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Proceedings of SPIE Volume 6836

MEMS/MOEMS Technologies and Applications III
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Volume Details

Volume Number: 6836
Date Published: 5 November 2007
Softcover: 42 papers (386) pages
ISBN: 9780819470119

Table of Contents
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Front Matter: Volume 6836
Author(s): Proceedings of SPIE
Large distance liquid pumping by AC electro-osmosis for the delivery of biological cells and reagents in microfluidic devices
Author(s): Daniel Lee; Guolin Xu; Yongsheng Tng; Kyaw Zin Htet; Chun Yang; Jackie Y. Ying
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Study on the image processing algorithms for optical readout based uncooled MEMS IR imager systems
Author(s): Li-quan Dong; Xiao-hua Liu; Yue-jin Zhao; Ming Liu
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New developments on polymer-based MEMS phase shifters
Author(s): Jianqun Wang; Thermpon Ativanichayaphong; Ying Cai; Wen-Ding Huang; Mu Chiao; J.-C. Chiao
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MEMS-based uncooled infrared bolometer arrays: a review
Author(s): Frank Niklaus; Christian Vieider; Henrik Jakobsen
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A novel optical MEMS pressure sensor with a mesa diaphragm
Author(s): Yixian Ge; Ming Wang; Hua Rong; Xuxing Chen
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Calibration of computer vision positioning system for MEMS wire bonder
Author(s): Junlan Li; Yizhong Wang; Xingyu Zhao; Fanzhi Kong; Dawei Zhang
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Development of a 1x2 piezoelectric optical fiber switch
Author(s): M. Leung; J. Yue; K. A. Razak; E. Haemmerle; M. Hodgson; W. Gao
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Research of the digital coding mask based on digital micromirror device
Author(s): Bai Lu; YiQing Gao; NingNing Luo; LanLan Wei
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Research and fabrication of harmonic oscillator with high quality in Si-based MOEMS acceleration seismic geophone
Author(s): Zhengrong Tong; Zhiyong Wang; De En; Caihe Chen; Xuejiao Li; Xiaofang Xie
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Fabrication of wall array by electrochemical etching of n-type silicon
Author(s): Zhigang Zhao; Caili Bai; Jinchuan Guo; Hanben Niu
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A silicon micromachined infrared emitter based on SOI wafer
Author(s): Haisheng San; Xuyuan Chen; Meiying Cheng; Fangqiang Li
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Contrastive study on the mechanical performance of MEMS microsprings fabricated by LIGA and UV-LIGA technology
Author(s): Hua Li; Gengchen Shi
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A micro-electromechanical system design and manufacture considering fabrication error
Author(s): Hua Li; Gengchen Shi
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Piezoelectric capacitive power generator from vibration energy
Author(s): Yangjian Zhang; Lin Li; Haisheng San; Xuyuan Chen
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Charge accumulation in composite dielectric layers in capacitive RF MEMS switches
Author(s): Linxian Zhan; Haisheng San; Gang Li; Peng Xu; Xuyuan Chen
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MEMS for vibration energy harvesting
Author(s): Lin Li; Yangjian Zhang; Haisheng San; Yinbiao Guo; Xuyuan Chen
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Influence of ion implantation on dielectric charging in capacitive RF MEMS switches
Author(s): Gang Li; Linxian Zhan; Haisheng San; Peng Xu; Xuyuan Chen
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Study for steel ball surface quality detecting based on vision technique
Author(s): Deli Liu; Xianli Liu; Huanrui Hao; Yizhi Liu; Xinmiao Jiang; Peng Wang
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Actuation voltage wave-form dependence of charge accumulation in RF MEMS switches
Author(s): Haisheng San; Linxian Zhan; Peng Xu; Gang Li; Xuyuan Chen
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Rapid and simple half-quantitative measurement alpha-fetoprotein by poly(dimethylsiloxane) microfluidic chip immunochromatographic assay
Author(s): Chao Tong; Qinghui Jin; Jianlong Zhao
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Design of maskless lithography system based on DMD
Author(s): Jianping Ma; Xinrong Du; Yantao Liu
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Proposal and investigation for a planar MOEMS 1x8 wavelength-selective switch
Author(s): Xiaoqi Li; Jingqiu Liang; Degui Sun; Yanchao Zhong; Wei Li; Zhongzhu Liang
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A fast initial alignment of MIMU in the two-dimension trajectory correction fuze for spinning projectile on stationary base
Author(s): Qin Wang; Shi-yi Li; Hong-bing Xiao; Hu-quan Li
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Study about the thermal adaptability of mirrors based on MOEMS for satellite-borne laser beam control used in multiple targets tracing
Author(s): Xiaofeng Li; Hua Zhang; Yujun Yuan
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An active interconnecting mechanism for free-space optic applications
Author(s): Ping Zhang; Kevin Le; Lun-Chen Hsu; Praveen Pandojirao-Sunkojirao; Smitha Malalur-Nagaraja-Rao; J.-C. Chiao
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Manufacturing and testing of the line-array fiber optic image slicer based on silicon V-grooves
Author(s): Jingqiu Liang; Peng Guo; Zhongzhu Liang; Yanqing Zhu; Fengjie Hou; Jinsong Yao
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Investigation of charge accumulation in the dielectric for robust RF MEMS switches
Author(s): Xuyuan Chen; Ulrik Hanke; Haisheng San; Gang Li; Linxian Zhan
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An electromagnetically actuated fiber optic switch using magnetized ferromagnetic materials
Author(s): Praveen Pandojirao-S; Naresh Dhaubanjar; Pratibha C. Phuyal; Mu Chiao; J.-C. Chiao
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Characterizations of microcantilever chemical sensors based on SOI material
Author(s): Fangrong Hu; Dajia Wang; Chuankai Qiu; Aina Wang; Hongtao Gao; Jun Yao
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A novel microscanning device
Author(s): Yun-yi Zhou; Chang-cheng Yang
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Study on bandwidth mutual benefit between the azimuth and pitch in an optoelectronic tracking system
Author(s): Li-min Zhang; Juan Chen; Jin Guo
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Multi-path optical fiber sensor for atmospheric pressure
Author(s): Shaorong Xiao; Jianhua Chang; Fulai Ben
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An optical scanner based on cantilever-type electrostatic zipping actuators
Author(s): Smitha M. N. Rao; Praveen Pandojirao-Sunkojirao; Naresh Dhaubanjar; Mu Chiao; J.-C. Chiao
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High-speed and large-scale electromagnetically actuated MEMS scanning-mirror
Author(s): Canjun Mu; Feiling Zhang; Yaming Wu
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Experimental study on roughness and flatness of micromirror fabricated by different anisotropic silicon etching processes
Author(s): Jing Xu; Zhanxi Huang; Xiaoxin Xu; Yaming Wu
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Optical fiber accelerometer based on MEMS torsional micromirror
Author(s): Fanlin Zeng; Shaolong Zhong; Jing Xu; Yaming Wu
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A review of different types of photonic MEMS tunable lasers
Author(s): A. Q. Liu; H. Cai; X. M. Zhang; J. Tamil
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Optical MEMS devices based on micromachined torsion structure
Author(s): Yaming Wu; Jing Xu; Sihua Li; Zhujun Wan; Canjun Mu
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A laser-induced fluorescence optical fiber detection system for micro-fluidic chip
Author(s): Hong Wang; Yu Tang
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Integrated microsensors and systems
Author(s): Shanhong Xia; Jizhou Sun; Lan Qu; Chao Bian
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Amperometric immunosensor using electric field to improve the interaction between antibody and antigen
Author(s): Jizhou Sun; Chao Bian; Shanhong Xia
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Micro amperometric immunosensor by antibody immobilizing with electropolymerized protein A
Author(s): Chao Bian; Jizhou Sun; Lan Qu; Shanhong Xia
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