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Proceedings of SPIE Volume 6317

Advances in X-Ray/EUV Optics, Components, and Applications
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Volume Details

Volume Number: 6317
Date Published: 29 August 2006
Softcover: 42 papers (394) pages
ISBN: 9780819463968

Table of Contents
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Novel compact spectrophotometer for EUV-optics characterization
Author(s): K. Starke; H. Blaschke; L. Jensen; S. Nevas; D. Ristau; R. Lebert; C. Wies; A. Bayer; F. Barkusky; K. Mann
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GOES N-P SXI in-flight calibration using the Crab Nebula
Author(s): Karl K. Klett; Steven Hill
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Dark-field image of full-field transmission hard x-ray microscope in 8-11 keV
Author(s): Gung-Chian Yin; Fred Duewer; Xianghui Zeng; Alan Lyon; Wenbing Yun; Fu-Rong Chen; K. S. Liang
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Compact x-ray microscopes for EUV- and soft x-radiation with spectral imaging capabilities
Author(s): David Schäfer; Thomas Nisius; Rolf Früke; Stefan Rausch; Marek Wieland; Uli Vogt; Thomas Wilhein
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EUV radiation from gas-puff laser plasma focused by multi-foil optics
Author(s): L. Pina; A. Bartnik; H. Fiedorowicz; R. Havlikova; R. Hudec; A. Inneman; K. Jakubczak; V. Semencova; L. Sveda
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Compact EUV source and optics for applications apart from lithography
Author(s): Armin Bayer; Frank Barkusky; Christian Peth; Holger Töttger; Klaus Mann
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SXR optical diagnostics of capillary discharge plasma
Author(s): L. Pina; A. Jancarek; M. Vrbova; M. Tamas; J. Blazej; R. Havlikova; P. Vrba; G. Tomassetti; A. Ritucci
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At-wavelength figure metrology of total reflection mirrors in hard x-ray region
Author(s): Hirokatsu Yumoto; Hidekazu Mimura; Satoshi Matsuyama; Soichiro Handa; Akihiko Shibatani; Keiko Katagishi; Yasuhisa Sano; Makina Yabashi; Yoshinori Nishino; Kenji Tamasaku; Tetsuya Ishikawa; Kazuto Yamauchi
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Positioning errors of pencil-beam interferometers for long trace profilers
Author(s): Valeriy V. Yashchuk
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Surface gradient integrated profiler for x-ray and EUV optics: 3D mapping of 1m-long flat mirror and off-axis parabolic mirror
Author(s): Y. Higashi; Y. Takaie; K. Endo; T. Kume; K. Enami; K. Yamauchi; K. Yamamura; H. Sano; J. Uchikoshi; K. Ueno; Y. Mori
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X-ray optics for beamlines at Diamond Light Source
Author(s): S. G. Alcock; L. Alianelli; K. J. S. Sawhney
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Air convection noise of pencil-beam interferometer for long trace profiler
Author(s): Valeriy V. Yashchuk; Steve C. Irick; Alastair A. MacDowell; Wayne R. McKinney; Peter Z. Takacs
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Graded multilayers for focusing hard x-rays below 50 nm
Author(s): Ch. Morawe; O. Hignette; P. Cloetens; W. Ludwig; Ch. Borel; P. Bernard; A. Rommeveaux
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Ion-beam sputter deposition of x-ray multilayer optics on large areas
Author(s): Peter Gawlitza; Stefan Braun; Sebastian Lipfert; Andreas Leson
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Reflectivity and stress responses of multilayers upon isothermal treatment
Author(s): C. Borel; C. Morawe; A. Rommeveaux; C. Huguenot; J.-C. Peffen
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Film stress studies and the multilayer Laue lens project
Author(s): Chian Liu; R. Conley; A. T. Macrander
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EUV multilayer mirrors with enhanced stability
Author(s): Nicolas Benoit; Sergiy Yulin; Torsten Feigl; Norbert Kaiser
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Transmittance and reflective coatings for the 50-200-nm spectral range
Author(s): Mónica Fernández-Perea; Juan I. Larruquert; José A. Aznárez; José A. Méndez
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Measurement of zone plate efficiencies in the extreme ultraviolet and applications to radiation monitors for absolute spectral emission
Author(s): John Seely; Glenn Holland; James C. Bremer; Tim Zukowski; Michael Feser; Yan Feng; Benjawan Kjornrattanawanich; Leonid Goray
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Off-plane grazing-incidence fan-groove blazed grating to serve as a high-efficiency spectral purity filter for EUV lithography
Author(s): Leonid I. Goray
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Beryllium and lithium x-ray lenses at the APS
Author(s): Ali Khounsary; Eric M. Dufresne; Kristina Young; Cameron M. Kewish; Andrew N. Jansen
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Tunable highly efficient crystal analyzer based on active optics
Author(s): Klaus Attenkofer; Bernhard W. Adams
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Determination of the transmittance and extinction coefficient of Yb films in the 23-1700 eV range
Author(s): Juan I. Larruquert; Mónica Fernández-Perea; José A. Aznárez; José A. Méndez; Luca Poletto; Denis Garoli; A. Marco Malvezzi; Angelo Giglia; Stefano Nannarone
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Coated photodiode technique for the determination of the optical constants of reactive elements: La and Tb
Author(s): John F. Seely; Yurii A. Uspenskii; Benjawan Kjornrattanawanich; David L. Windt
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Optical constants determination of neodymium and gadolinium in the 3- to 100-nm wavelength range
Author(s): B. Kjornrattanawanich; D. L. Windt; Y. A. Uspenskii; J. F. Seely
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Transmittance and extinction coefficient of Ce films measured in situ in the extreme ultraviolet and soft x-rays
Author(s): Mónica Fernández-Perea; José A. Aznárez; Juan I. Larruquert; José A. Méndez; Luca Poletto; Denis Garoli; A. Marco Malvezzi; Angelo Giglia; Stefano Nannarone
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Construction of an extreme ultraviolet polarimeter based on high-order harmonic generation
Author(s): N. Brimhall; J. C. Painter; M. Turner; S. V. Voronov; R. S. Turley; M. Ware; J. Peatross
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Optical constant measurements of the uppermost layer of a reflection multilayer using reflection and total electron yield spectra
Author(s): Takeo Ejima; Tetsuo Harada; Atsushi Yamazaki
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Thorium dioxide thin films in the extreme ultraviolet
Author(s): Nicole F. Brimhall; Amy B. Grigg; R. Steven Turley; David D. Allred
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Understanding DC-bias sputtered thorium oxide thin films useful in EUV optics
Author(s): William R. Evans; Sarah C. Barton; Michael Clemens; David D. Allred
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Optical constants in the EUV soft x-ray (5÷152 nm) spectral range of B4C thin films deposited by different deposition techniques
Author(s): G. Monaco; D. Garoli; R. Frison; V. Mattarello; P. Nicolosi; M. G. Pelizzo; V. Rigato; L. Armelao; A. Giglia; S. Nannarone
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Determination of the optical constants of amorphous carbon in the EUV spectral region 40-450 eV
Author(s): Yu. A. Uspenskii; J. F. Seely; B. Kjornrattanawanich; D. L. Windt; Ye. A. Bugayev; V. V. Kondratenko; I. A. Artyukov; A. A. Titov; E. T. Kulatov; A. V. Vinogradov
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Development of Mg/SiC multilayer mirrors
Author(s): Go Murakami; Kazuo Yoshioka; Ichiro Yoshikawa
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Narrow-band x-ray imaging for core temperature and density maps retrieval of direct drive implosions
Author(s): Riccardo Tommasini; Jeffrey A. Koch; Nobuhiko Izumi; Leslie A. Welser; Roberto C. Mancini; Jacques Delettrez; Sean P. Regan; Vladimir Smalyuk
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Wave-optical simulations for designing and evaluating hard x-ray reflective optics
Author(s): H. Mimura; S. Matsuyama; H. Yumoto; S. Handa; A. Shibatani; K. Katagishi; Y. Sano; Y. Nishino; M. Yabashi; K. Tamasaku; T. Ishikawa; K. Yamauchi
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High-spatial-resolution scanning x-ray fluorescence microscope with Kirkpatrick-Baez mirrors
Author(s): Satoshi Matsuyama; Hidekazu Mimura; Mari Shimura; Hirokatsu Yumoto; Keiko Katagishi; Soichiro Handa; Akihiko Shibatani; Yasuhisa Sano; Kazuya Yamamura; Yoshinori Nishino; Kenji Tamasaku; Makina Yabashi; Tetsuya Ishikawa; Kazuto Yamauchi
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Evaluation of a modern soft x-ray monochromator with high resolving power over 10,000
Author(s): Haruhiko Ohashi; Yasunori Senba; Eiji Ishiguro; Shunji Goto; Shik Shin; Tetsuya Ishikawa
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Focusing properties of aperiodic zone plates
Author(s): Walter D. Furlan; Juan A. Monsoriu; Genaro Saavedra
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Design and characterization of an UHV compatible artificial channel cut monochromator
Author(s): Suresh Narayanan; Deming Shu; Alec Sandy; Michael Sprung; Curt Preissner; Joseph Sullivan
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Wavefront analysis and beam profiling from 40 eV up to 40 keV
Author(s): Thomas Nisius; David Schäfer; Rolf Früke; Thomas Wilhein
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Thermal and mechanical joints to cryo-cooled silicon monochromator crystals
Author(s): A. MacDowell; S. Fakra; G. Morrison
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ESAD shearing deflectometry: potentials for synchrotron beamline metrology
Author(s): Ralf D. Geckeler
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