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PROCEEDINGS VOLUME 6463

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
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Volume Details

Volume Number: 6463
Date Published: 20 January 2007
Softcover: 24 papers (246) pages
ISBN: 9780819465764

Table of Contents
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Front Matter: Volume 6463
Author(s): Proceedings of SPIE
Receptor-free nanomechanical sensors
Author(s): Larry R. Senesac; Dechang Yi; Thomas Thundat
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New techniques for detecting and monitoring corrosion using nanostructures
Author(s): Christopher O. Muller; William G. England
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Hybrid approach to MEMS reliability assessment
Author(s): James L. Zunino; Donald R. Skelton; Wei Han; Ryszard J. Pryputniewicz
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Metal contact reliability of RF MEMS switches
Author(s): Qing Ma; Quan Tran; Tsung-Kuan A. Chou; John Heck; Hanan Bar; Rishi Kant; Valluri Rao
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Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches
Author(s): T. Bannuru; S. Narksitipan; W. L. Brown; R. P. Vinci
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Mechanics of thin film adhesion-delamination subjected to residual stress and interfacial adhesion: application to MEMS-RF-switch
Author(s): Ming Fung Wong; Kai-Tak Wan
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A novel technique for extraction of material properties through measurement of pull-in voltage and off-capacitance of beams
Author(s): Jaibir Sharma; Amitava DasGupta
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Cyclic thin film flexible pressure sensor testing
Author(s): Hee C. Lim; James L. Zunino; John F. Federici
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Self-sensing and actuation of CNF and Ni nanowire/polymer composites using electro-micromechanical test
Author(s): Joung-Man Park; Sung-Ju Kim; Pyung-Gee Kim; Dong-Jin Yoon; George Hansen; K. Lawrence DeVries
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Critical comparison of metrology techniques for MEMS
Author(s): Mark G. da Silva; Siebe Bouwstra
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MEMS reliability assessment program: progress to date
Author(s): J. L. Zunino; D. R. Skelton
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Development of a model for predicting dry stiction in microelectromechanical systems (MEMS)
Author(s): A. Hariri; J. W. Zu; R. Ben Mrad
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Optical MEMS: designing for reliability
Author(s): Shanti Bhattacharya
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Process engineering and failure analysis of MEMS and MOEMS by digital holography microscopy (DHM)
Author(s): Frédéric Montfort; Yves Emery; François Marquet; Etienne Cuche; Nicolas Aspert; Eduardo Solanas; Alexandre Mehdaoui; Adrian Ionescu; Christian Depeursinge
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Performance and reliability test of MEMS optical scanners
Author(s): Steffen Kurth; Christian Kaufmann; Ramon Hahn; Jan Mehner; Wolfram Dötzel; Thomas Gessner
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White light interferometric profile measurement system using spectral coherence
Author(s): Gao-Wei Chang; Yu-Hsuan Lin; Zong-Mu Yeh
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Charging effects in spatial light modulators based on micromirrors
Author(s): Ulrike Dauderstädt; Thor Bakke; Peter Dürr; Steffen Sinning; Ingo Wullinger; Michael Wagner; Hubert Lakner
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On the reliability of thermopneumatic actuators with silicon membranes
Author(s): Albert K. Henning
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Testing reliability of MEMS materials in liquids
Author(s): Thomas P. Kuehn; S. Mubassar Ali; Susan C. Mantell; Ellen K. Longmire
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Wafer capping of MEMS with fab-friendly metals
Author(s): Jack Martin
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Simple measurement technique for resonance frequency of micromachined cantilevers
Author(s): Somashekara Bhat; Enakshi Bhattacharya
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Analytical model of a single stage compliant mechanism with flexible lever beam
Author(s): Pezhman A. Hassanpour; William L. Cleghorn; Ebrahim Esmailzadeh; James K. Mills
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A fast model-order reduction algorithm for microelectromechanical devices
Author(s): Rumi Zhang; Peiyu Zhang; Graham A. Jullien
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Development of wireless MEMS sensor for RFID tag and temperature/pressure monitoring
Author(s): Wen Wang; K. Lee; T. Kim; S. Yang
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