### PROCEEDINGS VOLUME 7390

Modeling Aspects in Optical Metrology IIFormat | Member Price | Non-Member Price |
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Volume Details

Volume Number: 7390

Date Published: 17 June 2009

Softcover: 48 papers (470) pages

ISBN: 9780819476739

Date Published: 17 June 2009

Softcover: 48 papers (470) pages

ISBN: 9780819476739

Table of Contents

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Front Matter: Volume 7390

Author(s): Proceedings of SPIE

Author(s): Proceedings of SPIE

Lithography simulation: modeling techniques and selected applications

Author(s): Andreas Erdmann; Tim Fühner; Feng Shao; Peter Evanschitzky

Author(s): Andreas Erdmann; Tim Fühner; Feng Shao; Peter Evanschitzky

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Metallic nonlinear magneto-optical nonreciprocal isolator

Author(s): Hala J. El-Khozondar; Rifa J. El-Khozondar; Mohammed M. Shabat; Alexander W. Koch

Author(s): Hala J. El-Khozondar; Rifa J. El-Khozondar; Mohammed M. Shabat; Alexander W. Koch

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Traceability of the F25 vision system for calibration of grated structures with submicron accuracy

Author(s): Ancuta I. Mares; Rob H. Bergmans; Gerard J. W. L Kotte; Rutger R. Tromp

Author(s): Ancuta I. Mares; Rob H. Bergmans; Gerard J. W. L Kotte; Rutger R. Tromp

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Inverse optical design: building and testing an artificial eye

Author(s): Alexander V. Goncharov; Brice Lerat; Maciej Nowakowski; Christopher Dainty

Author(s): Alexander V. Goncharov; Brice Lerat; Maciej Nowakowski; Christopher Dainty

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Inspection of misalignment factors in lens assembly

Author(s): Xiang Li; Liping Zhao; Zhong Ping Fang

Author(s): Xiang Li; Liping Zhao; Zhong Ping Fang

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Measurement errors from internal shear strain within fiber-Bragg-grating sensors

Author(s): Mathias S. Müller; Thorbjörn C. Buck; Hala J. El-Khozondar; Alexander W. Koch

Author(s): Mathias S. Müller; Thorbjörn C. Buck; Hala J. El-Khozondar; Alexander W. Koch

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Variable waveplate-based polarimeter for polarimetric metrology

Author(s): Alba Peinado; Angel Lizana; Josep Vidal; Claudio Iemmi; Andrés Márquez; Ignacio Moreno; Juan Campos

Author(s): Alba Peinado; Angel Lizana; Josep Vidal; Claudio Iemmi; Andrés Márquez; Ignacio Moreno; Juan Campos

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Spatial elliptical polariscope for polarization distribution measurements

Author(s): Wladyslaw A. Wozniak; Slawomir Drobczynski; Piotr Kurzynowski

Author(s): Wladyslaw A. Wozniak; Slawomir Drobczynski; Piotr Kurzynowski

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Temperature sensitivity of TE double-negative metamaterial optical sensor

Author(s): Hala J. El-Khozondar; Mathias Müller; Rifa J. El-Khozondar; Mohammed M. Shabat; Alexander W. Koch

Author(s): Hala J. El-Khozondar; Mathias Müller; Rifa J. El-Khozondar; Mohammed M. Shabat; Alexander W. Koch

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Adaptive Bessel-autocorrelation of ultrashort pulses with phase-only spatial light modulators

Author(s): Silke Huferath-von Luepke; Martin Bock; Ruediger Grunwald

Author(s): Silke Huferath-von Luepke; Martin Bock; Ruediger Grunwald

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Assistance system for optical sensors

Author(s): R. Schmitt; F. Koerfer; J. Seewig; W. Osten; A. Weckenmann

Author(s): R. Schmitt; F. Koerfer; J. Seewig; W. Osten; A. Weckenmann

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Shape measurement of diffuse and transparent objects by two wavelength contouring using phase retrieval

Author(s): Arun Anand; Vani K. Chhaniwal; Giancarlo Pedrini; Wolfgang Osten

Author(s): Arun Anand; Vani K. Chhaniwal; Giancarlo Pedrini; Wolfgang Osten

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Sensing performance of a Shack Hartmann wavefront sensor versus the properties of the light beam

Author(s): L. P. Zhao; W. J. Guo; X. Li; Z. W. Zhong

Author(s): L. P. Zhao; W. J. Guo; X. Li; Z. W. Zhong

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Full-field absolute phase measurements in the heterodyne interferometer with an electro-optic modulator

Author(s): Y. L. Chen; H. C. Hsieh; W. T. Wu; D. C. Su

Author(s): Y. L. Chen; H. C. Hsieh; W. T. Wu; D. C. Su

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Method for measuring the refractive index distribution of a GRIN lens with heterodyne interferometry

Author(s): H. C. Hsieh; Y. L. Chen; W. T. Wu; D. C. Su

Author(s): H. C. Hsieh; Y. L. Chen; W. T. Wu; D. C. Su

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3D finite-element simulations of enhanced light transmission through arrays of holes in metal films

Author(s): Sven Burger; Lin Zschiedrich; Jan Pomplun; Frank Schmidt; Benjamin Kettner; Daniel Lockau

Author(s): Sven Burger; Lin Zschiedrich; Jan Pomplun; Frank Schmidt; Benjamin Kettner; Daniel Lockau

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Reduced basis method for fast and robust simulation of electromagnetic scattering problems

Author(s): Jan Pomplun; Frank Schmidt

Author(s): Jan Pomplun; Frank Schmidt

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Comparison of electromagnetic field solvers for the 3D analysis of plasmonic nanoantennas

Author(s): Johannes Hoffmann; Christian Hafner; Patrick Leidenberger; Jan Hesselbarth; Sven Burger

Author(s): Johannes Hoffmann; Christian Hafner; Patrick Leidenberger; Jan Hesselbarth; Sven Burger

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Method of matrix Riccati equation for nanoshape control of diffraction gratings

Author(s): Mikhail Yu. Barabanenkov; Vyacheslav V. Kazmiruk; Sergei Yu. Shapoval

Author(s): Mikhail Yu. Barabanenkov; Vyacheslav V. Kazmiruk; Sergei Yu. Shapoval

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Power spectral density specification and analysis of large optical surfaces

Author(s): Erkin Sidick

Author(s): Erkin Sidick

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Measuring and modelling the appearance of coated steel surfaces

Author(s): V. Goossens; E. Stijns; S. Van Gils; R. Finsy; H. Terryn

Author(s): V. Goossens; E. Stijns; S. Van Gils; R. Finsy; H. Terryn

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Analysis of the positioning error on lateral shearing surface reconstruction with a Fizeau interferometer

Author(s): Josep Vidal; Josep Nicolas; Juan Campos

Author(s): Josep Vidal; Josep Nicolas; Juan Campos

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A model based approach to reference-free straightness measurement at the Nanometer Comparator

Author(s): C. Weichert; M. Stavridis; M. Walzel; C. Elster; A. Wiegmann; M. Schulz; R. Köning; J. Flügge; R. Tutsch

Author(s): C. Weichert; M. Stavridis; M. Walzel; C. Elster; A. Wiegmann; M. Schulz; R. Köning; J. Flügge; R. Tutsch

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Angle-resolved optical metrology using multi-technique nested uncertainties

Author(s): R. M. Silver; B. M. Barnes; H. Zhou; N. F. Zhang; R. Dixson

Author(s): R. M. Silver; B. M. Barnes; H. Zhou; N. F. Zhang; R. Dixson

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On numerical reconstructions of lithographic masks in DUV scatterometry

Author(s): M.-A. Henn; R. Model; M. Bär; M. Wurm; B. Bodermann; A. Rathsfeld; H. Gross

Author(s): M.-A. Henn; R. Model; M. Bär; M. Wurm; B. Bodermann; A. Rathsfeld; H. Gross

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Numerical investigations of prospects, challenges, and limitations of non-imaging optical metrology of structured surfaces

Author(s): B. Bodermann; M. Wurm

Author(s): B. Bodermann; M. Wurm

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Critical dimension measurements using a 193 nm scatterfield microscope

Author(s): R. Quintanilha; Y. Sohn; B. M. Barnes; L. Howard; R. Silver

Author(s): R. Quintanilha; Y. Sohn; B. M. Barnes; L. Howard; R. Silver

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Evaluation of measurement uncertainties in EUV scatterometry

Author(s): H. Gross; F. Scholze; A. Rathsfeld; M. Bär

Author(s): H. Gross; F. Scholze; A. Rathsfeld; M. Bär

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Nanoshaped objects of equal phase volume: scattered far field comparison

Author(s): Alexander Normatov; Boris Spektor

Author(s): Alexander Normatov; Boris Spektor

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Specular and diffuse scattering from random asperities of any profile using the rigorous method for x-rays and neutrons

Author(s): Leonid I. Goray

Author(s): Leonid I. Goray

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Estimation of 3D reconstruction errors in a stereo-vision system

Author(s): A. Belhaoua; S. Kohler; E. Hirsch

Author(s): A. Belhaoua; S. Kohler; E. Hirsch

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Towards deconvolution in holography

Author(s): Nan Wang; Claas Falldorf; Christoph von Kopylow

Author(s): Nan Wang; Claas Falldorf; Christoph von Kopylow

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Roughness measurement methodology according to DIN 4768 using optical coherence tomography (OCT)

Author(s): Marcello M. Amaral; Marcus P. Raele; José P. Caly; Ricardo E. Samad; Nilson D. Vieira; Anderson Z. Freitas

Author(s): Marcello M. Amaral; Marcus P. Raele; José P. Caly; Ricardo E. Samad; Nilson D. Vieira; Anderson Z. Freitas

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Modeling of adaptive compensation of aberrations of optical system using deformable mirror

Author(s): A. Miks; J. Novak; P. Novak

Author(s): A. Miks; J. Novak; P. Novak

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Optimized square Fresnel zone plates for microoptics applications

Author(s): José María Rico-García; Francisco Javier Salgado-Remacha; Luis Miguel Sanchez-Brea; Javier Alda

Author(s): José María Rico-García; Francisco Javier Salgado-Remacha; Luis Miguel Sanchez-Brea; Javier Alda

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Optical testing of a parabolic trough solar collector by a null screen with stitching

Author(s): V, I. Moreno-Oliva; M. Campos-Garcia; F. Granados-Agustin; M. J. Arjona-Pérez; R. Díaz-Uribe; M. Avendaño-Alejo

Author(s): V, I. Moreno-Oliva; M. Campos-Garcia; F. Granados-Agustin; M. J. Arjona-Pérez; R. Díaz-Uribe; M. Avendaño-Alejo

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Talbot effect with aberrated beams

Author(s): Francisco José Torcal-Milla; Luis Miguel Sanchez-Brea; Eusebio Bernabeu

Author(s): Francisco José Torcal-Milla; Luis Miguel Sanchez-Brea; Eusebio Bernabeu

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Modelling of laser range measurement of underwater objects in maritime environment

Author(s): Roman Ostrowski; Artur Cywinski

Author(s): Roman Ostrowski; Artur Cywinski

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Numerical and experimental study of the characteristic functions of polygon scanners

Author(s): Virgil-Florin Duma; Mirela Nicolov

Author(s): Virgil-Florin Duma; Mirela Nicolov

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Determination of phase and modulation transfer function (PTF and MTF) of a printer by the convolution of transmission function measurement

Author(s): Khosro Madanipour; Ameneh Bostani; Parviz Parvin

Author(s): Khosro Madanipour; Ameneh Bostani; Parviz Parvin

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Optical characteristics of a one-dimensional photonic crystal with an additional regular layer

Author(s): V. A. Tolmachev; A. V. Baldycheva; E. Yu. Krutkova; T. S. Perova; K. Berwick

Author(s): V. A. Tolmachev; A. V. Baldycheva; E. Yu. Krutkova; T. S. Perova; K. Berwick

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Modeling of the polarization mode dispersion in the single mode optical fiber links

Author(s): L Cherbi; M. Mehenni

Author(s): L Cherbi; M. Mehenni

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Far field of binary phase gratings with errors in the height of the strips

Author(s): José María Rico-García; Luis Miguel Sanchez-Brea

Author(s): José María Rico-García; Luis Miguel Sanchez-Brea

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Fabrication of tunable grating with silver nanoparticles

Author(s): Tung-Kai Liu; Wen-Chi Hung; Ming-Shan Tsai; Yong-Chang Tsao; I-Min Jiang

Author(s): Tung-Kai Liu; Wen-Chi Hung; Ming-Shan Tsai; Yong-Chang Tsao; I-Min Jiang

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Interferometric Ronchi test by using substructured gratings

Author(s): Manuel Campos-Garcia; Fermin-Solomon Granados-Agustin

Author(s): Manuel Campos-Garcia; Fermin-Solomon Granados-Agustin

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Depth-of-field extension and 3D reconstruction in digital holographic microscopy

Author(s): Isabelle Bergoënd; Tristan Colomb; Nicolas Pavillon; Yves Emery; Christian Depeursinge

Author(s): Isabelle Bergoënd; Tristan Colomb; Nicolas Pavillon; Yves Emery; Christian Depeursinge

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Diffraction microtomography with sample rotation: primary result on the influence of a missing apple core in the recorded frequency space

Author(s): Stanislas Vertu; Ichiro Yamada; Jean-Jacques Delaunay; Olivier Haeberlé; Jens Flügge

Author(s): Stanislas Vertu; Ichiro Yamada; Jean-Jacques Delaunay; Olivier Haeberlé; Jens Flügge

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Prospects and limits of the Rayleigh Fourier approach for diffraction modelling in scatterometry and lithography

Author(s): Joerg Bischoff

Author(s): Joerg Bischoff

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Multiplexing and demultiplexing of digital holograms recorded in microscopic configuration

Author(s): Melania Paturzo; Pasquale Memmolo; Antonia Tulino; Andrea Finizio; Lisa Miccio; Pietro Ferraro

Author(s): Melania Paturzo; Pasquale Memmolo; Antonia Tulino; Andrea Finizio; Lisa Miccio; Pietro Ferraro

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