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Modeling Aspects in Optical Metrology II
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Volume Details

Volume Number: 7390
Date Published: 17 June 2009
Softcover: 48 papers (470) pages
ISBN: 9780819476739

Table of Contents
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Front Matter: Volume 7390
Author(s): Proceedings of SPIE
Lithography simulation: modeling techniques and selected applications
Author(s): Andreas Erdmann; Tim Fühner; Feng Shao; Peter Evanschitzky
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Metallic nonlinear magneto-optical nonreciprocal isolator
Author(s): Hala J. El-Khozondar; Rifa J. El-Khozondar; Mohammed M. Shabat; Alexander W. Koch
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Traceability of the F25 vision system for calibration of grated structures with submicron accuracy
Author(s): Ancuta I. Mares; Rob H. Bergmans; Gerard J. W. L Kotte; Rutger R. Tromp
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Inverse optical design: building and testing an artificial eye
Author(s): Alexander V. Goncharov; Brice Lerat; Maciej Nowakowski; Christopher Dainty
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Inspection of misalignment factors in lens assembly
Author(s): Xiang Li; Liping Zhao; Zhong Ping Fang
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Measurement errors from internal shear strain within fiber-Bragg-grating sensors
Author(s): Mathias S. Müller; Thorbjörn C. Buck; Hala J. El-Khozondar; Alexander W. Koch
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Variable waveplate-based polarimeter for polarimetric metrology
Author(s): Alba Peinado; Angel Lizana; Josep Vidal; Claudio Iemmi; Andrés Márquez; Ignacio Moreno; Juan Campos
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Spatial elliptical polariscope for polarization distribution measurements
Author(s): Wladyslaw A. Wozniak; Slawomir Drobczynski; Piotr Kurzynowski
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Temperature sensitivity of TE double-negative metamaterial optical sensor
Author(s): Hala J. El-Khozondar; Mathias Müller; Rifa J. El-Khozondar; Mohammed M. Shabat; Alexander W. Koch
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Adaptive Bessel-autocorrelation of ultrashort pulses with phase-only spatial light modulators
Author(s): Silke Huferath-von Luepke; Martin Bock; Ruediger Grunwald
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Assistance system for optical sensors
Author(s): R. Schmitt; F. Koerfer; J. Seewig; W. Osten; A. Weckenmann
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Shape measurement of diffuse and transparent objects by two wavelength contouring using phase retrieval
Author(s): Arun Anand; Vani K. Chhaniwal; Giancarlo Pedrini; Wolfgang Osten
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Sensing performance of a Shack Hartmann wavefront sensor versus the properties of the light beam
Author(s): L. P. Zhao; W. J. Guo; X. Li; Z. W. Zhong
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Full-field absolute phase measurements in the heterodyne interferometer with an electro-optic modulator
Author(s): Y. L. Chen; H. C. Hsieh; W. T. Wu; D. C. Su
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Method for measuring the refractive index distribution of a GRIN lens with heterodyne interferometry
Author(s): H. C. Hsieh; Y. L. Chen; W. T. Wu; D. C. Su
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3D finite-element simulations of enhanced light transmission through arrays of holes in metal films
Author(s): Sven Burger; Lin Zschiedrich; Jan Pomplun; Frank Schmidt; Benjamin Kettner; Daniel Lockau
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Reduced basis method for fast and robust simulation of electromagnetic scattering problems
Author(s): Jan Pomplun; Frank Schmidt
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Comparison of electromagnetic field solvers for the 3D analysis of plasmonic nanoantennas
Author(s): Johannes Hoffmann; Christian Hafner; Patrick Leidenberger; Jan Hesselbarth; Sven Burger
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Method of matrix Riccati equation for nanoshape control of diffraction gratings
Author(s): Mikhail Yu. Barabanenkov; Vyacheslav V. Kazmiruk; Sergei Yu. Shapoval
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Power spectral density specification and analysis of large optical surfaces
Author(s): Erkin Sidick
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Measuring and modelling the appearance of coated steel surfaces
Author(s): V. Goossens; E. Stijns; S. Van Gils; R. Finsy; H. Terryn
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Analysis of the positioning error on lateral shearing surface reconstruction with a Fizeau interferometer
Author(s): Josep Vidal; Josep Nicolas; Juan Campos
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A model based approach to reference-free straightness measurement at the Nanometer Comparator
Author(s): C. Weichert; M. Stavridis; M. Walzel; C. Elster; A. Wiegmann; M. Schulz; R. Köning; J. Flügge; R. Tutsch
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Angle-resolved optical metrology using multi-technique nested uncertainties
Author(s): R. M. Silver; B. M. Barnes; H. Zhou; N. F. Zhang; R. Dixson
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On numerical reconstructions of lithographic masks in DUV scatterometry
Author(s): M.-A. Henn; R. Model; M. Bär; M. Wurm; B. Bodermann; A. Rathsfeld; H. Gross
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Numerical investigations of prospects, challenges, and limitations of non-imaging optical metrology of structured surfaces
Author(s): B. Bodermann; M. Wurm
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Critical dimension measurements using a 193 nm scatterfield microscope
Author(s): R. Quintanilha; Y. Sohn; B. M. Barnes; L. Howard; R. Silver
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Evaluation of measurement uncertainties in EUV scatterometry
Author(s): H. Gross; F. Scholze; A. Rathsfeld; M. Bär
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Nanoshaped objects of equal phase volume: scattered far field comparison
Author(s): Alexander Normatov; Boris Spektor
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Specular and diffuse scattering from random asperities of any profile using the rigorous method for x-rays and neutrons
Author(s): Leonid I. Goray
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Estimation of 3D reconstruction errors in a stereo-vision system
Author(s): A. Belhaoua; S. Kohler; E. Hirsch
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Towards deconvolution in holography
Author(s): Nan Wang; Claas Falldorf; Christoph von Kopylow
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Roughness measurement methodology according to DIN 4768 using optical coherence tomography (OCT)
Author(s): Marcello M. Amaral; Marcus P. Raele; José P. Caly; Ricardo E. Samad; Nilson D. Vieira; Anderson Z. Freitas
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Modeling of adaptive compensation of aberrations of optical system using deformable mirror
Author(s): A. Miks; J. Novak; P. Novak
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Optimized square Fresnel zone plates for microoptics applications
Author(s): José María Rico-García; Francisco Javier Salgado-Remacha; Luis Miguel Sanchez-Brea; Javier Alda
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Optical testing of a parabolic trough solar collector by a null screen with stitching
Author(s): V, I. Moreno-Oliva; M. Campos-Garcia; F. Granados-Agustin; M. J. Arjona-Pérez; R. Díaz-Uribe; M. Avendaño-Alejo
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Talbot effect with aberrated beams
Author(s): Francisco José Torcal-Milla; Luis Miguel Sanchez-Brea; Eusebio Bernabeu
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Modelling of laser range measurement of underwater objects in maritime environment
Author(s): Roman Ostrowski; Artur Cywinski
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Numerical and experimental study of the characteristic functions of polygon scanners
Author(s): Virgil-Florin Duma; Mirela Nicolov
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Determination of phase and modulation transfer function (PTF and MTF) of a printer by the convolution of transmission function measurement
Author(s): Khosro Madanipour; Ameneh Bostani; Parviz Parvin
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Optical characteristics of a one-dimensional photonic crystal with an additional regular layer
Author(s): V. A. Tolmachev; A. V. Baldycheva; E. Yu. Krutkova; T. S. Perova; K. Berwick
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Modeling of the polarization mode dispersion in the single mode optical fiber links
Author(s): L Cherbi; M. Mehenni
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Far field of binary phase gratings with errors in the height of the strips
Author(s): José María Rico-García; Luis Miguel Sanchez-Brea
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Fabrication of tunable grating with silver nanoparticles
Author(s): Tung-Kai Liu; Wen-Chi Hung; Ming-Shan Tsai; Yong-Chang Tsao; I-Min Jiang
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Interferometric Ronchi test by using substructured gratings
Author(s): Manuel Campos-Garcia; Fermin-Solomon Granados-Agustin
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Depth-of-field extension and 3D reconstruction in digital holographic microscopy
Author(s): Isabelle Bergoënd; Tristan Colomb; Nicolas Pavillon; Yves Emery; Christian Depeursinge
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Diffraction microtomography with sample rotation: primary result on the influence of a missing apple core in the recorded frequency space
Author(s): Stanislas Vertu; Ichiro Yamada; Jean-Jacques Delaunay; Olivier Haeberlé; Jens Flügge
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Prospects and limits of the Rayleigh Fourier approach for diffraction modelling in scatterometry and lithography
Author(s): Joerg Bischoff
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Multiplexing and demultiplexing of digital holograms recorded in microscopic configuration
Author(s): Melania Paturzo; Pasquale Memmolo; Antonia Tulino; Andrea Finizio; Lisa Miccio; Pietro Ferraro
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