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Proceedings of SPIE Volume 7405

Instrumentation, Metrology, and Standards for Nanomanufacturing III
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Volume Details

Volume Number: 7405
Date Published: 20 August 2009
Softcover: 27 papers (276) pages
ISBN: 9780819476951

Table of Contents
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Front Matter: Volume 7405
Author(s): Proceedings of SPIE
A decade of commitment from the NIST Manufacturing Engineering Laboratory to nanomanufacturing and nanometrology
Author(s): Kevin W. Lyons; Michael T. Postek
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Nanoscale dimensional metrology in Russia
Author(s): V. P. Gavrilenko; Yu. A. Novikov; A. V. Rakov; P. A. Todua
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Measurement traceability and quality assurance in a nanomanufacturing environment
Author(s): N. George Orji; Ronald G. Dixson; Aaron Cordes; Benjamin D. Bunday; John A. Allgair
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Measurement of thickness of native silicon dioxide with a scanning electron microscope
Author(s): V. P. Gavrilenko; Yu. A. Novikov; A. V. Rakov; P. A. Todua
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Silica nanoparticle dispersion size measurement using dielectrophoresis on a microfabricated electrode array
Author(s): Yi Qiao; Jack Lai; Dave Hofeldt
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Methods for TEM analysis of NIST's single-walled carbon nanotube Standard Reference Material
Author(s): Elisabeth Mansfield; Roy Geiss; Jeffrey A. Fagan
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Towards accurate and reproducible metrology of manufactured ZnO nanoparticles
Author(s): Victoria A. Coleman; Arnaud La Fontaine; Toni Endmann; Åsa K. Jämting; Jan Herrmann; John Miles
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Improved diffraction-based overlay metrology by use of two dimensional array target
Author(s): Yi-Sha Ku; Hsiu-Lan Pang; Weite Hsu; Deh-Ming Shyu
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High-performance multi-channel fiber-based absolute distance measuring interferometer system
Author(s): Leslie L. Deck
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Interferometric imaging ellipsometry: fundamental study
Author(s): Seichi Sato; Shigeru Ando
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Independent measurements of force and position in atomic force microscopy
Author(s): Allison B. Churnside; Gavin M. King; Thomas T. Perkins
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Spectral effects of AFM tip geometry
Author(s): Cornelius Hahlweg; Hendrik Rothe
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Non-linear distortions caused by AFM-tip geometry and limitations of reconstruction on discrete data
Author(s): Cornelius Hahlweg; Hendrik Rothe
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Imaging comparison of reflection and transmission grating systems
Author(s): Lingyu Wan; Weiping Zhang; Qingyi Yang; Xiaoming Shen
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Improvements to spectral spot-scanning technique for accurate and efficient data acquisition
Author(s): Jonathan D. Bray; Kevin M. Gaab; Bruce M. Lambert; Terrence S. Lomheim
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Experimental methods for measurement of the modulation transfer function (MTF) for time-delay-and-integrate (TDI) charge coupled device (CCD) image sensors
Author(s): Bruce M. Lambert; Jeffrey M. Harbold
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An improved phase quadrature correction method by fitting the pesudo quadrature phase difference
Author(s): Chao-Wen Liang; Yung-Sheng Tsai
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Nonstandard refraction of light from one-dimensional dielectric quasi-periodic surfaces
Author(s): Zu-Han Gu; Anting Wang
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Front-side illuminated CMOS spectral pixel response and modulation transfer function characterization: impact of pixel layout details and pixel depletion volume
Author(s): Jonathan D. Bray; Lee W. Schumann; Terrence S. Lomheim
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193 nm angle-resolved scatterfield microscope for semiconductor metrology
Author(s): Yeung Joon Sohn; Richard Quintanilha; Bryan M. Barnes; Richard M. Silver
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Surface-sensitive strain analysis of Si/SiGe line structures by Raman and UV-Raman spectroscopy
Author(s): Marek Roelke; Michael Hecker; Peter Hermann; David Lehninger; Yvonne Ritz; Ehrenfried Zschech; Victor Vartanian
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Photo-reflectance characterization of USJ activation in millisecond annealing
Author(s): Will Chism; Michael Current; Victor Vartanian
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Role of supercontinuum in the fragmentation of colloidal gold nanoparticles in solution
Author(s): Fabian A. Videla; Gustavo A. Torchia; Daniel S. Schinca; Lucía B. Scaffardi; Pablo Moreno; Cruz Méndez; Luis Roso; L. Giovanetti; Jose Ramallo Lopez
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Measuring a laser focal spot on a large intensity range: effect of optical component laser damages on the focal spot
Author(s): Stéphane Bouillet; Sandrine Chico; Laurent Le Deroff; Gérard Razé; Roger Courchinoux
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Effect of the measurement wavelength on a multi-dielectric mirror wavefront
Author(s): Sophiane Tournois; Stéphane Bouillet; Jérôme Daurios; Eric Lavastre
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Detecting molecular stress in metals
Author(s): Eduardo Hernandez-Gomez; J. G. Suarez-Romero; Juan B. Hurtado-Ramos
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Sub-nanometer resolution for the inspection of reflective surfaces using white light
Author(s): Werner Jüptner; Thorsten Bothe
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