time integrating sensor for RFID based on microfluidics
Author(s): Mike Schneider; Martin Hoffmann
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Investigation on micromachining technologies for the realization of LTCC devices and systems
Author(s): T. Haas; C. Zeilmann; A. Bittner; U. Schmid
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IR thermocycler for centrifugal microfluidic platform with direct on-disk wireless temperature measurement system
Author(s): J. Burger; A. Gross; D. Mark; G. Roth; F. von Stetten; R. Zengerle
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Optical fiber waveguide sensor for the colorimetric detection of ammonia
Author(s): Katrin Schmitt; Jonas Rist; Carolin Peter; Jürgen Wöllenstein
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A liquid properties sensor utilizing pressure waves
Author(s): Hannes Antlinger; Roman Beigelbeck; Stefan Clara; Samir Cerimovic; Franz Keplinger; Bernhard Jakoby
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Non-contact volume determination of free flying nanoliter droplets using an adjustable capacitive measurement bridge
Author(s): Andreas Ernst; Bernhard Vondenbusch; Roland Zengerle; Peter Koltay
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Microelectro discharge machining: an innovative method for the fabrication of 3D microdevices
Author(s): Claudia Lesche; Thomas Krah; Stephanus Büttgenbach
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Optimization of an impedance sensor for droplet-based microfluidic systems
Author(s): Brian P. Cahill
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Wafer bonding for MEMS and CMOS integration
Author(s): V. Dragoi; E. Pabo; J. Burggraf; G. Mittendorfer
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Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticle mass
Author(s): H. S. Wasisto; S. Merzsch; A. Stranz; A. Waag; E. Uhde; I. Kirsch; T. Salthammer; E. Peiner
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Experimental setup for the coating of chlorosilane based self assembling monolayers to reduce stiction in MEMS devices
Author(s): H. Steiner; M. Sachse; J. Schalko; W. Hortschitz; F. Kohl; A. Jachimowicz
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Impedance spectroscopy on a digital microfluidic platform
Author(s): Thomas Lederer; Stefan Clara; Bernhard Jakoby; Wolfgang Hilber
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A comb-drive scanning-head array for fast scanning-probe microscope measurements
Author(s): S. Gao; H. Wolff; K. Herrmann; U. Brand; K. Hiller; S. Hahn; A. Sorger; J. Mehner
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A MEMS-based thermal infrared emitter for an integrated NDIR spectrometer
Author(s): C. Calaza; M. Salleras; N. Sabaté; J. Santander; C. Cané; L. Fonseca
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Flexible and large area pressure sensors for human-neuroprostheses and human-neurorobotic interface assessment
Author(s): J. Herrán; I. Fernández; E. Ochoteco; G. Cabañero; H. Grande; J. L. Pons
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A study on tunable resonators for rheological measurements
Author(s): Martin Heinisch; Erwin K. Reichel; Bernhard Jakoby
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Binary zero-power sensors: an alternative solution for power-free energy-autonomous sensor systems
Author(s): Thomas Frank; Gerald Gerlach; Arndt Steinke
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Fabrication technologies for the electrode structure of a dielectric elastomer bending tube actuator
Author(s): F. Wehrheim; H. F. Schlaak
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Evaluation of sensor arrays for engine oils using artificial oil alteration
Author(s): Sedat Sen; Christoph Schneidhofer; Nicole Dörr; Michael J. Vellekoop
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Viscosity and density measurements of glycerol-water mixtures utilizing a novel resonant MEMS sensor
Author(s): Samir Cerimovic; Roman Beigelbeck; Hannes Antlinger; Johannes Schalko; Bernhard Jakoby; Franz Keplinger
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Fabrication and characterization of artificial hair cell sensor based on MWCNT-PDMS composite
Author(s): Chi Yeon Kim; Hyun Sup Lee; Yo Han Cho; Cheeyoung Joh; Pyung Choi; Seong Jin Park
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Comparison among performance of strain sensors based on different semiconductor thin films
Author(s): Mariana A. Fraga; Humber Furlan; Rodrigo S. Pessoa
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Polyimide/PDMS flexible thermoelectric generator for ambient assisted living applications
Author(s): L. Francioso; C. De Pascali; I. Farella; C. Martucci; P. Cretì; P. Siciliano
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Nanostructured silicon for thermoelectric
Author(s): A. Stranz; J. Kähler; A. Waag; E. Peiner
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Variable isotropy Deep RIE process for through wafer via holes manufacturing
Author(s): Dan Vasilache; Sabrina Colpo; Flavio Giacomozzi; Sabina Ronchin; Abdul Qader Ahsan Qureshi; Benno Margesin
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Development of a new technological MEMS process for AC voltage standards
Author(s): F. Blard; A. Bounouh; D. Bélières; S. Charlot; D. Bourrier; H. Camon
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Hysteresis correction of tactile sensor response with a generalized Prandtl-Ishlinskii model
Author(s): José A. Sánchez-Durán; Óscar Oballe-Peinado; Julián Castellanos-Ramos; Fernando Vidal-Verdú
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