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Proceedings of SPIE Volume 6724

3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Editor(s): Sen Han; Tingwen Xing; Yanqiu Li; Zheng Cui
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Softcover $105.00 * $105.00 *

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Volume Details

Volume Number: 6724
Date Published: 12 November 2007
Softcover: 66 papers (440) pages
ISBN: 9780819468819

Table of Contents
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Front Matter: Volume 6724
Author(s): Proceedings of SPIE
Immersion and 32nm lithography: now and future
Author(s): Masaomi Kameyama; Martin McCallum
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Design, modeling, and fabrication techniques of bulk PZT actuators for MEMS deformable mirrors
Author(s): Xiaohui Xu; Jiaru Chu
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Calculation of refractive-index distribution of hexagonal GRIN lenses
Author(s): Zigang Zhou; Ren Zhang; Kai Chen
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Novel system for optical axis on-line calibration
Author(s): Wen Qiao; Huimin Yan; Wei Lu
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Microfabrication of all-polymer capacitors for electronics
Author(s): Shuping Wang; Bradley W. Borden; Richard Li
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New gas sensor head without gas chamber by hollow core PBF
Author(s): Xuewu Zhou; Jianping Hou; Jianlin Zhao
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Development of an experimental EUVL system
Author(s): Chun-shui Jin; Li-Ping Wang; Li-Chao Zhang; Qiang Lin; Shu Pei; Jian-Lin Cao
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Design and process of low loss bend waveguide of integrated optical gyroscope
Author(s): Xiang Ji; Hengwei Zhang; Guoguang Yang; Xiaomin Liu; Gang Lei
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Rapid nanofabrication with high density pattern with UVN30 chemically amplified resist
Author(s): Xudi Wang; Yifang Chen; Zheng Cui; Shaojun Fu
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Key techniques of laser direct writing patterns on spherical substrate
Author(s): Xiao-guo Feng; Jing-li Zhao
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Analysis and optimization for effective diffraction area of grating movable light modulator
Author(s): Lei Han; Shanglian Huang; Zhihai Zhang; Jie Zhang; Xu Yan
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Experimental characterization of optical properties of photon sieve
Author(s): Guanxiao Cheng; Tingwen Xing; Yong Yang; Jianling Ma
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Advances of focused ion beam in micromachining technology
Author(s): S. J. Zhang; F. Z. Fang; X. T. Hu
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Nanoscale cutting mechanism by molecular dynamics simulation
Author(s): Z. G. Zhang; F. Z. Fang; C. K. Sun
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Option of resolution enhancement technology in advanced lithography
Author(s): Yanqui Li; Yuan Zhou
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On-line inspection system of surface quality for medical film
Author(s): Wei Lu; Hui-min Yan; Wen Qiao
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Back-illuminated GaN/AIGaN visible-blind photodiodes
Author(s): Liang Chen; Jun Chen; Yun Bai; Liwei Guo; Yan Zhang; Xiangyang Li; Haimei Gong
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Measuring the parallelism of the splitter grating used in a soft X-ray laser interferometer
Author(s): Xin Tan; Ying Liu; Zheng-kun Liu; Shao-jun Fu
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Reactive ion beam etching of large-aperture multilayer diffraction gratings by radio frequency ion beam source
Author(s): Ying Liu; Dequan Xu; Xiangdong Xu; Yilin Hong; Shaojun Fu
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Parameter optimization of optically excited microresonator by a semiconductor laser subject to optical feedback
Author(s): Shaoqing Wang; Xiangzhao Wang; Yingming Liu; Bingjie Huang; Hua Wang
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Solution to improving certain kinds of focusing and leveling measurement system
Author(s): Guan Jun
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Novel method for measuring axial aberrations of projection optics for lithographic tools
Author(s): Mingying Ma; Fan Wang; Xiangzhao Wang
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Novel algorithm for modeling aberration-induced overlay in lithographic process
Author(s): Fan Wang; Mingying Ma; Lifeng Duan; Xiangzhao Wang
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Foundational study on micro machining with instantaneous tiny grinding wheel based on electro-magneto-rheological effect
Author(s): Hong Tian; Qiusheng Yan; Jiabin Lu; Juan Yu
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High efficiency arrangement in comb-drive actuators
Author(s): Xing Chen; Dong Weon Lee; Jun Ding
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Echo signal processing of laser rapid scanning based on wavelet transform
Author(s): Jinling Chen; Zhengfeng Xu; Delin Xie; Hongbin Chen; Jian Luo
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Microscopic interferometry for dimensional characterization of MEMS devices
Author(s): Tong Guo; Jin-Ping Chen; Xing Fu; Xiao-tang Hu
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Simulation for effect of process parameters on surface profile in thick film photolithography
Author(s): Xionggui Tang; Heping Li; Jingkun Liao; Yongzhi Liu; Yongkang Guo
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Automatic spin coater for concave spherical substrate
Author(s): Fengchao Liang; Jingsong Gao; Xiaoguo Feng; Jingli Zhao; Zhijun Xu; Jun Hu; Fenglin Xu; Huiqing Wang; Xiaohan Liu
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Research on laser fuze technology based on MEMS/MOEMS
Author(s): Huimin Chen; Ping Li; Yingwen Zhang; Kun Li; Jianqiang Sun
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Optics design of refractive-diffractive elimination chromatic aberration system
Author(s): Junxin Shen; Dongmei Liu; Yanjun Sun
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Topography of micromirror for metal MEMS optical switch based on fractal theory
Author(s): Yi Zhang; Yuan Luo; Xiaodong Xu
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Influence of polarization on the optimization of dual BARC structures for hyper-numerical aperture ArF immersion lithography
Author(s): Yuan Zhou; Yanqui Li; Qiang Zhang
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Resolution enhancement technology for ArF dry lithography at 65 nm node
Author(s): Songbo Gao; Yanqui Li
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Novel fabrication technology of polydimethylsiloxane microfluidic chip
Author(s): Bo Su; Yanqiu Li; Hongguang Sun
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Impact of molybdenum/silicon multilayer structure on extreme ultraviolet mask fabrication
Author(s): Guorong Zhao; Yanqiu Li
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Experimental investigation on thermoelectric generator of micro hybrid power source
Author(s): Yonghong Shang; Yanqiu Li; Hongyun Yu; Hongguang Sun; Bo Su
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Human motion capturing system with MEMS accelerometers (notice of removal)
Author(s): Baoping Xiao; Chang Xu; Lijun Xu; Shuigeng Ouyang
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Neuron network training system for Robot responding intelligently to input light stimuli (notice of removal)
Author(s): Baoping Xiao; Chang Xu; Lijun Xu; Qinhua Luo
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Location of the micro manipulator based on color recognition of micro images
Author(s): Zhenying Xu; Kai Xiao; Yun Wang; Zhihao Tang
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Photoelectron dynamic property of dye sensitized AgCl cubic microcrystals
Author(s): Weidong Lai; Xiaowei Li; Rongxiang Zhang; Jixian Zhang; Guangsheng Fu
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Residual stresses around femtosecond laser ablated grooves in silicon wafer evaluated by nanoindentation
Author(s): Yongzhi Cao; Yanshen Wang; Shen Dong; Yanqiang Yang; Yingchun Liang; Tao Sun
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Development of a new optical acceleration sensor
Author(s): Shuhai Jia; Jia Yang; Weijun Kong; Yanfen Du
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Femtosecond laser pulses micromaching of GaAs, silicon, fused silica, PMMA
Author(s): Yi Huang; Shuangchen Ruan; Yongqin Yu; Chenlin Du
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Nanolithography in evanescent near field by using nano-filmed noble metal layers
Author(s): Yong Yang; Song Hu; Hanmin Yao; Guanxiao Cheng; Wei Yan
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Process analysis of silica ablation by F2 laser for MOEMS
Author(s): Weilai Li; Desheng Jiang; Yutang Dai
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Study on the electrical and optical characteristics of a silicon electro-optic waveguide modulator using MOS configuration
Author(s): Huilin Zhang; Xianzhong Jian; Bin Zhou
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Template technique: a promising approach for well-aligned quantum wires fabrication
Author(s): Irene Ling Li; Ye Wu; Jian Pang Zhai; Shuang Chen Ruan; Zi Kang Tang
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Substrate patterning for passive matrix organic light-emitting devices by photolithography processing
Author(s): Jun Wang; Jun-sheng Yu; Hui Lin; Shuang-ling Lou; Ya-dong Jiang
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Mechanism influence on fatigue characters of aerial engine blade by laser shock processing
Author(s): W. Cheng; L. Y. Hong; M. Zhuang
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Design of a new MEMS-based tunable grating with electrostatic comb drive
Author(s): Yiting Yu; Weizheng Yuan; Jinghui Xu
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Mach-Zehnder interferometer for auto-collimated beams in non-channel photonic crystals
Author(s): Xiaopeng Shen; Kui Han; Yifeng Shen; Xianqing Yang; Gang Tang; Haipeng Li; Ziyu Wang
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Optimizing the varied line-space grating with the curvature of grating substrate
Author(s): Zhengkun Liu; Bin Liu; Xiangdong Xu; Ying Liu; Yilin Hong; Shaojun Fu
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Study of magnetic nanostructures fabricated using laser interference lithography
Author(s): Zijun Zhang; Yuxian Guo; Youmei Chen; Yin Liu; Xiangdong Xu; Shaojun Fu; Jie Wang; Pengshou Xu
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Comprehensive review of micro/meso-scale machine tools
Author(s): Q. Y. Wang; F. Z. Fang; X. T. Hu
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Precise wavelength demodulator used for fiber sensitivity
Author(s): Shiya He; Tiecheng Guo; Shuyang Hu; Wei Liu; Kuanxin Yu
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Simulation and fabrication of monolithically integrated MSM/PHEMT 850 nm optical receiver front end
Author(s): Chao Fan; Tang-Sheng Chen; Shi-Long Jiao; Lin Liu; Zhen-Long Chen; Yu-Lin Wang; Yun-Feng Wu; Yu-Tang Ye
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Scatter analysis of diffractive surface manufactured by single point diamond turning
Author(s): Junyan Zhao; Qingfeng Cui; Peng Wang
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Fabrication of quantum dot array diffraction grating for soft x-ray spectroscopy
Author(s): Min Zhao; XiaoLi Zhu; Baoqin Chen; ChangQing Xie; Ming Liu; Leifeng Cao
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Analysis on the influencing factors of deformation in bimorph deformable mirror
Author(s): Yu Ning; Wenhan Jiang; Ning Ling; Changhui Rao
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Nonlinear PI-control temperature control algorithm for projection lens
Author(s): Xiaoping Li; Hongfei Nie; Bin Yu
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Simulation on signal processing of focusing and leveling measurement system
Author(s): Xiaoping Li; Feibiao Chen; Zhidan Li
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Particle size study of diazonaphthoquinone/novolak
Author(s): Ping Linda Zhang; Hai Liang Yu; Song Hu; Zhong Yuan Jin; Le Wang; Li Yu Liu; Lu Chuan Zhang; Yong Yang
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Study of critical modulation transfer function by UV-vis spectroscopy
Author(s): Ping Linda Zhang; Song Hu; Lu Chuan Zhang; Zhong Yuan Jin; Hai Liang Yu; Le Wang; Yong Yang
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Characteristic of capillary discharge soft x-ray laser in Ne-like Ar
Author(s): Y. L. Cheng; X. Q. Zhang; H. G. Gou; Q. S. Zhu; Y. P. Zhao; Y. Xie; Q. Wang
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Key technologies for LSPR-sensing microfluidic biochip
Author(s): Hao Wang; Xiangang Luo; Hanmin Yao; Chunlei Du; Ze Yu Zhao; Shaoli Zhu
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