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Proceedings of SPIE Volume 6993

MEMS, MOEMS, and Micromachining III
Editor(s): Hakan Urey
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Volume Details

Volume Number: 6993
Date Published: 28 May 2008
Softcover: 17 papers (170) pages
ISBN: 9780819471918

Table of Contents
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Front Matter: Volume 6993
Author(s): Proceedings of SPIE
NEMS/MEMS cantilever-based biosensors: addressing the open issues
Author(s): Y. Nemirovsky; A. Shemesh; S. Stolyarova
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Magnetic actuated FR4 scanners for compact spectrometers
Author(s): Çağlar Ataman; Hakan Urey
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Micromachined multicavity grey body emitter for the use in MIR spectroscopic systems
Author(s): J. Hildenbrand; A. Kürzinger; E. Moretton; A. Greiner; A. Lambrecht; J. Wöllenstein; J. G. Korvink
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Optimisation and characterisation of parabolic membrane mirrors
Author(s): T. Hellmuth; K. Khrennikov; W. Kronast; R. Huster; U. Mescheder
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New technologies for tunable micro-optics
Author(s): Ch. Friese; A. Werber; F. Krogmann; R. Shaik; W. Mönch; H. Zappe
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Fabrication of polymer micro-optical components for integration in silicon MOEMS
Author(s): D. Cristea; P. Obreja; M. Kusko; M. Purica; A. Dinescu; A. Herrero; Dan Apostol; E. Manea
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Electrostatically-actuated grating light modulator fabricated using SU-8 photoresist
Author(s): Tahito Aida; Yo Habu; Tomoyuki Kato
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Light concentrating micromirror arrays for photovoltaics
Author(s): J. Ackermann; O. Setyawati; V. Viereck; N. Dharmarasu; H. Hillmer
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Optofluidics and optoelectronic tweezers
Author(s): Arash Jamshidi; Aaron T. Ohta; Justin K. Valley; Hsan-Yin Hsu; Steven L. Neale; Ming C. Wu
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Micromachining of InP/InGaAs multiple membrane/airgap structures for tunable optical devices
Author(s): T. Kusserow; S. Ferwana; T. Nakamura; T. Hayakawa; N. Dharmarasu; B. Vengatesan; H. Hillmer
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Vacuum isostatic micro molding of microfluidic structures into polytetrafluoroethylene (PTFE) materials
Author(s): Todd E. Lizotte
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Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates
Author(s): Jan-Uwe Schmidt; Martin Friedrichs; Thor Bakke; Benjamin Voelker; Dirk Rudloff; Hubert Lakner
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Selective wet etching of AlInN layers for nitride-based MEMS and photonic device structures
Author(s): Ian M. Watson; Chang Xiong; Erdan Gu; Martin D. Dawson; Francesco Rizzi; Katarzyna Bejtka; Paul R. Edwards; Robert W. Martin
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Review of production of microfluidic devices: material, manufacturing and metrology
Author(s): Shiguang Li; Zhiguang Xu; Aaron Mazzeo; Daniel J. Burns; Gang Fu; Matthew Dirckx; Vijay Shilpiekandula; Xing Chen; Nimai C. Nayak; Eehern Wong; Soon Fatt Yoon; Zhong Ping Fang; Kamal Youcef-Toumi; David Hardt; Shu Beng Tor; Chee Yoon Yue; Jung-Hoon Chun
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A microelectromechanical force actuator for nano-tensile testing system
Author(s): S. Gao; K. Herrmann
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Feasibility study for a MEMS modulator suitable for optical system network signalling
Author(s): P. Mitchell; R. G. Jackson; J. K. Luo
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Determination of in-plane displacement of MEMS by means of an AFM sensor
Author(s): S. Gao; Z. Li; K. Herrmann
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