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Proceedings of SPIE Volume 6464

MEMS/MOEMS Components and Their Applications IV
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Volume Details

Volume Number: 6464
Date Published: 8 February 2007
Softcover: 20 papers (202) pages
ISBN: 9780819465771

Table of Contents
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Front Matter: Volume 6464
Author(s): Proceedings of SPIE
Drosophila as an unconventional substrate for microfabrication
Author(s): Angela J. Shum; Babak A. Parviz
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Integrated biophotonic hybridization sensor based on chitosan-mediated assembly
Author(s): Vlad Badilita; Michael Powers; Stephan Koev; Hyunmin Yi; Gregory Payne; Reza Ghodssi
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Self assembled monolayer and protein adsorption studies on micromachined quartz crystal balances
Author(s): Ping Kao; Abhijat Goyal; Jay Mathews; David Allara; Srinivas Tadigadapa
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Nanomechanical cantilever arrays for low-power and low-voltage embedded nonvolatile memory applications
Author(s): Charles G. Smith; Rob van Kampen; Jens Popp; Damian Lacy; Don Pinchetti; Michael Renault; Vikram Joshi; Mike A. Beunder
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Nanoelectromechanical systems as single electron switches and field emitters
Author(s): Hyun S. Kim; Hua Qin; Robert H. Blick
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Coated Tips for Scanning Thermal Microscopy
Author(s): Nicolás Duarte; Peter Eklund; Srinivas Tadigadapa
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Electrical properties of back-gated <i>n</i>-layer graphene films
Author(s): P. Joshi; A. Gupta; P. C. Eklund; S. A. Tadigadapa
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Micromachined silicon grids for direct TEM and Raman characterization of CVD grown carbon nanotubes
Author(s): Yongho Choi; Ant Ural
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Mechanical properties of ZnO nanowires
Author(s): M. A. Haque; A. V. Desai
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MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films
Author(s): Jong H. Han; Jagannathan Rajagopalan; M. Taher A. Saif
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All-optical micromechanical chemical sensors
Author(s): Todd H. Stievater; William S. Rabinovich; Mike S. Ferraro; J. Brad Boos; Nicolas A. Papanicolaou; Jennifer L. Stepnowski; R. Andrew McGill
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Integrated nanomechanical motion detection by means of optical evanescent wave coupling
Author(s): I. De Vlaminck; J. Roels; D. Taillaert; D. Van Thourhout; L. Lagae; R. Baets; G. Borghs
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Development of amorphous SiC for MEMS-based microbridges
Author(s): James B. Summers; Maximilian Scardelletti; Rocco Parro; Christian A. Zorman
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Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique
Author(s): Wen Dai; Wanjun Wang
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On-chip integration of a microfluidic valve and pump for sample acquisition and movement
Author(s): S. S. Sridharamurthy; A. K. Agarwal; L. Dong; D. Cheng; H. Jiang
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IR detectors with adaptive responsivity and wavelength
Author(s): W.-B. Song; J. J. Talghader
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LVD micromirror for rapid reference scanning in optical coherence tomography
Author(s): Xiaoxing Feng; Ankur Jain; Sagnik Pal; Lei Xiao; Toshikazu Nishida; Huikai Xie
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Process development, design, and characterization of high-finesse micromachined optical Fabry-Perot microcavities
Author(s): Marcel W. Pruessner; Todd H. Stievater; William S. Rabinovich
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Silicon/porous silicon composite membrane for high-sensitivity pressure sensor
Author(s): L. Sujatha; Enakshi Bhattacharya
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Stereolithography as a meso-structure for input force reduction to a capacitive force MEMS sensor
Author(s): Henry K. Chu; James K. Mills; William L. Cleghorn
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