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Proceedings of SPIE Volume 6188

Optical Micro- and Nanometrology in Microsystems Technology
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Volume Details

Volume Number: 6188
Date Published: 26 April 2006
Softcover: 50 papers (512) pages
ISBN: 9780819462442

Table of Contents
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Tomography using multiple wavelengths in digital holography: method, simulations, and experiments
Author(s): Frédéric Montfort; Florian Charrière; Tristan Colomb; Jonas Kuehn; Etienne Cuche; Christian Depeursinge
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Digital in-line holography for dynamic micrometrology
Author(s): Vijay Raj Singh; Gopalkrishna Hedge; Anand Krishna Asundi
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Measurements of corner cubes microstructures by high-magnification digital holographic microscopy
Author(s): Jonas Kühn; Etienne Cuche; Yves Emery; Tristan Colomb; Florian Charrière; Frédéric Montfort; Mikhail Botkine; Nicolas Aspert; Christian Depeursinge
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Automatic procedure for aberrations compensation in digital holographic microscopy
Author(s): Tristan Colomb; Jonas Kühn; Etienne Cuche; Florian Charrière; Frédéric Montfort; Anca Marian; Nicolas Aspert; Pierre Marquet; Christian Depeursinge
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Miniaturized low-cost digital holographic interferometer
Author(s): Aneta Michalkiewicz; Małgorzata Kujawinska; Paweł Marc; Leszek R. Jaroszewicz
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Fabrication technique of nanograting using AFM
Author(s): Huimin Xie; Zhanwei Liu; Ming Zhang; Wei Zhang; Anand Asundi
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Continuous writing technique of long gratings for metrological applications
Author(s): Emilie Gamet; Yves Jourlin; Stéphanie Reynaud; Jean-Claude Pommier; Olivier Parriaux
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Pulsed-force mode AFM characterization of photopatterned polymer films for holographic data storage application
Author(s): Olivier Soppera; Safi Jradi; Christiane Carre; Daniel Lougnot
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An integrated approach for photonic crystal inspection and characterization
Author(s): B. Tiribilli; P. Ferraro; S. Grilli; G. Molesini; M. Vannoni; M. Vassalli
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A comparison of surface metrology techniques
Author(s): Mike Conroy; Joe Armstrong
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Interferometric and confocal techniques for testing of silicon wafers
Author(s): J. Galas; D. Litwin; S. Sitarek; B. Surma; B. Piatkowski; A. Miros
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An optical differential probe for measurement of MEMS topography
Author(s): Z. Li; K. Herrmann; F. Pohlenz
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One-shot line-profiling white light interferometer with spatial phase shift for measuring rough surfaces
Author(s): M. Hering; S. Herrmann; M. Banyay; K. Körner; B. Jähne
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Automated variable wavelength interferometry in reflected light mode
Author(s): D. Litwin; J. Galas; N. Blocki
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Application of photoelastic tomography to measurement of refractive indices in optical anisotropic microelements
Author(s): Pawel Kniazewski; Tomasz Kozacki; Malgorzata Kujawinska; Katarzyna Szaniawska; Tomasz R. Wolinski
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Discussion of the finite element method in optical diffraction tomography
Author(s): Julia Lobera; Jeremy Coupland
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Design, modeling, and prototyping of microinterferometric tomography system for optical fiber inspection
Author(s): Rafal Krajewski; Bart Volckaerts; Youri Meuret; Malgorzata Kujawinska; Hugo Thienpont
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Experimental proof-of-principle 3D measurements of micro-objects by digital holographic tomography
Author(s): Agata Jozwicka; Malgorzata Kujawinska
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Metrological scanning probe microscope
Author(s): N. Dorozhovets; T. Hausotte; E. Manske; G. Jäger; N. Hofmann
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Interferometric measurement of thermal expansion coefficients and thermo-optic coefficients in ferroelectric crystals
Author(s): F. Pignatiello; M. De Rosa; P. Ferraro; A. Arie; S. Grilli; L. Sansone; S. De Nicola; P. De Natale
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High-resolution stress measurements for microsystem and semiconductor applications
Author(s): Dietmar Vogel; Juergen Keller; Bernd Michel
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Measurement of thermal expansion of MEMS and electronic components
Author(s): Hans Reinhard Schubach
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Interferometric measurement of thickness of silicon nitride layer in bi-morph silicon MEMS
Author(s): P. Ferraro; M. Paturzo; S. De Nicola; A. Finizio; G. Pierattini; G. Coppola; M. Iodice; V. Striano; M. Gagliardi
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Fabrication, characterization, and reliability study of AlN-driven cantilevers
Author(s): A. Andrei; K. Krupa; M. Jozwik; L. Nieradko; C. Gorecki; L. Hirsinger; P. Delobelle
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Nanometrology for MEMS: combination of optical interference, atomic force microscopy, and nanoindentor-based actuator
Author(s): Marc Jobin; Philippe Passeraub; Raphael Foschia
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Local protein/gene density measurements using SMI microscopy
Author(s): Udo J. Birk; David Baddeley; Christoph Cremer
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X-ray diffraction in optical microsystems technology
Author(s): Giovanni Berti
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Influence of the physico-chemical and photonic parameters on mechanical and optical properties of end-of-fiber polymer tips
Author(s): Safi Jradi; Olivier Soppera; Christiane Carré; Daniel J. Lougnot; Renaud Bachelot; Pascal Royer
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In-process 3D assessment of micromoulding features
Author(s): B. R. Whiteside; R. Spares; P. D. Coates
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Three dimensional optics for three dimensional imaging: physics, fabrication, and computation
Author(s): W. J. Arora; W. Sun; K. Tian; P. Stellman; L. Waller; G. Barbastathis
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Systematic effects in coherence peak and phase evaluation of signals obtained with a vertical scanning white-light Mirau interferometer
Author(s): Peter Lehmann
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Image formation in digital holography
Author(s): Fucai Zhang; Giancarlo Pedrini; Wolfgang Osten
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Aberration-free reconstruction algorithm for high numerical aperture digital hologram
Author(s): Fucai Zhang; Giancarlo Pedrini; Wolfgang Osten
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Reliability engineering: basics and applications for optoelectronic components and systems
Author(s): Marcel Held; Rolf Brönnimann; Philipp M. Nellen; Ling Zhou
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Characterization of cylindrical microlenses in transmitted light and with grazing incidence interferometry in reflected light
Author(s): Jürgen Lamprecht; Norbert Lindlein; Johannes Schwider
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Optical characterization of spherical microlenses: a round robin experiment within the EC Network of Excellence on Micro-Optics (NEMO)
Author(s): Heidi Ottevaere; Johannes Schwider; Jürgen Lamprecht; Jacek Kacperski; Anna Szpak; Lothar Steinbock; Ken Weible; Hugo Thienpont
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Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics (NEMO)
Author(s): H. Ottevaere; N. Destouches; C. Gorecki; T. Kossek; S. Pelli; R. Piramidowicz; P. Szcepanski; M. Kujawinska
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A new fiber optic modular sensing system for pressure, strain, and temperature measurements
Author(s): P. Lesiak; T. R. Wolinski; J. Tul; A. W. Domanski; R. Wisniewski
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A new wireless and miniaturized high-resolution optical displacement sensor
Author(s): Y. Jourlin; O. Parriaux; S. Reynaud; J. C. Pommier; M. Johnson; A. Last; M. Guttmann
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LCOS as a reference element in Twyman-Green laser interferometer
Author(s): Jacek Kacperski; Malgorzata Kujawinska; Michal Jozwik
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Comparison of various optical characterization techniques for the surface analysis of optical-grade germanium infrared materials
Author(s): Heidi Ottevaere; Anna Szpak; Igor Romandic; Jan Van Nylen; Hans Vercammen; Dirk Vyncke; Malgorzata Kujawinska; Hugo Thienpont
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Thermal characterization of power transistors by close-infrared thermography method
Author(s): S. Dhokkar; B. Serio; J. J. Hunsinger; P. Lagonotte
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Fast wavelength-scanning interferometry technique with derivative detection of quadrature signals
Author(s): O. Číp; B. Mikel; J. Lazar
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Characterization of dents and grooves on polymer films using scanning white light interferometry
Author(s): Ivan Kassamakov; Kari Ojala; Ari Salmi; Edward Hæggström; Juha Aaltonen; Arne Huber; Heimo Saarikko; Mathias Österberg; Markku Oinonen
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Characterization of particle contamination for optical application
Author(s): I. Tovena; S. Palmier; S. Garcia; P. Manac'h; E. Sellier
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A novel optical detection system for chromatography applications
Author(s): W. Meulebroeck; H. Ottevaere; K. Scheir; D. Clicq; G. Desmet; H. Thienpont
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Generation of high-order optical vortices
Author(s): Ya. V. Izdebskaya; V. G. Shvedov; A. V. Volyar
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AFM benchmark for the profile characterisation of subwavelength diffractive elements within the EC Network of Excellence on Micro-Optics (NEMO)
Author(s): N. Destouches; H. P. Herzig; W. Nakagawa; H. Ottevaere; J. Pietarinen; S. Reynaud; J. Tervo; S. Tonchev; J. Turunen; J. Van Erps; M. Kujawinska
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Optical system for weld-piece distortion measurement during pulsed laser welding
Author(s): Aleš Gorkic; Matija Jezeršek; Janez Možina; Janez Diaci
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Real-time surface deformations control during laser processing
Author(s): Matija Jezersek; Janez Diaci; Janez Mozina
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