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Proceedings of SPIE Volume 7201

Laser Applications in Microelectronic and Optoelectronic Manufacturing VII
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Volume Details

Volume Number: 7201
Date Published: 12 February 2009
Softcover: 31 papers (286) pages
ISBN: 9780819474476

Table of Contents
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Front Matter: Volume 7201
Author(s): Proceedings of SPIE
Nanostructure formation processes in femtosecond laser ablation of thin film surfaces
Author(s): Godai Miyaji; Kenzo Miyazaki
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Development of a powerful tool for nanostructuring and multiphoton imaging with nanojoule femtosecond laser pulses
Author(s): D. Bruneel; M. Schwarz; E. Audouard; K. König; R. Le Harzic
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Synthesis of nano-grained MnO2 thin films by laser ablation
Author(s): Malek Tabbal; Maya Abi-Akl; Samih Isber; Elisar Majdalani; Theodore Christidis
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Health risks of nanoparticulate emissions during femtosecond and picosecond pulsed laser machining
Author(s): S. Barcikowski; A. Hahn; J. Walter
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Advanced micromachining combining nanosecond lasers with water jet-guided laser technology
Author(s): A. Pauchard; K. Lee; N. Vago; M. Pavius; S. Obi
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Deep trenches fabricated by laser-induced backside wet etching for guiding light
Author(s): Tadatake Sato; Amit Pratap Singh; Ryozo Kurosaki; Aiko Narazaki; Yoshizo Kawaguchi; Hiroyuki Niino
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Industrial applications of a fiber-based high-average-power picosecond laser
Author(s): Colin Moorhouse
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Programmable picosecond pulse packets for micromachining with multiwatt UV fiber lasers
Author(s): Theodore Alekel; David H. Foster; Jordan Crist
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A study of material removal rates for shallow drilling with an ultrashort pulse laser
Author(s): B. R. Campbell; L. A. Forster; J. A. Moore; T. M. Lehecka; J. G. Thomas; V. V. Semak
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Dynamics of femtosecond laser-induced breakdowns in water
Author(s): A. Takita; Y. Hayasaki
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On the use of femtosecond lasers to fabricate small optical instruments made from fused silica monoliths
Author(s): Philippe Bado; Ali A. Said; Mark Dugan; Tom Haddock; Yves Bellouard
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Chemical mapping of three-dimensional microstructures fabricated by two-photon polymerization using CARS microscopy
Author(s): Tommaso Baldacchini; Max Zimmerley; Eric O. Potma; Ruben Zadoyan
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Interference lithography processes with high-power laser pulses
Author(s): A. Rodriguez; M. Ellman; I. Ayerdi; N. Perez; S. M. Olaizola; J. Zhang; Z. Ji; T. Berthou; C. S. Peng; Y. K. Verevkin; Z. Wang
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Optical characterization of the mask writing process in bimetallic grayscale photomasks
Author(s): James M. Dykes; Glenn H. Chapman
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Dynamics of debris from laser-irradiated Sn droplet for EUV lithography light source
Author(s): K. Okazaki; D. Nakamura; T. Akiyama; K. Toya; A. Takahashi; T. Okada
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Enhancement of cleaning efficiency by geometrical confinement of plasma expansion in the laser-shock cleaning process for nanoscale contaminant removal
Author(s): Deoksuk Jang; Joon Ho Oh; Jong-Myoung Lee; Dongsik Kim
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News applications in authentication and traceability using ultrafast laser marking
Author(s): B. Dusser; Z. Sagan; A. Foucou; M. Jourlin; E. Audouard
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Selective cell culture on UV-transparent polymer by F2 laser modification
Author(s): Y. Hanada; K. Sugioka; H. Kawano; A. Miyawaki; K. Midorikawa
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Atomic layer epitaxy of TiO2/ZnO multilayers for water-window attosecond optics
Author(s): Yuji Tanaka; Yusuke Masuda; Hiroshi Kumagai; Tsutomu Shinagawa; Ataru Kobayasi
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Stochastic models of exciton dynamics in a 4-um long single air-suspended single-walled carbon nanotube
Author(s): Y.-F. Xiao; T. Q. Nhan; M. W. B. Wilson; James M. Fraser
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Effects of pulse duration on the ns-laser pulse induced removal of thin film materials used in photovoltaics
Author(s): Jim Bovatsek; Ashwini Tamhankar; Raj Patel; Nadezhda M. Bulgakova; Jörn Bonse
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Application of a KrCl-excilamp (222 nm) for identification of natural and synthetic diamonds
Author(s): Eduard A. Sosnin; Eugenii I. Lipatov; Sergei M. Avdeev; Victor F. Tarasenko; Yuri N. Novoselov
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Large-aperture excilamps for microelectronic applications
Author(s): Dmitry V. Schitz; Mikhail I. Lomaev; Victor S. Skakun; Victor F. Tarasenko
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Fabrication of nanostructured ITO thin films on nanoimprinted glasses by pulsed laser deposition
Author(s): Yasuyuki Akita; Yuki Sugimoto; Masahiro Mita; Hideo Oi; Osami Sakata; Mamoru Yoshimoto
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Ablation of aluminum nitride films by nanosecond and femtosecond laser pulses
Author(s): Vitaly Gruzdev; Robert Tzou; Ildar Salakhutdinov; Yuriy Danylyuk; Erik McCullen; Gregory Auner
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Waveguide fabrication with femtosecond laser pulse shaped by computer-generated hologram
Author(s): Jun'ichi Suzuki; Masahiro Yamaji; Shuhei Tanaka
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Parallel femtosecond laser processing with a computer-generated hologram
Author(s): S. Hasegawa; Y. Hayasaki
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Generation of nanostructured surfaces by interfering and no-interfering ultra-short pulse laser processing
Author(s): Y. Nakata; K. Tsuchida; N. Miyanaga
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Inflection point of the spectral shifts of the random lasing in dye solution showing transformation to weak localization
Author(s): Shuzhen Fan; Xingyu Zhang; Qingpu Wang; Chen Zhang; Zhengping Wang; Ruijun Lan
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Relation between diffusion constant and particle density in TiO2 suspended solutions
Author(s): Chen Zhang; Xingyu Zhang; Qingpu Wang; Shuzhen Fan; Zhengping Wang; Ruijun Lan; Xiaoyi Bao
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Laser polishing of vidicon's glass substrates
Author(s): S. P. Sidorenko; M. E. Fedosovsky; V. P. Veiko; A. O. Golubok; V. V. Levichev; V. A. Chuiko; E. B. Yakovlev; E. A. Shakhno
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