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Proceedings of SPIE Volume 6672

Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III
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Volume Details

Volume Number: 6672
Date Published: 10 September 2007
Softcover: 27 papers (250) pages
ISBN: 9780819468208

Table of Contents
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Front Matter: Volume 6672
Author(s): Proceedings of SPIE
Interferometry for wafer dimensional metrology
Author(s): Klaus Freischlad; Shouhong Tang; Jim Grenfell
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Warpage of thin wafers using computer aided reflection moire method
Author(s): Chi Seng Ng; Kok Yau Chua; Meng Tong Ong; Yoke Chin Goh; Anand K. Asundi
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Auto-scanning white-light interferometer
Author(s): Jin-Liang Chen; Chi-Hong Tung; Ching-Fen Kao; Calvin C. Chang
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Use of light-emitting diode (LED) in interference microscopy
Author(s): Marc Jobin; Raphael Foschia
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Optical system for investigations of low-cost diffraction gratings
Author(s): Przemyslaw Czapski; Lukasz Platos; Michal Jozwik
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Calibration of a reversed-wavefront interferometer for polarization coherence metrology
Author(s): Dean P. Brown; Alexis K. Spilman; Thomas G. Brown; Miguel A. Alonso; Riccardo Borghi; Massimo Santarsiero
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High resolution interferometric metrology for patterned wafers
Author(s): Shouhong Tang; Klaus Freischlad; Petrie Yam
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Measuring height variation over entire wafer surface with high lateral resolution
Author(s): Shouhong Tang; Brian Clendenin
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3D phase micro-object studies by means of digital holographic tomography supported by algebraic reconstruction technique
Author(s): B. J. Bilski; A. Jozwicka; M. Kujawinska
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Limitations of Rayleigh Rice Perturbation Theory for describing surface scatter
Author(s): John C. Stover; James E. Harvey
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Unified scatter model for rough surfaces at large incident and scatter angles
Author(s): James E. Harvey; Andrey Krywonos; John C. Stover
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Inverse scattering simulation for a 1-D surface reconstruction
Author(s): Anting Wang; Zu-Han Gu
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BRDF and MBR of a retro-reflected tag for free-space optical communication
Author(s): Zu-Han Gu
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A structure that more than doubles the intensity of an enhanced backscattering peak
Author(s): T. A. Leskova; A. A. Maradudin; E. R. Méndez; Zu-Han Gu
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Experimental reconstruction for inverse scattering of one-dimensional surfaces
Author(s): Zu-Han Gu; Anting Wang
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Generation of partially coherent light in rough surface scattering and suppression of the speckle it produces
Author(s): T. A. Leskova; A. A. Maradudin; E. R. Méndez; Anting Wang; Zu-Han Gu
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Polarization of grating diffraction simulated by vector Kirchhoff model
Author(s): Soe-Mie Foeng Nee; Tsu-Wei Nee
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Progress toward traceable nanoscale optical critical dimension metrology for semiconductors
Author(s): Heather J. Patrick; Thomas A. Germer
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A novel parameter proposed for 2D and 3D topography measurements and comparisons
Author(s): John Song; Ted Vorburger
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Calibration of integrating sphere system designed for roughness correction in optical calibration of gauge blocks
Author(s): Chu-Shik Kang; Jae Wan Kim; Jong-Ahn Kim; Tae Bong Eom
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Measurement of ultra low film stress, local stress distribution and flatness by imaging nanotopography based on low coherence phase shifting interferometry in conjunction with wafer and film thickness metrology
Author(s): Alexander Pravdivtsev; Manuel Santos; Ann Koo
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Ellipsometric porosimetry: fast and non destructive method of porosity characterization of solid oxide fuel cell material based on YSZ thin film
Author(s): Alexis Bondaz; Laurent Kitzinger; Christophe Defranoux
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A hybrid phase unwrapping method for correction the error
Author(s): Yong-Tong Zou; Chi-Hong Tung; Calvin C. Chang
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Development of a precision dual level stage system for the dimensional metrology of large range surface topography
Author(s): Jong-Ahn Kim; Jae Wan Kim; Tae Bong Eom; Chu-Shik Kang
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3D phase object measurement using an off-axis Fresnel hologram
Author(s): Ching-Yang Lin; Gu-Liang Chen; Ming-Kuei Kuo; Chi-Ching Chang; Hong-Fai Yau
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Precision measurement of LED angular intensity distribution
Author(s): O. Muzychko
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Theoretical and experimental investigations of non-goniometric scatterometry
Author(s): Cornelius Hahlweg; Hendrik Rothe
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