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Proceedings of SPIE Volume 7521

International Conference on Micro- and Nano-Electronics 2009
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Volume Details

Volume Number: 7521
Date Published: 15 February 2010
Softcover: 52 papers (490) pages
ISBN: 9780819479112

Table of Contents
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Front Matter for volume 7521
Author(s): Proceedings of SPIE
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Optimization of near-surficial annealing for decreasing of depth of p-n-junction in semiconductor heterostructure
Author(s): E. L. Pankratov
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Excitation mechanism of the B+ emission line at 345.1 nm in low-temperature plasmas
Author(s): V. P. Kudrya
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Plasma parameters and active particles kinetics in HBr dc glow discharges
Author(s): A. Smirnov; A. Efremov; V. Svettsov; A. Islyaykin
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Femtosecond and nanosecond laser assistant formation of Si nanoclusters in silicon-rich nitride films
Author(s): Vladimir A.. Volodin; Taisiya T. Korchagina; Gennadiy N. Kamaev; Aleksandr Kh. Antonenko; Jurgen Koch; Boris N. Chichkov
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Electromigration theory and its applications to integrated circuit metallization
Author(s): Tariel M. Makhviladze; Mikhail E. Sarychev
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Advanced atomic-scale simulation of silicon nitride CVD from dichlorosilane and ammonia
Author(s): Tariel M. Makhviladze; Airat Kh. Minushev
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Projection photolithography modeling using the finite-difference time-domain approach
Author(s): Tariel M. Makhviladze; Mikhail E. Sarychev
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Thermodynamic theory of interfacial adhesion between materials containing point defects
Author(s): Robert V. Goldstein; Tariel M. Makhviladze; Mikhail E Sarychev
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Modeling of the interfacial separation work in relation to impurity concentration in adjoining materials
Author(s): Ilia M Alekseev; Tariel M. Makhviladze; Airat Kh. Minushev; Mikhail E. Sarychev
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A nanoelectronic device simulation software system NANODEV: new opportunities
Author(s): I. I. Abramov; A. L. Baranoff; I. A. Goncharenko; N. V. Kolomejtseva; Y. L. Bely; I. Y. Shcherbakova
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The thickness-dependence of the polariton effect in the single quantum well
Author(s): Yuriy V, Moskalev; Sergey B. Moskovskii
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Radiation-hardening-by-design with circuit-level modeling of total ionizing dose effects in modern CMOS technologies
Author(s): M. S. Gorbunov; G. I. Zebrev; P. N. Osipenko
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Low-resistance Ge/Au/Ni/Ti/Au-based ohmic contact to n-GaAs
Author(s): V. Kagadei; E. Erofeev
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Formation of Ge/Cu ohmic contacts to n-GaAs with atomic hydrogen pre-annealing step
Author(s): E. Erofeev; V. Kagadei
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Calculation of electrophysical parameters of thin undoped GaAs-in-Al2O3 quantum nanowires and single-wall armchair carbon nanotubes
Author(s): Dmitry Pozdnyakov; Andrei Borzdov; Vladimir Borzdov; Vladimir Labunov
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Defect-related luminescence from nanostructured Si layers in the 1.5-1.6 μm wavelength region
Author(s): A. A. Shklyaev; A. B. Latyshev; M. Ichikawa
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Methods of cache memory optimization for multimedia applications
Author(s): Alexander Kravtsov
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Investigations of nanostructured porous PbTe films with x-ray diffractometry and reflectometry
Author(s): Sergey P. Zimin; Vladimir M. Vasin; Egor S. Gorlachev; Anatoly P. Petrakov; Sergey V. Shilov
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Intrinsic compact MOSFET model with correct account of positive differential conductance after saturation
Author(s): Valentin O. Turin; Alexander V. Sedov; Gennady I. Zebrev; Benjamin Iñiguez; Michael S. Shur
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Electron optical spin polarization in broken-gap heterostructures
Author(s): A. Zakharova; K. A. Chao; Igor Semenikhin
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Improvement of radiation resistance of multijunction solar cells by application of Bragg reflectors
Author(s): V. Emelyanov; N. Kaluzhniy; S. Mintairov; M. Shvarts; V. Lantratov
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Simulation results for three neutralization channel designs of a fast neutral beam source
Author(s): A. V. Degtyarev; V. P. Kudrya; Yu. P. Maishev
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Optimization of parameters of process deep plasmachemical etching of silicon for elements MEMS
Author(s): A. I. Vinogradov; N. M. Zarjankin; J. A. Mihajlov; E. P. Prokopev; S. P. Timoshenkov
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Application of Langmuir probe technique in depositing plasmas for monitoring of etch process robustness and for end-point detection
Author(s): Andrey V. Miakonkikh; Konstantin V. Rudenko
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Penetration of quantum-mechanical current density under semi-infinite rectangular potential barrier as the consequence of the interference of the electron waves in semiconductor 2D nanostructures
Author(s): V. A. Petrov; A. V. Nikitin
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Laser generation in broken-gap heterostructures
Author(s): I. Semenikhin; K. A. Chao; A. Zakharova
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Preparation of electrodes for molecular transistor by focused ion beam
Author(s): I. V. Sapkov; V. V. Kolesov; E. S. Soldatov
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Calculation of the characteristics of electron transport through molecular clusters
Author(s): Y. S. Gerasimov; V. V. Shorokhov; E. S. Soldatov; O. V. Snigirev
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Noise suppression in three-level atomic system driven by quantized field
Author(s): A. Gelman; V. Mironov
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Si wires growth by using of magnetron sputtering method
Author(s): S. A. Evlashin; V. A. Krivchenko; P. V. Pastchenko; A. T. Rakhimov; N. V. Suetin; M. A. Timofeyev
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Experimental scheme for observation of anomalous Kossel effect in semiconductor crystals
Author(s): Pavel G Medvedev; Mikhail A. Chuev; Mikhail V. Kovalchuk; Elhan M. Pashaev; Ilia A. Subbotin; Sergey N. Yakunin
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High-temperature magnetization and Mössbauer spectra of nanoparticles in a weak magnetic field
Author(s): Mikhail A Chuev
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CoSi[sub]2[/sub]/TiO[sub]2[/sub]/SiO[sub]2[/sub]/Si gate structure formation
Author(s): A. E. Rogozhin; I. A. Khorin; V. V. Naumov; A. A. Orlikovsky; V. V. Ovcharov; V. I. Rudakov; A. G. Vasiliev
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Manufacturing of diffraction-quality optical elements for high-resolution optical systems
Author(s): N. I. Chkhalo; A. E. Pestov; N. N. Salashchenko; M. N. Toropov
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Hf-based barrier layers for Cu-metallization
Author(s): I. A. Khorin; Yu. I. Denisenko; V. N. Gusev; A. A. Orlikovsky; A. E. Rogozhin; V. I. Rudakov; A. G. Vasiliev
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Theoretical analysis of the new microwave detector based on a Josephson heterostructure
Author(s): I. A. Devyatov; M. Yu. Kupriyanov
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Principal problems of quality improvement for high-speed planar transmission lines issued from studies of high-Q microstrip resonators
Author(s): A. P. Chernyaev; V. A. Dravin; A. Yu. Golovanov; A. L. Karuzskii; A. E. Krapivka; A. N. Lykov; V. N. Murzin; A. V. Perestoronin; A. M. Tskhovrebov; N. A. Volchkov
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Theoretical analysis of electronic thermal properties of the interfaces between multiband superconductors and a normal metal
Author(s): I. A Devyatov; M. Yu. Romashka; A. V. Semenov; P. A. Krutitskii; M. Yu. Kupriyanov
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A new antiferromagnetic nanocomposite GdNiO3
Author(s): A. I. Rykova; V. M. Dmitriev; E. N. Khatsko; A. V. Terekhov; A. S. Cherny; D. S. Kondrashev; T. Mydlarz; A. Zaleski; A. D. Shevshenko; V. M. Uvarov
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Superconductivity of polymers with charge injection doping
Author(s): Alexander N. Ionov; Rolf R. Rentzsch
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Immersion lithography and double patterning in advanced microelectronics
Author(s): T. Vandeweyer; J. Bekaert; M. Ercken; R. Gronheid; A. Miller; V. Truffert; S. Verhaegen; J. Versluijs; V. Wiaux; P. Wong; G. Vandenberghe; M. Maenhoudt
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The metal hard-mask approach for contact patterning
Author(s): J.-F. de Marneffe; F. Lazzarino; D. Goossens; Th. Conard; I. Hoflijk; D. Shamiryan; H. Struyf; W. Boullart
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Formation of molecular transistor electrodes by electromigration
Author(s): A. S. Stepanov; E. S. Soldatov; O. V. Snigirev
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Determination of electronic properties of molecular objects on the basis of nanodevices' transport characteristics
Author(s): V. A. Malinin; V. V. Shorokhov; E. S. Soldatov
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SEM probe defocusing method of measurement of linear sizes of nanorelief elements
Author(s): M. N Filippov; Yu. A. Novikov; A. V. Rakov; P. A. Todua
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Influence of annealing on the structural and optical properties of thin multilayer EUV filters containing Zr, Mo, and silicides of these metals
Author(s): N. I. Chkhalo; S. A. Gusev; M. N. Drozdov; E. B. Kluenkov; A. Ya. Lopatin; V. I. Luchin; A. E. Pestov; N. N. Salashchenko; L. A. Shmaenok; N. N. Tsybin
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Formation of carbonic nanostructures using PECVD and glow-discharge plasma at direct current
Author(s): D. G. Gromov; S. A. Gavrilov; S. V. Dubkov
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Mossbauer study of nanomagnetics
Author(s): V. I. Bachurin; I. N. Zakharova; M. A. Shipilin; A. M. Shipilin
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Impact of plasma exposure on organic low-k materials
Author(s): E. Smirnov; A. K. Ferchichi; C. Huffman; M. R. Baklanov
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Formation of the atomically smooth surface of gold film and binding of gold nano-particles on it by self-assembly method
Author(s): A. N. Kuturov; E. S. Soldatov; L. A. Polyakova; S. P. Gubin
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Carbon nanostructures' catalytic growth from carbonaceous substrates in comparison with PECCVD method
Author(s): Ye. Yu. Alekseeva; E. A. Il'ichev; V. N. Inkin; D. M. Migunov; G. N. Petruhin; E. A. Poltoratskii; G. S. Rychkov; D. V. Shkodin
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Numerical methods for calculation of optical properties of layered structures
Author(s): Sergey A. Dyakov; Vladimir A. Tolmachev; Ekaterina V. Astrova; Sergey G. Tikhodeev; Viktor Yu. Timoshenko; Tatiana S. Perova
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