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Proceedings of SPIE Volume 7930

MOEMS and Miniaturized Systems X
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Volume Details

Volume Number: 7930
Date Published: 10 February 2011
Softcover: 32 papers (312) pages
ISBN: 9780819484673

Table of Contents
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Front Matter: Volume 7930
Author(s): Proceedings of SPIE
MEMS-based laser scanning microscope for endoscopic use
Author(s): U. Schelinski; J. Knobbe; H.-G. Dallmann; H. Grüger; M. Förster; M. Scholles; M. Schwarzenberg; R. Rieske
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An improved focus control mirror using SU-8 wafer bonding process
Author(s): Mohammad J. Moghimi; B. Jeffery Lutzenberger; Kyle Oliver; Steven Gates; Xiaohu Xue; Brant Kaylor; David L. Dickensheets
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SU-8 focus control mirrors released by XeF2 dry etch
Author(s): Sarah J. Lukes; David L. Dickensheets
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Electrowetting-based liquid lenses for endoscopy
Author(s): S. Kuiper
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Liquid crystal lens auto-focus extended to optical image stabilization for wafer level camera
Author(s): Nicolas Fraval; Frédéric Berier
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Tunable liquid lens with reduced chromatic and spherical aberration
Author(s): Hongbin Yu; Guangya Zhou; Fook Siong Chau; Huimin Leung
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A multi-aperture approach to wafer-level camera lenses
Author(s): Andreas Brückner; Robert Leitel; Peter Dannberg; Frank Wippermann; Andreas Bräuer
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Ultra-compact imaging system based on multi-aperture architecture
Author(s): Julia Meyer; Andreas Brückner; Robert Leitel; Peter Dannberg; Andreas Bräuer; Andreas Tünnermann
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Design of an ultra-thin objective lens based on superposition compound eye
Author(s): Anel Garza-Rivera; Francisco Javier Renero-Carrillo
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Microbolometers for thermography and night vision markets
Author(s): E. Mounier
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MEMS-based handheld projection systems and a survey of applications
Author(s): Margaret K. Brown; George Valliath; Taha Masood; Maarten Niesten; Dean DeJong
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MEMS scanned laser head-up display
Author(s): Mark O. Freeman
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Vertical electrostatically 90° turning flaps for reflective MEMS display
Author(s): Fabio Jutzi; Wilfried Noell; Nico F. de Rooij
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Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation
Author(s): Thilo Sandner; Thomas Grasshoff; Harald Schenk; Andreas Kenda
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Characterization of MEMS FTIR spectrometer
Author(s): Diaa Khalil; Yasser Sabry; Haitham Omran; Mostafa Medhat; Amr Hafez; Bassam Saadany
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Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors
Author(s): Marco Meinig; Steffen Kurth; Karla Hiller; Norbert Neumann; Martin Ebermann; Elvira Gittler; Thomas Gessner
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Fabrication and testing of MEMS-based optical filter combined with a HgCdTe detector
Author(s): Dmitry A. Kozak; Bautista Fernandez; Michael L. Morley; Silviu Velicu; Joel Kubby
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Ultra-low-power multiplexed electronic driver for high resolution deformable mirror systems
Author(s): Mark N. Horenstein; Robert Sumner; Preston Miller; Thomas Bifano; Jason Stewart; Steven Cornelissen
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MEMS-based programmable reflective slit mask for multi-object spectroscopy
Author(s): Michael Canonica; Frederic Zamkotsian; Patrick Lanzoni; Wilfried Noell; Nico de Rooij
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Shaping light with MOEMS
Author(s): W. Noell; S. Weber; J. Masson; J. Extermann; L. Bonacina; A. Bich; R. Bitterli; H. P. Herzig; D. Kiselev; T. Scharf; R. Voelkel; K. J. Weible; J.-P. Wolf; N. F. de Rooij
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Large diameter dual-axis MEMS-based mirror for laser beam steering
Author(s): S. Ilias; F. Picard; K. Le Foulgoc; J. Osouf; C. Larouche; J-S. Caron; P. Topart; S. Garcia Blanco; D. Vincent; J. F. Lepage; B. Gilbert
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MEMS scanning laser projection based on high-Q vacuum packaged 2D-resonators
Author(s): U. Hofmann; C. Eisermann; H.-J. Quenzer; J. Janes; C. Schroeder; O. Schwarzelbach; B. Jensen; L. Ratzmann; T. Giese; F. Senger; J. Hagge; M. Weiss; B. Wagner; W. Benecke
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Optical position feedback and phase control of resonant 1D and 2D MOEMS-scanners
Author(s): A. Tortschanoff; A. Frank; M. Wildenhain; H. S. Tetikol; T. Sandner; H. Schenk; A. Kenda
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Integration of near-field probes and photonic crystal nanocavities for precise and low-loss resonance control
Author(s): Xiongyeu Chew; Guangya Zhou; Fook Siong Chau
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MEMSEye for optical 3D position and orientation measurement
Author(s): V. Milanović; N. Siu; A. Kasturi; M. Radojičić; Y. Su
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Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors
Author(s): Jan Grahmann; Thomas Graßhoff; Holger Conrad; Thilo Sandner; Harald Schenk
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Microfabricated mirrors for space applications
Author(s): Dara Bayat; Caglar Ataman; Benedikt Guldimann; Sébastien Lani; Wilfried Noell; Nico de Rooij
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Design and fabrication of a pre-aligned free-space optical interconnection device
Author(s): Zhengyu Miao; Guocheng Shao; Wanjun Wang
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Development of on-CMOS chip micro-photonic and MOEMS systems
Author(s): Lukas W. Snyman; Timothy Okhai; Tarik Bourouina; Wilfried Noell
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In situ surface topography measurement of MOEMS structures under laser exposure
Author(s): Alexander Mai; Mathias Krellmann; Steffen Sinning; Steffen Wolschke; Ulrike Dauderstädt; Harald Schenk; Dieter Schmeißer; Michael Wagner
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Focal plane array spectrometer: miniaturization effort for space optical instruments
Author(s): Benedikt Guldimann; Stefan Kraft
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Lateral spread of MEMS WDM technologies
Author(s): Hiroshi Toshiyoshi
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